Agilent Technologies R1330-529 HS-16 Instruction Manual Supplement Download Page 20

Varian Vacuum Technologies 

Sales and Service Offices

01/03

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel:(54) 1 783 5306
Fax:(54) 1 786 5172

Benelux

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel:(31) 343 469910
Fax:(31) 343 469961

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel:(55) 11 3845 0444
Fax:(55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel:(781) 861 7200
Fax:(781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel:(86) 10 6641 1530
Fax:(86) 10 6641 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel:(33) 1 69 86 38 13
Fax:(33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel:(49) 6151 703 353
Fax:(49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel:(91) 11 5548444
Fax:(91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel(39) 011 997 9 111
Fax(39) 011 997 9 350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel:(81) 3 5232 1253
Fax:(81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Building 2F
966-5 Daechi-dong 
Kangnam-gu, Seoul
Korea 135-280
Tel:(82) 2 3452 2452
Fax:(82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel:(52) 5 523 9465
Fax:(52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd. 

14F-16 No.77, Hsin Tai Wu Road Sec. 1, 
Hsi Chih, Taipei Hsien
Taiwan, R.O.C.
Tel:(886) 2 2698 9555
Fax:(886) 2 2698 9678

UK and Ireland 

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel:(44) 1932 89 8000
Fax:(44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel:(781) 861 7200
Fax:(781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel:(39) 011 997 9111
Fax:(39) 011 997 9350

Internet Users:

Customer Service and Technical Support:

[email protected]

Worldwide Web Site:

www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

Summary of Contents for R1330-529 HS-16

Page 1: ...3 NHS 35 vacuum technologies Diffusion Pumps for Applied Film Coating Systems Manual Number 699950040 Revision A March 2003 NOTICE This document contains references to Varian Please note that Varian I...

Page 2: ...uum Technologies Diffusion Pumps for Applied Film Coating Systems VacuSolv is a trademarks of Varian Vacuum Technologies Apiezon is a registered trademark of M I Materials Ltd Alconox is a registered...

Page 3: ...cluding representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller...

Page 4: ...d and maintained by trained personnel Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Varian Vacuum Techno...

Page 5: ...ngs that will come in contact with the spectrometer tube Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces the O ring s ability to hold a vacuum In all...

Page 6: ...t Varian Vacuum Technologies Customer Service at 1 800 8VARIAN Internet users Send email to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc...

Page 7: ...ual for any part that is not shown on this list or contact the factory for technical assistance Figure 1 on page 3 shows the location of the replacement parts on the diffusion pump Electrical Wiring E...

Page 8: ...he electrical box For the wiring schematic of the heaters to the terminal strip please refer to the standard instruction manual or the wiring label on the inside cover of the electrical box Figure 5 o...

Page 9: ...Diffusion Pumps for Applied Film Coating Systems 3 Figure 1 Supplemental Replacement Part Location...

Page 10: ...Diffusion Pumps for Applied Film Coating Systems 4 Figure 2 HS 16 Wire Schematic...

Page 11: ...Diffusion Pumps for Applied Film Coating Systems 5 Figure 3 HS 20 Wire Schematic...

Page 12: ...Diffusion Pumps for Applied Film Coating Systems 6 Figure 4 NHS 35 Wire Schematic 480V 400V...

Page 13: ...s for Applied Film Coating Systems 7 Figure 5 Power Module Pin Assignments Figure 6 ATHf 20 Switch and Thermostat Wire Harness Pin Assignments Figure 7 PT 100 Wire Harness Pin Assignments 1 2 3 4 5 6...

Page 14: ...Diffusion Pumps for Applied Film Coating Systems This page intentionally left blank...

Page 15: ...the customer is held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees occurring as a result of exposure to toxic...

Page 16: ...ONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area O...

Page 17: ...Returned Materials Report...

Page 18: ......

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Page 20: ...House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax...

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