Yamato PDC510, Инструкция по эксплуатации

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10
5. RUNNING PROCEDURE
Operation in Auto Run
The operation and the setting items in the auto run are outlined below.
①
Breaker
ON
②
Operation
power
ON
④
Alarm
condition
setting
③
Initial screen
→Process
screen
⑤
Process
parameter
setting
⑥
Work set
⑦
START
key
⑧
Auto processing
⑨
End of
processing
⑩
Work
takeout
⑪
Operation
power
OFF
⑫
Breaker
OFF
①
Turn on the breaker to power on the machine.
②
When the operation power is turned on, the
operation panel and the pump are turned on to
set the machine ready to run.
③
After the operation power was turned on, the
initial screen will be shown for several seconds.
During this period, the controller performs initial
setting. When the initial setting is over, the
processing screen will appear.
④
Set gas flow rates, RF power and RF pro-
cessing time. If they need not be changed
from the previous setting, they need not be set.
⑤
Set alarm conditions such as the RF power
permissible fluctuation range and gas flow rate
permissible fluctuation ranges. If they need
not be changed from the previous setting, they
need not be set.
⑥
Set the work in the chamber and close the door.
⑦
Press the START key.
⑧
The controller automatically performs the fol-
lowing processes according to the set parame-
ters.
Evacuating to set pressure
→
gas supply
start
→
diffusion
→
RF on
→
processing
time over
→
vacuum source valve close
→
N
2
purge
→
chamber to atmospheric pres-
sure
⑨
When the processing is over, the end of pro-
cess is displayed.
⑩
Take out the work.
(To start the next process, set the work in the
chamber and press the START key.)
⑪
Turn off the operation power.
⑫
Turn off the circuit breaker.
Indicates the actions by the operator.