①
Change the Mode to [Low Mode].
②
After the mode is changed, X &Y levels are within 0.8
micron.
③
After 180 degree rotation, X& Y levels stay within 0.8
micron.
↓
See Page 7→
①
Change the Mode to [Low Mode].
②
After the mode is changed, X &Y levels are within 0.8
micron.
③
After 180 degree rotation, 1 of X& Y levels is out of
0.8 micron.
④
Adjust the levels so that both of X &Y levels stay
within 0.8 micron.
↓
See Page 7→
How to calibrate in Low Mode
How to calibrate in Low Mode
①
Change the Mode to [Low Mode].
②
After the mode is changed, 1 of X& Y levels is out of
0.8 micron. Red LED is blinking.
③
Adjust the levels so that both of X &Y levels stay
within 0.8 micron.
↓
See Page 7→
How to calibrate in Low Mode
How to check levels in Low Mode
Rotate 180
degrees
Red LED is blinking
Rotate 180
degrees
Red LED is blinking
Red LED is blinking
Ca
se
1
Ca
se
2
Ca
se
3
