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16 Instructions for Use
Installation
326/400
TPS-mobile User Manual / 87-901-005-01 (F)
If TPS-mobile is equipped with turbo-molecular pumps of smaller or
the same size as TwisTorr 304 FS, the pump can be turned on even if
installed on TPS-mobile. If TPS-mobile is equipped with pumps of
sizes bigger than 304 FS, it can be used only to enable the pump
(turbo pump off) that must be installed by means of its inlet flange in
the customer’s system prior to activate TPS
-mobile.
FLANGE
FIXING DEVICE
N.
FIXING TORQUE
ISO 63
M10 clamps
4
22 Nm
ISO 100 K
M10 clamps
4
22 Nm
ISO 160 K
M10 clamps
4
22 Nm
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
NOTE
The TPS-mobile cannot be fixed by means of its base.
For installation of optional accessories, see "Technical Information".
Summary of Contents for TPS-mobile 9698403
Page 3: ...TPS mobile TPS mobile User Manual 87 901 005 01 F 3 400 TPS mobile...
Page 4: ...TPS mobile 4 400 TPS mobile User Manual 87 901 005 01 F...
Page 34: ...1 Istruzioni per l uso Smaltimento 34 400 TPS mobile User Manual 87 901 005 01 F...
Page 56: ...2 Gebrauchsanleitung Entsorgung 56 400 TPS mobile User Manual 87 901 005 01 F...
Page 156: ...7 Istruktionsbog Bortskaffelse 156 400 TPS mobile User Manual 87 901 005 01 F...
Page 176: ...8 Bruksanvisning Bortskaffning 176 400 TPS mobile User Manual 87 901 005 01 F...
Page 196: ...9 Instruksjon Manual Kassering 196 400 TPS mobile User Manual 87 901 005 01 F...
Page 216: ...10 Ohjek sikirja H vitt minen 216 400 TPS mobile User Manual 87 901 005 01 F...
Page 276: ...13 N vod k Pou it Likvidace 276 400 TPS mobile User Manual 87 901 005 01 F...
Page 296: ...14 N vod na Obsluhu Likvid cia 296 400 TPS mobile User Manual 87 901 005 01 F...
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