Agilent Technologies R1330-529 HS-16, Instruction Manual Supplement

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10
Diffusion Pumps for Applied Film Coating Systems
DRAFT 3/17/03
RequestForReturnRevM.doc 22 March 2001 Pg. 2 of 2
Request for Return
Health and Safety Certification
FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
TURBO PUMPS and TURBOCONTROLLERS
CLAIMED DEFECT POSITION PARAMETERS
❐
Does not start
❐
Noise
❐
Vertical
Power: Rotational Speed:
❐
Does not spin freely
❐
Vibrations
❐
Horizontal
Current: Inlet Pressure:
❐
Does not reach full speed
❐
Leak
❐
Upside-down
Temp 1: Foreline Pressure:
❐
Mechanical Contact
❐
Overtemperature
❐
Other:
Temp 2: Purge flow:
❐
Cooling defective
❐
Clogging
………………….
OPERATION TIME:
Describe Failure :
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
❐
Bad feedthrough
❐
Poor vacuum
❐
Main seal leak
❐
Bellows leak
❐
Vacuum leak
❐
High voltage problem
❐
Solenoid failure
❐
Damaged flange
❐
Error code on display
❐
Other
❐
Damaged sealing area
❐
Other
Describe failure: Describe failure:
Customer application: Customer application:
LEAK DETECTORS INSTRUMENTS
❐
Cannot calibrate
❐
No zero/high background
❐
Gauge tube not working
❐
Display problem
❐
Vacuum system unstable
❐
Cannot reach test mode
❐
Communication failure
❐
Degas not working
❐
Failed to start
❐
Other
❐
Error code on display
❐
Other
Describe failure: Describe failure:
Customer application: Customer application:
ALL OTHER VARIAN PUMPS DIFFUSION PUMPS
❐
Pump doesn’t start
❐
Noisy pump (describe)
❐
Heater failure
❐
Electrical problem
❐
Doesn’t reach vacuum
❐
Overtemperature
❐
Doesn’t reach vacuum
❐
Cooling coil damage
❐
Pump seized
❐
Other
❐
Vacuum leak
❐
Other
Describe failure: Describe failure:
Customer application: Customer application: