Agilent Technologies R1330-529 HS-16, Instruction Manual Supplement

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Diffusion Pumps for Applied Film Coating Systems
1
General
This document supplements the standard instruction manuals for the HS-16, HS-20, and
NHS-35 diffusion pumps, which are customized for Applied Films coating systems. Please
refer to the standard instruction manuals for general information regarding safety
considerations, installation, operation and maintenance. This supplement contains
information regarding special spare parts and electrical wiring schematics that are unique to
these pumps. The standard instruction manual can be purchased through Varian Vacuum
Technologies Inc. if needed. Please use the following part numbers when ordering:
Replacement Parts
Table 2 on page 2 lists the replacement parts that are not covered by the standard
instruction manual. Please refer to the standard instruction manual for any part that is not
shown on this list, or contact the factory for technical assistance. Figure 1 on page 3 shows
the location of the replacement parts on the diffusion pump.
Electrical Wiring
Electrical power is supplied to the pump through a power module mounted on the side
panel of the electrical box. The connector manufacturer and part number is:
Wieland Electric Inc.
Housing P/N 70.320.1628.0
Plug Insert P/N 72.210.0653.0
Output from the PT-100 oil temperature measurement device and the thermal switch
(mounted above the electrical box) is fed through connectors mounted on the side panel of
the electrical box. The thermostat switch leads are also run through a connector. The
connector manufacturer and part number is:
Schaltbau GMBH
Receptacle with Flange P/N 1-1401-594-050
6 Pole + PE Pin Insert P/N 1-1401-119-648
Table 1 Diffusion Pump Instruction Manual Part Number
Diffusion Pump Instruction Manual
Part Number
HS-16 (R1330-529) 699901116
HS-20 (R1797-301) 699901120
NHS-35 (R1333-539 & -543) 699901135