A 30
Dry primary pump applications
Standard version
The pump is designed for applications that require the pumping of
for "clean vacuum"
clean (dust-free) and non-corrosive gases. Examples are:
applications
• Instrumentation:
• Gas analysis.
• Electronic microscope.
• X-ray spectrometer.
• Leak detection.
• Surface analyzer.
■
Research and Development
■
Semiconductor Fabrication:
• Load lock and transfer chamber pumping.
• Wafer back pumping.
G version for
G version
pump is compatible with the pumping of corrosive
pumping of corrosive
traces.
It is equipped with 3 gas purge circuits used to withstand
gas traces or
gas traces, to protect the LP and
HP
ball bearings, and the
condensable gas
pump thightness is reinforced. This pump model can be used in
applications such as:
• Process monitoring.
• Load lock pumping.
• Transfer chamber pumping.
• Focused Ion Beams.
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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Summary of Contents for ACP 15
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