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Diffusion Pumps for Applied Film Coating Systems
v
O-ring Care
When removing, checking, or replacing O-rings, keep in mind the following:
NOTE
Varian Vacuum Technologies recommends replacing all
O-rings during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. Follow these guidelines to prevent scratching
of any sealing surfaces:
❑
Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑
Do not use grease or use other substances on O-rings that
will come in contact with the spectrometer tube.
❑
Do not use alcohol, methanol, or other solvents on O-rings.
To do so causes deterioration and reduces the O-ring’s
ability to hold a vacuum.
❑
In allowable situations, apply a small amount of Apiezon
®
L
grease and wipe the O-rings “shiny” dry.
NOTE
Included in the Varian Vacuum Technologies’ Component and
Spectrometer Tube Cleaning Kit (p/n 670029096), VacuSolv is
recommended for cleaning the spectrometer tube components.
VacuSolv can also be used for fine cleaning of other parts in the
leak detector’s vacuum system, such as valves and fittings. No
rinsing steps or high-temperature drying is required following
cleaning with VacuSolv. Although appropriate precautions are
advised, VacuSolv is compatible with most materials and does
not contain toxic chemicals or CFCs (chlorofluorocarbons).
Summary of Contents for R1330-529 HS-16
Page 10: ...Diffusion Pumps for Applied Film Coating Systems 4 Figure 2 HS 16 Wire Schematic...
Page 11: ...Diffusion Pumps for Applied Film Coating Systems 5 Figure 3 HS 20 Wire Schematic...
Page 12: ...Diffusion Pumps for Applied Film Coating Systems 6 Figure 4 NHS 35 Wire Schematic 480V 400V...
Page 14: ...Diffusion Pumps for Applied Film Coating Systems This page intentionally left blank...
Page 17: ...Returned Materials Report...
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