BIRD 7027 Series, Operation Manual

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1
Chapter 1 Introduction
The Bird Precision Pulse Power Sensor for precision semiconductor applications.
General Description
The 7027 Series Power Sensors were designed to bring superb accuracy and
ease of use together for the engineer in the laboratory and semiconductor
fabrication environments. At the calibrated frequencies, these sensors are
capable of 1% accuracy measurements of the gated power within a pulsed
waveform.
Measurement
The 7027 is capable of measuring multi-level pulsed waveforms. It measures the
average power, gated power, rise and fall times of up to four levels (states)
within a pulse period. See
Figure 1
.
Figure 1 Multi-level Pulsed Waveform Measurement
See
Chapter 4 Theory of Operation on page 10
for a complete explanation of
the measurement process.
The input and output connectors of the Bird 7027 Series Power Sensor are Bird
Quick-Change type RF connectors, which allow the sensor to be reconfigured
with other Bird “QC” connectors. See
Figure 2 on page 3
.
Note:
Recalibration is required following any connector changes
to guarantee rated accuracy.