Balzers BG 546 900-T Operating Manual Download Page 1

Page: 1 / 68

Operating manual

BG 800 300 BE / A (0105)

Total pressure gauge and controller

TPG 300

Configuration
Installation
Operation
Technical data

Program,pg48

Summary of Contents for BG 546 900-T

Page 1: ...Operating manual BG 800 300 BE A 0105 1 Total pressure gauge and controller TPG 300 Configuration Installation Operation Technical data Program pg48 ...

Page 2: ...eplate This manual is based on firmware version BG 509 780 F Proceed according to paragraph 4 7 10 to check that your unit is equipped with this or a higher firmware version F or higher Enter the firmware version number of your unit here BG 509 780 The functions described as well as the illustrations and data con tained in this manual are subject to change without notice Intended use Depending on ...

Page 3: ... 4 1 5 Alignment 12 4 2 Front panel 13 4 3 Operating modes 14 4 4 Overview of key entries 15 4 5 sensor mode 16 4 5 1 Switching the measuring circuit on off 16 4 5 2 Measurement range violation 17 4 5 3 Automatic measuring circuit switchover 18 4 5 4 Self monitoring 18 4 5 5 Plug in board identification 19 4 6 set point mode 20 4 7 set up mode 21 4 7 1 Parameter inquiry modification 21 4 7 2 Param...

Page 4: ...8 1 Installation and connection diagram 44 8 2 Data transmission 44 8 2 1 Definitions 44 8 2 2 Flow control 45 8 2 3 Communication protocol 45 8 3 Mnemonics 47 8 3 1 Measured values 48 8 3 2 Switching functions 50 8 3 3 Display 52 8 3 4 Filter time constants 53 8 3 5 Baud rate 54 8 3 6 Storing 54 8 3 7 Auxiliary functions 55 8 3 8 Error messages 56 8 4 Examples of programs 59 9 Accessories Spare p...

Page 5: ...n NOTE Special information on cost effective use Specialists This work may only be carried out by persons with suit able technical training and the necessary experience Press this key briefly Press these keys simultaneously Marking Display response Operating mode effect 2 See page See document Tip recommendation please contact your nearest Balzers Service Center 1 3 General stipulations Since the ...

Page 6: ...responsibility nor warranty if the user or third parties utilize the product not according to the defined use make any kind of changes modifications alterations etc to the product use the product with accessories not listed in the product documentation ...

Page 7: ...lation of the plug in boards 3 A list of all plug in boards suited for the TPG 300 can be found in section 5 3 For detailed information on the plug in boards 3 Interface plug in boards Relay and RS 232 C RS 422 interface e g IF 300A IF 300C Relay and RS 232 C interface e g IF 300B ...

Page 8: ...easurement plug in boards Dual Pirani e g PI 300D Cold cathode e g PE 300C9 PE 300T10 PE 300DC10 Pirani cold cathode combined e g CP 300C9 TPR 010 TPR 017 TPR 018 IKR 050 IKR 060 IKR 070 TPR 010 TPR 017 TPR 018 IKR 050 IKR 060 IKR 070 ...

Page 9: ... 1 Mains power connection You can connect the TPG 300 without voltage adaptation to any conventional supply system section 5 1 The power connector may only be plugged into a socket with a protective ground Only three pin mains cables with a correctly connected protective ground may be used This protection must not be nullified by an extension cable without ground conductor To assure continuous gro...

Page 10: ...g in board Units with PI 300D and PE 300 measurement plug in boards The cold cathode measuring circuit is controlled by the Pirani measuring circuit TPR 2 The controlling Pirani gauge and the controlled cold cathode gauge must both be connected to the same vacuum chamber to guarantee efficient operation No measuring circuit assignment is activated by all other factory configurations 3 2 2 Installi...

Page 11: ...old rack frames constructed according to the Balzers standard Older units Balzers standard are to be installed in the same rack frame as the TPG 300 DIN a special adapter must be used section 9 6 3 5 Use as bench top unit Take into account the ambiance conditions section 5 2 The ventilation must not be obstructed Use the cover and the hinged feet 2 62 ...

Page 12: ... the measurement value of the first measuring circuit in opera tion is displayed 4 1 2 Gas type dependence The measured pressure depends on the gas type present It is referenced to nitrogen N2 For other gases please refer to the characteristic curves shown in the appendix of 3 4 1 3 Validity of displayed data If you intend to use the measurement results for control functions allow for the time con...

Page 13: ...t group TPG 300 1 2 3 4 A B mbar A1 PE Err 0 10 Unit of measurement Selected sensor display Error signal Select sensor for display of measured data Status of switching function lights if status ON Change to SET POINT mode Measured value display Overange underrange Identification of plug in board Status display lights of cold cathode gauge Change to SET UP mode Mantissa Exponent ...

Page 14: ...nsor Pressure measurement Selection of the measuring circuit Switching gauges on off set point Display of the switching function parameters set up Display of the unit parameters Modification of the unit parameters sensor set point set up Optional c ode input a fter a p p rox 1 m inute Power on ...

Page 15: ...de Change to set up mode Select next switching function in set point Change to sensor mode Change to set up mode Select next group in set up Select next function in set up if existing Modify the selected parameter Change to sensor mode In order to avoid unintentional entries certain operations require combined key activation operating information on front panel It is important how ever that sensor...

Page 16: ...ep and funct Manual on off switching has priority over the automatic control Measured value 1 2 3 4 A B mbar A1 0 10 Plug in board identification 1 2 3 4 A B A1 0 10 Switch on cold cathode gauges at pressures 10 3 mbar only in order to prevent excessive contamination of the gauges When the cold cathode measuring circuit is switched on the LED PE on the front panel lights up Pirani gauges are not d...

Page 17: ...is play changes over automatically Overrange 1 2 3 4 A B mbar B1 PE 0 10 Underrange 1 2 3 4 A B mbar B1 PE 0 10 If the upper measuring range limit is exceeded the cold cathode gauge can become contaminated if it re mains switched on If the under range control is switched off section 4 7 5 the system cannot distinguish between a gauge failure cable interruption and underrange of a cold cathode meas...

Page 18: ...r threshold Measured value or e g 1 2 3 4 A B B1 0 10 Automatic control Au cold cathode measuring circuit waits for the fulfillment of the power on condition by the Pirani measuring circuit 4 5 4 Self monitoring If the cold cathode measuring circuit is self monitored it automatically switches off when the measured value exceeds the upper threshold The measuring circuit must be restarted manually R...

Page 19: ...ld cathode measuring circuit 1 10 10 mbar automatic operation Cold cathode measuring circuit 10 11 mbar automatic operation PE 9 PE 10 PE 11 Cold cathode measuring circuit 5 10 9 mbar Cold cathode measuring circuit 1 10 10 mbar Cold cathode measuring circuit 10 11 mbar PI PI l PI n PI ln Pirani measuring circuit Pirani measuring circuit for long cables Pirani measuring circuit for nickel filament ...

Page 20: ...y back to sensor mode measuring mode Assignment of switching function to meas uring circuit With set point you can read cyclically the threshold values and assignments of the switching functions 1 2 3 4 A B mbar A1 0 10 The function of the measuring circuits is not influenced The current status of the switching functions is not displayed but they work nevertheless With set up you can go directly t...

Page 21: ... groups group and functions funct Select the parameter to be displayed in the set up mode Push the group or funct key Modify the parameter by pushing the step key 4 7 2 Parameter overview Comments to the following table Groups functions or parameters which do not exist because of the unit configuration will be bypassed Inputs in groups functions and parameters always work cy clically In case of er...

Page 22: ...wer upper Threshold 1st digit mantissa 1 9 Threshold 2nd digit mantissa 0 9 Threshold exponent 11 3 Measuring circuit assignment A1 A2 B1 B2 none PE measuring circuit underrange control Control 0 disabled 1 enabled Measurement unit mbar Torr Pa Measurement unit selection mbar Torr Pa Filter Filter assignment A1 A2 B1 B2 A1 A2 B1 B2 Filter time constant 1 fast 2 medium 3 slow ...

Page 23: ...rage Parameter program selection u user Code 00 0 99 19 H hotstart Code 00 0 99 19 d default Storage save Time for consideration Test programs Test program selection dI display rA RAM EP EPROM EE EEPROM Ad A D converter Channel selection A0 A7 Io keys rS interface Pn program number Test t test start ...

Page 24: ...ar Switching function 4 1 0 10 11 mbar Switching function A 6 0 10 3 mbar Switching function B 6 0 10 3 mbar Upper threshold Switching function 1 9 0 10 11 mbar Switching function 2 9 0 10 11 mbar Switching function 3 9 0 10 11 mbar Switching function 4 9 0 10 11 mbar Switching function A 8 0 10 3 mbar Switching function B 8 0 10 3 mbar Measuring circuit assign ment Switching function 1 none Switc...

Page 25: ...dium Measuring circuit B1 2 medium Measuring circuit B2 2 medium Baud rate 9 9600 Immediate start up Measuring circuit A1 no Measuring circuit A2 no Measuring circuit B1 no Measuring circuit B2 no Code 00 0 unlocked For measuring circuit assignments configured at the factory as user parameters for units with medium and high vacuum measuring circuits that are ready for op eration section 3 2 1 ...

Page 26: ...erface plug in board relay 4 Cold cathode measuring circuit s in slot A Cold cathode measuring circuit s in slot B b Threshold selection function Defining an upper and a lower threshold defines a hysteresis for each switching function 1 2 3 4 A B mbar 0 10 When the pressure is dropping the status changes to on at the lower threshold and to off at the upper threshold OFF ON Status of switching func...

Page 27: ...le depends on the plug in boards installed Available measuring circuits are indicated by an LED The upper and lower thresholds of switching functions 1 4 cannot be assigned to different measuring circuits The last entry made applies The upper and lower thresholds of switching functions A and B can be assigned to different measuring circuits section 4 5 4 The LED for the assigned measuring circuit ...

Page 28: ...error the switching function changes to off The switching function does not change to on until the measured value has remained within the measurement range of the cold cathode measuring circuit for at least 10 seconds Cold cathode measuring circuits for 10 11 mbar sometimes require more than 10 seconds for the transition OverRng ð UnderRng and thus lead the switching function being on for a short ...

Page 29: ...stalled b Filter time constant function Three filter time constants are available In the case of signal fluctuations a faster filter can cause fluttering of switching functions 1 2 3 4 A B A1 0 10 Display Filter Time constant FI 1 FI 2 FI 3 fast medium default slow 16 ms 160 ms 1 6 s Any modification is made immediately The analog outputs are not affected 4 7 8 Interface group a Baud rate function...

Page 30: ... default factory set parameters SAve de faults By activating the immediate start up a measuring circuit can be automatically re enabled after a power failure This is particularly useful in the case of self monitoring The immediate start up is jointly activated for all measur ing circuits The measuring circuit must however be switched on during storage At SA u and SA H the unit can be locked by a c...

Page 31: ... do not wish to modify the lock then push funct three times Pushing step until the bar graph is completely dark causes the parameters to be stored When the storage process is finished the bar graph lights again After storing your unit will work with the newly stored pa rameter set If you release step before the bar graph is completely dark time for consideration nothing will be stored Code 0 TPG c...

Page 32: ...erter Channel 0 Channel 1 Channel 2 Channel 3 Channel 4 Channel 5 Channel 6 Channel 7 Keys RS 232 C interface Program number The display test lights first all LEDs together and then in dividually The RAM routine tests the two kByte of the RAM A check sum is formed and controlled in both the EPROM and EEPROM test You must enter the channel 0 7 when running the A D converter test A D input voltage d...

Page 33: ...pushing funct or group All the other tests run through once When they are finished a line appears in the exponent display You can stop the dI by pushing step and start it again as often as you like c Program version function BG 509 780 F Modification index You can read out the program version of your unit by con ducting the corresponding test Pn A program with a higher modification index will even...

Page 34: ... C decreasing to 50 at 40 C Use indoors only Height up to 2000 m Protection IP 40 Safety EN 61010 93 IEC 1010 90 A1 92 Class I Pollution degree 2 EMC Emission EN 50081 1 92 Immunity EN 50082 2 95 5 3 Basic unit Measurement range depending on the measurement plug in boards used 3 Length of gauge cable depending on the measurement plug in boards used 3 Measurement rate 100 per s Display rate 5 per s...

Page 35: ...C10N CP 300T10 CP 300T10N CP 300T10L CP 300T10LN CP 300T11 CP 300T11N CP 300T11L CP 300T11LN Compatible interface plug in boards IF 300A IF 300B IF 300C 5 4 Dimensions and weight Dimensions sensor set point sensor off sensor on set up step funct group TPG 300 1 2 3 4 A B mbar Torr Pa A1 A2 B1 B2 PE PE Err 0 10 141 9 235 2 5 128 4 Weight 1 35 kg without plug in boards 5 5 Plug in boards Technical d...

Page 36: ...hing Err LED 1 2 3 4 A B mbar A2 Err 0 10 Display Possible cause Correction dt 3 Watch Dog timer overflow due to strong external influ ence electromagnetic funct If this error occurs frequently replace the basic unit EE 3 Error during parameter reading Store default or user parameters section 4 7 9 EEPROM defective EP 3 EPROM defective Id 3 Operating system overloaded funct IF 3 Interface plug in ...

Page 37: ...program Interface defective Replace interface plug in board 2 SE 4 TPR gauge not connected Connect gauge Break in TPR cable Replace cable TRR gauge defective Replace gauge So 3 Stack overflow funct 2 Please read the information in section 3 2 2 before per forming any manipulations on the plug in boards 3 Fatal error 4 Fault in measuring circuit LED of the corresponding measure ment circuit flashes...

Page 38: ...gized in the event of a fault in the assigned measuring circuit a fatal error Contact 5 Error status is de energized in the event of a fault in a measuring circuit a fatal error Additional information on relay contact states 3 6 2 Troubleshooting 6 2 1 Installation problems Problem Possible cause Correction The control unit cannot be installed into the rack Old rack system Use a rack mount adapter...

Page 39: ...suring circuit Clean the gauge 4 6 Replace the gauge Pirani measurement circuit cannot be cali brated Combination measurement plug in board gauge cable gauge is not compatible Select correct combination 3 Pirani gauge severely contaminated Clean the gauge 4 6 Replace the gauge Cold cathode pressure display too high Contaminated or moist connector in sulation Clean or replace connector Humidity Þ l...

Page 40: ...ds approx 1 cm out of the slots A and B 2 2 Select the code in set up mode 3 Read out the code 4 Reinstall the measurement plug in boards 2 2 Please read the instructions in 3 2 2 before performing any manipulations on the plug in boards 6 2 3 Failures Problem Possible cause Correction No display appears when the unit is switched on No mains power Check mains Fuse defective Replace fuse section 6 ...

Page 41: ...he back panel Pull out the back panel together with the plug in boards just far enough to make the fuses accessible Replace the fuses Make sure to replace fuses with fuses of the recom mended type and nominal current strength 2 62 It is not permissible to use mended fuses or to short circuit the fuse holder Reassemble in reverse order Put the screw lockings in place again and tighten the screws If...

Page 42: ...y of the work described below For cleaning the outside of the unit a slightly humid cloth will usually do Do not use under any circumstances an aggressive or scouring leaning agent No water must get into the unit Before putting the unit into operation again allow it to dry thoroughly In a very dusty environment the dust inside the unit should be periodically removed Carefully remove the dust with ...

Page 43: ... the electronics of the TPG 300 from static electricity Procedure 1 Store default values 2 30 2 Switch the unit off and wait one minute 3 Detach all cables from the unit mains cable last 4 Unscrew the front panel assembly and remove it fig 1 5 Carefully remove the old EPROM 6 Install the EPROM correct polarity fig 2 7 Carefully slide the front panel assembly back plug it in and screw it down 8 Re ...

Page 44: ...ther direction 8 2 1 Definitions The following abbreviations and symbols are used Symbol Meaning HOST Computer or terminal Non mandatory elements ASCII American Standard Code for Information Interchange ASCII Dec Hex ETX END OF TEXT CTRL C Reset of interface 3 03 CR CARRIAGE RETURN Carriage return 13 0D LF LINE FEED Line feed 10 0A ENQ ENQUIRY Request to send 5 05 ACK ACKNOWLEDGE Positive confirma...

Page 45: ...0 Explanation Mnemonics and parameters ÄÄÄ CR LF ÄÄÄÄÄÄÄÄÄÄÄÄÄÄ Receives message with end of message ÄÄÄÄÄÄÄÄÄÄ ACK CR LF Positive acknowledgment of a received message Receive format When required with a mnemonic the TPG 300 transmits the measurement data or parameters as an ASCII strings to the HOST ENQ must be sent to request the transmission of an ASCII string Additional strings according to th...

Page 46: ...ed after the ERROR word has been read Error recognition protocol HOST TPG 300 Explanation Mnemonics and parameters ÄÄÄ CR LF ÄÄÄÄÄÄÄÄÄÄÄÄÄÄ Receives message with end of message Transmission or programming error ÄÄÄÄÄÄÄÄÄÄ NAK CR LF Negative acknowledgment of a received message Mnemonics and parameters ÄÄÄ CR LF ÄÄÄÄÄÄÄÄÄÄÄÄÄÄ Receives message with end of message ÄÄÄÄÄÄÄÄÄÄ ACK CR LF Positive ackno...

Page 47: ...1 SP2 SP3 SP4 SPA SPB SPS Set point 1 Set point 2 Set point 3 Set point 4 Set point A Set point B Set point status Switching function 1 Switching function 2 Switching function 3 Switching function 4 Switching function A Switching function B Switching function status UNI Unit of measurement Pressure FIL Filter time constant Filter time constants BAU Baud rate SAV Save parameters Store set of parame...

Page 48: ...ircuit A2 2 Ä automatic ÀÄÄ Measuring circuit A1 3 Ä on Receive ACK CR Send ENQ Receive x x x x CR LF ÀÄÄ Status measuring circuit B2 ÀÄÄ Status measuring circuit B1 ÀÄÄ Status measuring circuit A2 ÀÄÄ Status measuring circuit A1 Pressure measurement Send Pxx CR LF Pressure sensor ÀÄÄ A1 Pressure measuring circuit A1 A2 Pressure measuring circuit A2 B1 Pressure measuring circuit B1 B2 Pressure mea...

Page 49: ... to 1 4E 3 ÀÄÄ Status x 0 Ä Measurement data okay 1 Ä Underrange 2 Ä Overrange 3 Ä Measuring circuit error 4 Ä Measuring circuit switched off 5 Ä No hardware PE underrange control Send PUC x CR LF PE underrange control ÀÄÄ Control x 0 Ä off 1 Ä on Receive ACK CR Send ENQ Receive x CR LF ÀÄÄ Underrange control ...

Page 50: ...uring circuit A2 3 Ä Measuring circuit B1 4 Ä Measuring circuit B1 5 Ä Measuring circuit A1 6 Ä Measuring circuit A2 7 Ä Measuring circuit B1 8 Ä Measuring circuit B1 ÀÄÄ upper threshold 9 9E 3 1 0E 11 ÀÄÄ lower threshold 9 9E 3 1 0E 11 ÀÄÄ 1 Switching function 1 2 Switching function 2 3 Switching function 3 4 Switching function 4 A Switching function A B Switching function B for self monitoring w...

Page 51: ...ment ÀÄÄ upper threshold ÀÄÄ lower threshold Switching function status Send SPS CR LF Set point status Receive ACK CR Send ENQ Receive x x x x x x CR LF ÀÄÄ Switching function B x 0 Ä off ÀÄÄ Switching function A 1 Ä on ÀÄÄ Switching function 4 ÀÄÄ Switching function 3 ÀÄÄ Switching function 2 ÀÄÄ Switching function 1 ...

Page 52: ... BE A 0105 TPG 300 52 8 3 3 Display Unit of measurement pressure Send UNI x CR LF Unit of measurement ÀÄÄ Unit of measure x 1 Ä mbar 2 Ä Torr 3 Ä Pa Receive ACK CR Send ENQ Receive x CR LF ÀÄÄ Unit of measurement ...

Page 53: ... ÀÄÄ Measuring circuit B2 x 1 Ä fast ÀÄÄ Measuring circuit B1 2 Ä medium ÀÄÄ Measuring circuit A2 3 Ä slow ÀÄÄ Measuring circuit A1 Receive ACK CR Send ENQ Receive x x x x CR LF ÀÄÄ Filter measuring circuit B2 ÀÄÄ Filter measuring circuit B1 ÀÄÄ Filter measuring circuit A2 ÀÄÄ Filter measuring circuit A1 ...

Page 54: ... baud 4 Ä 4800 baud 9 Ä 9600 baud Receive ACK CR LF Send ENQ Receive x CR LF ÀÄÄ Baud rate 8 3 6 Storing Send SAV x CR LF Save parameters ÀÄÄ Set of parameters x 0 Ä Default parameters 1 Ä User parameters 2 Ä User parameters with immediate start up users hotstart Receive ACK CR LF Send ENQ Receive x CR LF ÀÄÄ Set of parameters ...

Page 55: ...thout entering a code 1 1998 Ä TPG can be operated when a corresponding code is entered 1999 Ä TPG can be operated only when this particular code is entered code cannot be modified Receive ACK CR LF Send ENQ Receive xxxx CR LF ÀÄÄ Code key Program version Send PNR CR LF Program number Receive ACK CR Send ENQ Receive BG xxxxxx CR LF ÀÄÄ Program version ...

Page 56: ...fication Receive ACK CR Send ENQ Receive x x x CR LF ÀÄÄ Identification slot C ÀÄÄ Identification slot B ÀÄÄ Identification slot A x i e NO P no plug in board PI300 DL Test programs for Balzers Service 8 3 8 Error messages Error status Send ERR CR LF Error status Receive ACK CR Send ENQ ...

Page 57: ...the host S E S E TID CR LF ACK CR LF ENQ PI 300DL PE 300 10 IF 300 CR LF Request for TPG identification Positive acknowledgment Inquiry Plug in board types S E S E SEN CR LF ACK CR LF ENQ 3 3 1 0 CR LF Request for sensor status Positive acknowledgment Inquiry Sensor status S E S E SPB CR LF ACK CR LF ENQ 1 0E 11 9 0E 11 0 CR LF Request for parameter of switching function B Positive acknowledgment ...

Page 58: ...F Request check of sensor status Positive acknowledgment Inquiry Sensor status report S E SAV 1 CR LF ACK CR LF Store modified set of parameters Positive acknowledgment S E S E S E PA2 CR LF ACK CR LF ENQ 0 8 3E 3 CR LF ENQ 1 8 0E 4 CR LF Pressure measurement measuring circuit A2 Positive acknowledgment Inquiry Status and pressure measurement Inquiry Status and pressure measurement S E S E PB1 CR ...

Page 59: ...8 CS DS CD AS 1 21 REM Eroeffnet COM1 mit 9600 bps keine Paritaet und acht Daten Bits 22 REM CTS DSR und CD werden nicht geprueft 23 REM 30 ACK CHR 6 ENQ CHR 5 LF CHR 10 100 LINE INPUT Mnemonics m 101 REM Lesen der Nachrichten von der Tastatur die Kommas 102 REM oder andere Trennzeichen enthalten koennen 103 IF m END THEN GOTO 300 110 PRINT 1 m 111 REM Sendet die Nachricht zum TPG300 120 LINE INPU...

Page 60: ...FATAL ERROR E E 1000 240 IF e 99 THEN PRINT NO HARDWARE E E 100 250 IF e 9 THEN PRINT PARAMETER ERROR E E 10 260 IF e THEN PRINT SYNTAX ERROR 270 PRINT 280 GOTO 100 300 END 10 REM 11 REM AVMTPG BAS Abfrage von Messwerten 7 August 1987 soro 12 REM 13 REM Creation Date 7 August 1987 14 REM Author R Sonderegger Abt EEM 15 REM Version V00 01 16 REM Modification 17 REM Contents 18 REM 19 REM 20 OPEN CO...

Page 61: ...atus 320 GOSUB 1000 REM Kommunikationsprotokoll 330 PRINT 1 ENQ REM Aufforderung zur Datenuebertragung 340 INPUT 1 r1 r2 r3 r4 ra rb REM Lesen des Status 350 PRINT USING R1 R2 R3 R4 RA RB r1 r2 r3 r4 ra rb 999 GOTO 100 1000 REM Kommunikationsprotokoll 1010 LINE INPUT 1 a REM Wartet auf die Quittierung der Nachricht 1020 IF INSTR a ACK THEN FOR J 1 TO 200 NEXT J RETURN REM Zeit 2mS LF 1021 REM Bei ...

Page 62: ...ug in boards For ordering numbers of the compatible measurement and interface plug in boards c f section 5 3 3 9 3 Mains cables Ordering number Mains cable Swiss standard Type 432 2 5 m Mains cable Schuko DIN Type 436 2 5 m Mains cable USA Type 439 1 2 5 m Mains cable UK GB Type UD 13 AI 2 5 m B 4564 309 YP B 4564 309 YT B 4564 309 YW B 4564 309 YZ EU standard appliance connector for making power ...

Page 63: ...tion in a rack Ordering number 19 rack frame kit DIN 41 494 3HE 84TE for new submodules for combination with older units Balzers standard without front profile noses 2 pairs of fixing bars tapped at 5 08 and 17 5 mm BG 544 083 T BG 544 082 T Blank plate 1 2 rack 3HE 42TE Blank plate 1 3 rack 3HE 28TE Blank plate 1 6 rack 3HE 14TE BG 544 781 T BG 544 780 T BG 544 779 T ...

Page 64: ...ge Err EE EP Test program error message Err Test program error message Err FI Filter Id IF Io Error message Error message Test program error message Err or Overrange PE PI Pn Cold cathode measuring circuit identification Pirani measuring circuit identification Test program rA rS Test program error message Err Test program error message Err SA SE So Parameter storage Error message Error message ur ...

Page 65: ...ng instructions TPR 017 Pirani gauge head BG 800 317 BE 2nd edition 6 1991 Balzers AG 9496 Balzers Fürstentum Liechtenstein 6 Operating instructions TPR 018 Pirani gauge head BG 800 318 BE 2nd edition 6 1991 Balzers AG 9496 Balzers Fürstentum Liechtenstein 7 Operating manual IKR 050 Cold cathode gauge DN 25 flange BG 803 030 BE 9502 Balzers AG 9496 Balzers Fürstentum Liechtenstein 8 Operating manu...

Page 66: ...lter assignment 29 filter time constant 29 overview 21 parameter set 30 program version 33 save 30 test 33 test program selection 32 G Gas type dependence 12 Gauge cables 63 switching off 18 Gauges 63 Group filter 29 interface 29 measurement unit 28 overview 21 parameter storage 30 PE measurement underrange ctrl 28 test program 32 I Immediate start up 30 Installation 9 Installation in a rack 63 In...

Page 67: ...hanging the 14 Operating modes 14 Overview default parameters 24 functions 21 groups 21 key entries 15 operating modes 14 parameters 21 system 7 P Parameters default 24 30 storage 30 Plug in boards 62 identification 19 installing removing 10 Program version 2 55 R RS 232 C interface see Interface 44 S Safety 5 Slots 7 35 Spare parts 62 Static electricity 5 System overview 7 T Technical data 34 Tem...

Page 68: ...vormals Balzers Aktiengesellschaft LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German BG 800 300 BD A reach liechtenstein inficon com bg800300be a www inficon com ...

Search results

Summary of Contents for BG 546 900-T

Reviews:

Related manuals for BG 546 900-T

Brands by name

Popular brands

Balzers BG 546 900-T, Operating Manual

Search results

Summary of Contents for BG 546 900-T

Reviews:

Related manuals for BG 546 900-T

Brands by name

Popular brands