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4. Operating procedure
Prior confirmation
1. Check the power supply and the ground wire.
Make sure to connect with this Equipment Power Cord/Power Cable to appropriate power
source and to ground definitely.
2. Check the ELB.
Check if the ELB functions properly.
See “Maintenance method” on P.62.
Check ELB performance once a month or before continuous long-term operation.
※
Tick current time on Bottom Screen of Control Panel at ELB ON(
|
).
3. Check the Independent Overheat Preventive device.
Make sure to set IOPD temperature more than 30
℃
higher of Target Temperature in Chamber.
Check IOPD performance before continuous long-
term operation. Refer to “Independent
Overheat Prevention Device” on page 55.
4. Check the opening of exhaust damper.
Check if the damper is opened to the required degree. Close the damper during operation when
ventilation is not required.