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VAT Series 612 DN 63-250, Инструкции по установке, эксплуатации и обслуживанию

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Installation, Operating & Maintenance Instructions 

Series 612 DN 63-250 (I.D. 2.5“ - 10”), RS485

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Switzerland 

Tel +41 81 771 61 61   Fax +41 81 771 48 30   [email protected]   www.vatvalve.com

 

289857EA

 

2011-07-13 

8/76 

 

Valve unit (continuation) 

DN 63 

2½" 

DN 80 

3" 

DN 100 

4" 

DN 160 

6" 

DN 200 

8" 

 

(61236 - ....) 

(61238 - ....) 

(61240 - ....) 

 

(61244 - ....) 

(61246 - ....) 

Max. differential pressure on plate 
 

1000 mbar 

1000 mbar 

800 mbar 

300 mbar 

150 mbar 

Min. controllable conductance (C

min

) 

[N

2

 molecular flow] 

 

0.45 l/s 

0.65 l/s 

0.85 l/s 

1.7 l/s 

2.8 l/s 

Conductance in open position [N

2

 molecular flow] 

 

360 l/s 

850 l/s 

1400 l/s 

3800 l/s 

7800 l/s 

DN 250 

10" 

 

 

 

 

 

(61248 - ....) 

 

 

 

 

Max. differential pressure on plate 
 

100mbar 

    

Min. controllable conductance (C

min

) 

(N

2

 molecular flow) 

 

5 

l/s 

    

Conductance in open position [N

2

 molecular flow] 

15000 l/s 

 

 

 

 

Dimensions 

Refer to dimensional drawing of specific valve ordering number  

(available on request) 
 

 
 

Содержание Series 612 DN 63-250

Страница 1: ...ut analog outputs 15V SPS PFO 612 CK 2 sensor inputs analog outputs 15V SPS PFO SPS Sensor Power Supply PFO Power Failure Option configured with firmware 612P 1E 65 The fabrication number is indicated...

Страница 2: ...ofilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The origi...

Страница 3: ...onnection 15 VDC sensors with optional SPS module 21 2 6 6 RS485 interface connection 22 2 6 7 Service port connection 22 3 Operation 23 3 1 Introduction 23 3 1 1 Local operation 24 3 1 2 Remote opera...

Страница 4: ...om 289857EA 2011 07 13 4 76 5 Maintenance repairs 60 5 1 Maintenance procedures 61 5 2 Option board 66 5 2 1 Durability of power fail battery 66 5 2 2 Retrofit replacement procedure 67 6 Drawing 70 7...

Страница 5: ...pplications are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 24 VDC 10 0 5 V pk pk max connector POWER 612 A 612 G 612 C 612 H 38 W max o...

Страница 6: ...eak max 0 5 ADC or 0 5 A peak max 10 W max PFO 4 battery pack 612 C 612 H Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fail battery for details Ambie...

Страница 7: ...10E 5 mbar l s Aluminum nickel coated 612 I 1 x 10E 9 mbar l s Stainless steel 612 E 1 x 10E 9 mbar l s Cycles until first service 2 000 000 Admissible operating temperature 10 C to 150 C Mounting pos...

Страница 8: ...differential pressure on plate 1000 mbar 1000 mbar 800 mbar 300 mbar 150 mbar Min controllable conductance Cmin N2 molecular flow 0 45 l s 0 65 l s 0 85 l s 1 7 l s 2 8 l s Conductance in open positio...

Страница 9: ...13 9 76 2 Installation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and a...

Страница 10: ...ensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect sensor cable 3 to sensor s and then to valve connector SENS...

Страница 11: ...ize max tightening torque Nm max tightening torque lbs ft mm inch ISO F ISO F 63 2 8 10 6 8 80 3 8 10 6 8 100 4 8 10 6 8 160 6 13 15 9 11 200 8 13 15 9 11 250 10 13 15 9 11 Refer to Spare parts and ac...

Страница 12: ...4 1 Admissible forces for valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve The stress has to be relieved by suitable mea...

Страница 13: ...Admissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regard...

Страница 14: ...ly connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length o...

Страница 15: ...th max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chas...

Страница 16: ...4 VDC sensors Refer to chapter 2 6 3 Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supp...

Страница 17: ...se shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do no...

Страница 18: ...rt as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors...

Страница 19: ...Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do...

Страница 20: ...rt as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors...

Страница 21: ...ensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect oth...

Страница 22: ...service cable and software from VAT You can either use our freeware Control View which can be downloaded from www vatvalve com or purchase our Control Performance Analyzer Alternatively the VAT Servi...

Страница 23: ...eration Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts Risk of injury Do not connect the controller to power before the valve isn t installed comple...

Страница 24: ...eric monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic...

Страница 25: ...e cleaned or an obstruction is present A service request is indicated when the control unit detects that motor steps are apparently not effective This may happen when the valve unit is heavily contami...

Страница 26: ...2 minutes max All parameters are stored in a power fail save memory 3 5 Display information There is a 4 digit display located on the panel It displays configuration status and position information Fo...

Страница 27: ...rozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D 0 100 valve position 0 closed 100 open Power failure F Service request 1 valve requires clea...

Страница 28: ...RO Compensation of the sensor offset voltage Refer to chapter ZERO for details 5 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN for de...

Страница 29: ...485 2 RS485 Point to Point bbb RS485 address 0 255 c 0 full duplex 1 half duplex xxx 000 reserved do not change Note Each element is separated with square brackets for clarity Square brackets are not...

Страница 30: ...witch to LOCAL 3 Go to Tools Terminal and send setup command according to application needs possibility of adjustment see below For Digital input to change the configuration s 2601abcdef CR to read th...

Страница 31: ...peration Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 setup commands for details 1 Do power up configuration in menu Setup Valve 2 Do power fail c...

Страница 32: ...cording to instruction below The result of LEARN is a pressure versus valve position data table This table is used to adapt the PID parameters The data table is stored in the device memory which is po...

Страница 33: ...oint Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP r...

Страница 34: ...ing to the position setpoint Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 control commands for details Select or enter position se...

Страница 35: ...en the pressure gauges Max ratio is 100 1 It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input Between 90 and 100 of...

Страница 36: ...ely below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas condit...

Страница 37: ...ds for details Set gain factor in menu Setup Control Parameter Send PID CONTROLLER CONFIGURATION 3 10 2 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustmen...

Страница 38: ...nding on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow s...

Страница 39: ...e optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed unti...

Страница 40: ...61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 40 76 Active digital inputs have higher priority than RS485 commands a Configuration with switches for digital inputs Not...

Страница 41: ...g Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 41 76 b Configuration with voltage source for digital inputs Note Do not connect other pins t...

Страница 42: ...hown N nodes are connected in a multipoint RS485 network A termination resistance is necessary on both ends of the line to eliminate reflections Use 120 resistors R on both ends The RS485 network must...

Страница 43: ...se RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration C...

Страница 44: ...necessary Commands and values are case sensitive Data length of value depends on command Number of characters is specified in the description Some commands do not require the value element CR is Carr...

Страница 45: ...ading of position SETPOINT Note Reading returns position setpoint only in case pressure control is not selected Set H CR LF H CR LF HOLD This function stops the valve at the current position It is eff...

Страница 46: ...on 2 POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERR...

Страница 47: ...URE CONTROL STATUS data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control cdefgh reserved do not use The co...

Страница 48: ...sent c 0 power failure battery ready 1 power failure battery not ready d 0 compressed air supply ok 1 compressed air supply not ok efgh reserved do not use This function returns warning information ab...

Страница 49: ...ing LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok Get i 34 CR LF i...

Страница 50: ...one cycle Get i 72 CR LF i 72 xxxxxxxxxx CR LF POWER UP COUNTER data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups Get i 80 CR LF i 80...

Страница 51: ...communication to service port is interrupted the valve will automatically change to remote operation Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF INTERFACE CONFIGURATION 1 da...

Страница 52: ...1 abcdefgh CR LF s 01 CR LF Get i 01 CR LF i 01 abcdefgh CR LF SENSOR CONFIGURATION data length 8 characters a 0 no sensor 1 1 sensor operation sensor 1 input 2 2 sensor operation with automatic chang...

Страница 53: ...ange between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2 se...

Страница 54: ...starting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS485 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VALVE...

Страница 55: ...amp 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 efgh 0000 reserved do not change This command selects gain factor sen...

Страница 56: ...verflow to many characters E 000002 CR LF Commands CR or LF missing E 000010 CR LF missing E 000011 CR LF Unknown command E 000020 CR LF E 000021 CR LF Invalid value E 000022 CR LF E 000023 CR LF Valu...

Страница 57: ...s E 21 and position is 009999 fatal error rotation angle of valve plate limited during power up Valve plate centric adjusted Valve unit heavy contaminated Valve plate mechanically obstructed Adjust va...

Страница 58: ...tails Refer to Display shows M100 in this table Display shows M C Maintenance mode active Pin 14 of service connector is connected to ground Plate will close Further movement of plate is blocked Note...

Страница 59: ...for details Select PRESSURE CONTROL mode Refer to Pressure control for details Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal Setup done completely LEARN done ZERO per...

Страница 60: ...performed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No A Fabrication number has always to be specified All supplies e g compr...

Страница 61: ...maintenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT...

Страница 62: ...surface Attention Do not move the plate by hands when control and actuating unit is installed Depending on flange screws 3 Unfasten clamp coupling Allen Wrench 2mm Remove control and actuating unit f...

Страница 63: ...ngs 9 Clean shaft feedthrough and valve body Lint and dust free cloth soaked with isopropyl alcohol 10 Lubricate seal contact surface of valve body with a slight film of vacuum grease 0 025 ml 11 Lubr...

Страница 64: ...l 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 64 76 Description Required tool Mount mechanical unit to valve body 16 Assemble mechanical unit in reverse or...

Страница 65: ...9 Center plate with feeler gauge as shown Size Feeler gauge mm 63 0 04 80 0 06 100 0 06 160 0 06 200 0 08 250 0 1 Assemble and adjust plate 20 Tighten plate screws with 2 Nm Allen Wrench 3mm Adequate...

Страница 66: ...re PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curv...

Страница 67: ...tion All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed No...

Страница 68: ...el 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 68 76 Description Required tool 1 Remove the panel screws Pozidriv screw driver size 1 2 Remove female screw...

Страница 69: ...board 6 Remove or replace interface board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions see steps 6 5 9 Insert option...

Страница 70: ...enance Instructions Series 612 DN 63 250 I D 2 5 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 70...

Страница 71: ...the appropriate spare parts are supplied 7 1 Control and actuating unit Item Description Valve size Product ordering number All sizes 612 Control and actuating unit On request Option board with SPS m...

Страница 72: ...valve unit 490143 489471 490093 489026 491729 489827 2 Spare parts kit mechanical unit 490144 489464 490094 489022 491728 489910 3 Spare parts kit valve body 232273 232274 232275 243026 237716 241204...

Страница 73: ...trol View software for Windows 248126 free download from www vatvalve com or available on order against charge Service cable PC to valve connection 230327 free wiring information available for downloa...

Страница 74: ...ption Valve size Product ordering number DN 63 2 61236 DN 80 3 61238 DN 100 4 61240 DN 160 6 61244 DN 200 8 61246 Aluminum 32036 QAZV 32038 QAZV 32040 QAZV 32044 QAZV 32046 QAZV Centering ring with Vi...

Страница 75: ...or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging stor...

Страница 76: ...e Instructions Series 612 DN 63 250 I D 2 5 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 76 76 Th...

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