Yamato PDC510, Инструкция по эксплуатации

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20
7. MAINTENANCE
Daily Inspection
Conduct the daily inspection at least once a day according to the following table.
Daily Inspection Table
No. Place Item Criteria Result Remarks
1 Cooling fan Noise Smooth rotation with no abnormal
noise.
Vibration No abnormal vibration.
Odor No offensive odor.
2 Chamber door Opening/
closing
Smooth movement.
Tightness No gap between the chamber and
the door.
3 Supply gases Pressure
Process gas
＝
0.15 to 0.25 MPa
Purge gas
＝
0.2 to 0.3 MPa
4 Gas connect port Gas leak No gas leak.
5 Vacuum exhaust
connect port
Tightness Not loose.
6 Commercial in-
put line
Connection No loose connectors.
No abnormal temperature rise of
connectors.
7 Vacuum pump Oil level Within the level lines.
Oil color Not contaminated.
Noise No abnormal noise.
Vibration No abnormal vibration.
Oil leak No leak.
Connection
wires
No loose connections.
●
Prior to the inspections and maintenance, turn off the power switch on the distribution panel for safety.
●
Wait until the machine has returned to the normal temperature before maintenance.
●
Never disassemble the machine.