ZEISS
5 First Operating Steps | 5.6 Controlling the Gas Injection
2. In the
Charge Compensation
section, move
the
CC Pressure
slider to the desired value
where charging from the ROI is reduced.
INFO:
The gas flow required is lower when
imaging a wider field of view and when imag-
ing a freshly cut specimen surface. It is not ap-
propriate to utilize the maximum flow rate by
default.
à
Dry nitrogen flows over the specimen surface.
à
The system vacuum increases gradually over a period of seconds with increasing Focal CC
flow rate.
5.6.2 Stopping the Gas Injection
Prerequisite
ü
The Focal CC is selected in the software, refer to
Selecting Focal CC in the Software [
Procedure
1. For GeminiSEM: In the
GeminiSEM Control
panel, select the
Control
tab.
For Sigma: In the
SEM Controls
panel, select the
Vacuum
tab.
2. In the
Charge Compensation
section, click on
Off
.
à
The gas injection is stopped completely.
à
The
CC pressure
slider is set to 0 %.
à
The system vacuum returns to a state of high vacuum.
Instruction Manual ZEISS Focal CC | en-US | Rev. 2 | 349561-8021-000
21