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Installation, Operating & Maintenance Instructions

Series 615 DN 63-100 (I.D. 2.5“ - 4”), RS232

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com

290227EA

2011-06-24

74/79

6 Drawing

Содержание 615 AG Series

Страница 1: ...uts analog outputs 15V SPS 615 HV 1 sensor input analog outputs PFO 615 HW 2 sensor inputs analog outputs PFO 615 CV 1 sensor input analog outputs 15V SPS PFO 615 CW 2 sensor inputs analog outputs 15V SPS PFO SPS Sensor Power Supply PFO Power Failure Option configured with firmware 615P 1E 34 The fabrication number is indicated on each product as per the label below or similar made in Switzerland ...

Страница 2: ...ofilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products The VAT firmware contains a limited time unlimited user license The VAT firmware may n...

Страница 3: ...er and sensor connection 15 VDC sensors with optional SPS module 21 2 6 6 RS232 interface connection 22 2 6 7 Service port connection 22 3 Operation 22 3 1 Introduction 22 3 1 1 Local operation 23 3 1 2 Remote operation 23 3 1 3 Safety mode 24 3 1 4 Service indication 24 3 2 Operation under increased temperature 24 3 3 Behavior during power up 24 3 4 Behavior in case of power failure 25 3 5 Displa...

Страница 4: ...0 CH vatvalve com www vatvalve com 290227EA 2011 06 24 4 79 5 2 2 Retrofit replacement procedure 71 6 Drawing 74 7 Spare parts 75 7 1 Seals 75 7 2 ISO F valve unit aluminum hard anodized without heating 75 7 3 ISO F valve unit stainless steel without heating 76 7 4 Control and actuating unit 76 7 5 Accessories 77 7 5 1 Centering ring with Viton o ring 77 8 Warranty 78 ...

Страница 5: ...y Other applications are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 α 24 VDC 10 0 5 V pk pk max connector POWER 615 A 615 G 615 C 615 H 38 W max operation of valve with max load without PFO 4 38 W plus 10 W for PFO 4 Sensor power supply 2 β 615 A 615 C Input Output 24 VDC 1500 mA max 15 VDC 5 1000 mA max connector POWER connector SEN...

Страница 6: ... battery pack 615 C 615 H Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fail battery for details Ambient temperature 0 C to 50 C max 35 C recommended Pressure control accuracy 5 mV or 0 1 of setpoint whichever is greater Position resolution position control capability 28000 Closing time throttling only 0 5 s typ full stroke Opening time throttling ...

Страница 7: ...uminum hard anodized 615 H 1 x 10E 4 mbar l s Stainless steel 615 E 1 x 10E 9 mbar l s Cycles until first service Isolation cycles open closed open 100 000 with FKM e g Viton seals unheated and under clean conditions Throttling cycles open max throttle open 2 000 000 with FKM e g Viton seals unheated and under clean conditions Admissible operating temperature 10 C to 120 C Mounting position Valve ...

Страница 8: ... 63 2 61536 DN 80 3 61538 DN 100 4 61540 Max differential pressure on plate 1000 mbar 1000 mbar 1000 mbar Min controllable conductance Cmin N2 molecular flow 0 15 l s 0 2 l s 0 25 l s Conductance in open position N2 molecular flow 220 l s 360 l s 600 l s Weight Aluminum hard anodized 615 H 3 8 kg 4 8 kg 5 2 kg Weight Stainless steel 615 E 5 9 kg 8 8 kg 9 7 kg Dimensions Refer to dimensional drawin...

Страница 9: ...24 9 79 2 Installation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts The valve plate may start to move just after power is supplied Do not connect or disconnect sensor cable when device is under power Connection overview Connectors at controller p...

Страница 10: ...le 3 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection for correct wiring Note Input for second sensor is available on 615 H 615 W and 615 Z versions only 5 Connect valve to remote control unit 4 connector INTERFACE Refer to RS232 connection for correct wiring 6 Connect power supply 5 to valve connector POWER Refer to chapter Electrical connection for correct wi...

Страница 11: ...e slightly lubricated screws Refer to Spare parts and accessories for centering rings ordering numbers 2 3 3 Mounting with O ring in grooves ISO F JIS ASA LP ISO F JIS ASA LP Valve size max tightening torque Nm max tightening torque lbs ft DN63 2 61536 20 23 35 40 35 40 15 17 26 30 26 30 DN80 3 61538 20 23 35 40 35 40 15 17 26 30 26 30 DN100 4 61540 20 23 35 40 35 40 15 17 26 30 26 30 hole depth m...

Страница 12: ...24 12 79 2 4 Admissible forces 2 4 1 Admissible forces for valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve The stress has to be relieved by suitable means The following forces are admissible Valve size Axial tensile or compressive force FA Bending moment M mm inch N lb Nm lbf 63 2 800 176 32 24 80 3 850 187 35 26 5 100...

Страница 13: ... Admissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below In case higher force is applied the pedestal could be permanently damaged Admissible force F Overview F Force a middle of aluminium part of controller b 2 400...

Страница 14: ...ly connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length of connection pipe 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present Make also sure that there is no obstruction in front of sensor connection p...

Страница 15: ...th max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground strap at system chamber if it is well connected to PE Note Avoid low chassis cross section to the system PE connection M...

Страница 16: ...4 VDC sensors Refer to chapter 2 6 3 Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 15 VDC sensors Refer to chapter 2 6 4 Power and sensor connection 15 VDC sensors without optional SPS module for schematic and correct wiring External 24 VDC supplied to POWER connector is converte...

Страница 17: ...se shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optiona...

Страница 18: ...rt as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Low range sensor may be connected to sensor 1 or sensor 2 input Do configuration accordingly Pins...

Страница 19: ...e Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An opti...

Страница 20: ...rt as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Low range sensor may be connected to sensor 1 or sensor 2 input Do configuration accordingly Pins...

Страница 21: ...sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Low range sensor may be connected to sensor 1 or sensor 2 input D...

Страница 22: ...nected to the service port for setup and local operation The service port is not galvanic isolated Therefore we recommend using this only for setup testing and maintenance and not for permanent control Refer also to Local Operation for details and to Spare parts Accessories for ordering numbers of service cable software and Service Box 2 Connector Use only screws with 4 40UNC thread for fastening ...

Страница 23: ...eric monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic When communication to service port is interrupted the valve will change to remote operation So when service cable will be disconnected or software will be shut down the valve returns automatically to...

Страница 24: ... when the valve unit is heavily contaminated These lost steps are recognized and will be repeated to attempt target position in the short term But in the medium term the valve unit requires cleaning or inspection Service request SR would be indicated on the display or could be read via remote operation Refer to Display information for details 3 2 Operation under increased temperature Hot valve Hea...

Страница 25: ...re Reaction of valve Valve position before power failure Without Power Failure Option PFO 615 G 615 A 615 T 615 V With Power Failure Option PFO 615 H 615 C 615 U 615 W Any Valve remains at current position Valve will close or open depending on valve configuration Default is not defined Display indicates F Provided that battery pack of the VAT controller is charged Charging time after power up is 2...

Страница 26: ...iption Digit 1 Digit 2 Digit 3 Digit 4 1 E 0 0 At first all dots are illuminated then configuration is displayed Firmware version e g 1E00 1 st information for about 3s Controller configuration 2 nd information for about 3s In case D999 is displayed motor interlock is active Refer to Safety mode for details 2 RS232 interface 3 RS232 interface with analog outputs 0 basic 1 with SPS 1 2 with PFO 2 3...

Страница 27: ...frozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D 0 100 valve position 0 closed 100 open Power failure F Service request 1 valve requires cleaning S R 1 If SR is blinking alternatively with the actual mode display e g P 11 SR the valve requires cleaning Note RxD TxD activity of RS232 communication is displayed by 2 blinking dots in digit 2...

Страница 28: ...ls 4 ZERO Compensation of the sensor offset voltage Refer to chapter ZERO for details 5 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN for details Note Without LEARN the valve is not able to run pressure control 3 6 1 Interface configuration Interface configuration must be adapted according to application needs The factory default s...

Страница 29: ...N 3 Enable or disable ZERO function in menu Setup Sensor 4 Do sensor configuration in menu Setup Sensor 2 Send SENSOR CONFIGURATION 3 6 3 ZERO ZERO allows for the compensation of the sensor offset voltage When ZERO is performed the current value at the sensor input is equated to pressure zero In case of a 2 sensor system both sensor inputs will be adjusted A max offset voltage of 1 4 V can be comp...

Страница 30: ...table can be up downloaded via Control Performance Analyzer software or remote interface Due to encoding the data may not be interpreted directly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS232 control commands resp RS232 setup...

Страница 31: ...oint Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR min CWP1 CWP2 CWPn CR re...

Страница 32: ...ding to the position setpoint Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS232 control commands for details Select or enter position setpoint Send POSITION CONTROL 3 10 Pressure control To prepare valve for PRESSURE CONTROL perform complete Setup procedure The valve has parameters that may be modified to tune pressure control perfor...

Страница 33: ...0 1 between the pressure gauges Max ratio is 100 1 It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input Between 90 and 100 of the low range sensor full scale the low range sensor is phased out while high range sensor is phased in This maintains a functional response behavior in case of small calibration errors betwe...

Страница 34: ...ely below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description Problem description Send diagnostic file with and all required information to tuning support vat ...

Страница 35: ...ds for details Set gain factor in menu Setup Control Parameter Send PID CONTROLLER CONFIGURATION 3 10 2 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability By adapting this parameter to the approximate delay time stability...

Страница 36: ...ending on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation Note In case a lo...

Страница 37: ... be of advantage to have a slower valve response Note OPEN and CLOSE are always done with max speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieved Local operation Control View Control Perfor...

Страница 38: ...mmand set based on the RS232 protocol In addition there are 2 digital inputs and 2 digital outputs Digital inputs may be operated either by switches or by voltage sources Note Optional analog outputs are available on 615 V and 615 W versions only Active digital inputs have higher priority than RS232 commands a Configuration with switches for digital inputs Note Do not connect other pins than indic...

Страница 39: ...ag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 39 79 b Configuration with voltage source for digital inputs Note Do not connect other pins than indicated in the schematics above Connector Use only screws with 4 40UNC thread for fastening the DB 25 connector ...

Страница 40: ...rse RS232 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration Configuration can be done in local operation via service port or in remote operation 2 2 23 DIGITAL GROUND Digital ground Ground for all digital inputs Ground is used when digital inputs are operated ...

Страница 41: ... 8 characters starting with double zero for reading xxxxxx position SETPOINT value depends on configuration refer to RS232 setup commands RANGE CONFIGURATION for details Change to POSITION CONTROL mode and transfer of position SETPOINT value resp reading of position SETPOINT Note Reading returns position setpoint only in case pressure control is not selected Set H CR LF H CR LF HOLD This function ...

Страница 42: ...on 2 POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERROR STATUS for details c 0 no warning 1 warning present read WARNINGS and ERROR STATUS for details This function returns an assembly consisting of POSITION PRESSURE and main status information for the ...

Страница 43: ...URE CONTROL STATUS data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control cdefgh reserved do not use The controller distinguishes 2 control ranges and acts accordingly Get i 30 CR LF i 30 abcdefgh CR LF DEVICE STATUS data length 8 characters a 0 local operation 1 remote operation 2 locked remote operation ...

Страница 44: ...sent c 0 power failure battery ready 1 power failure battery not ready d 0 compressed air supply ok 1 compressed air supply not ok efgh reserved do not use This function returns warning information about the valve If a warning is present countermeasure should be taken Use RESET command to delete service request bit Note Without LEARN the valve is not able to run pressure control Get i 62 CR LF i 6...

Страница 45: ...ring LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok Get i 34 CR LF i 34 0xxxxxxx CR LF LEARN PRESSURE LIMIT data length 8 characters starting with a zero xxxxxxx pressure limit for LEARN return value depends on configuration refer to RS232 setup commands RANGE CONFIGU...

Страница 46: ...ycle Get i 72 CR LF i 72 xxxxxxxxxx CR LF POWER UP COUNTER data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups Get i 80 CR LF i 80 abcdefgh CR LF HARDWARE CONFIGURATION data length 8 characters a 0 Power Failure Option PFO not equipped 1 Power Failure Option PFO equipped b 0 15V sensor power supply SPS not equipped 1 15V sensor power ...

Страница 47: ...ll automatically change to remote operation Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF INTERFACE CONFIGURATION data length 8 characters a baud rate 0 600 1 1200k 2 2400 3 4800 4 9600 5 19 2k 6 38 4k 7 57 6k 8 115 2k b parity bit 0 even 1 odd 2 mark 3 space 4 no c data length 0 7 bit 1 8 bit d number of stop bits 0 1 1 2 e 0 reserved do not change f digital input OPEN VAL...

Страница 48: ... sensor 2 input high range sensor 1 input 3 1 sensor operation sensor 2 input 4 2 sensor operation with automatic changeover low range sensor 1 input high range sensor 2 input Note Sensor operation modes 2 3 and 4 are possible with 2 sensor hardware 615 H and 615 W only Note For applications where the high range sensor is used for for monitoring purpose only select sensor operation modes 1 or 3 fo...

Страница 49: ...range between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2 sensor operation for pressure control is selected PRESSURE covers high range gauge because switchover between sensors is done automatically SENSOR 1 READING and SENSOR 2 READING always return full scal...

Страница 50: ...s starting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS232 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VALVE or POSITION CONTROL commands the routine may be interrupted Note Without LEARN the PID controller is not able to perform pressure control Refer to LEARN for correct learn gas flow and procedure Set d...

Страница 51: ...amp 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 efgh 0000 reserved do not change This command selects gain factor sensor response time and setpoint ramp for the PID controller Note Refer to Tuning of control performance for details Set V 00xxxx CR LF V CR LF Get i 68 CR LF i 68 0000xxxx CR LF VALVE SPEED data length...

Страница 52: ...verflow to many characters E 000002 CR LF Commands CR or LF missing E 000010 CR LF missing E 000011 CR LF Unknown command E 000020 CR LF E 000021 CR LF Invalid value E 000022 CR LF E 000023 CR LF Value out of range E 000030 CR LF Invalid number of characters between and CR LF E 000012 CR LF Setup ZERO disabled E 000060 CR LF Device Status Command not accepted due to local operation E 000080 CR LF ...

Страница 53: ...ws E 21 and position is 009999 fatal error rotation angle of valve plate limited during power up Valve plate centric adjusted Valve unit heavy contaminated Valve plate mechanically obstructed Adjust valve plate according to Maintenance procedure Clean valve unit according to Maintenance procedure Resolve obstruction Reset control unit Cycle power OFFàON or Send reset command local via service port...

Страница 54: ...tails Refer to Display shows M100 in this table Display shows M C Maintenance mode active Pin 14 of service connector is connected to ground Plate will close Further movement of plate is blocked Note Priority of pin 14 is higher than pin 13 If pin 14 is connected to ground after pin 13 the valve will close Ground of service connector is at pin 4 and 8 Display shows M100 Maintenance mode active Pin...

Страница 55: ...for details Select PRESSURE CONTROL mode Refer to Pressure control for details Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal Setup done completely LEARN done ZERO performed before LEARN LEARN interrupted Was gas flow stable during LEARN Tuning done Is sensor range suited for application Noise on sensor signal Perform Setup procedure completely Perform LEARN Refer ...

Страница 56: ...e performed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No A Fabrication number has always to be specified All supplies e g compressed air electrical power must be disconnected for removal installation of the valve from into the system Even with disconnected supply loaded springs and or air cushions in cylinders can be potenti...

Страница 57: ...e will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can give the following recommendations for preventive maintenance unheated and under clean condition Seal Maintenance recommendation Plate Stainless steel 615 E Exchange after 100 000 isolation cycles or 2 000 000 control cycles Aluminium hard anodized 615 H Exchange after 100 000 isolation cycles or 2 000 000 con...

Страница 58: ...cription Required tool Remove valve from system 1 Vent vacuum system on both sides of valve 2 Move the plate to position 30 open 3 Disconnect electrical POWER connector at valve and remove valve from vacuum system 4 Note Take care not to damage the sealing surface Depending on flange screws 5 Loosen and remove the plate screws Allen Wrench 4mm Remove plate 6 Remove plate from counter side Note Tak...

Страница 59: ...air O ring removal tool or Compressed air Note Check the o ring groove If there are any scratches in groove use a new plate Refer to spare parts for new plate 8 Clean the plate and o ring groove Cleanroom wipes soaked with isopropyl alcohol 9 Lubricate the new o ring equal with 0 0125 ml vacuum grease Note Pay attention that grease is distributed constantly over the whole circumference Note For ne...

Страница 60: ...le on shaft and ready to sliding into valve seat Proceed with step 15 Note Take care to sealing surface inside the valve body Cleanroom wipes soaked with isopropyl alcohol Allen Wrench 4mm 15 Connect electrical POWER connection at valve Attention Valve does synchronize automatically and moves to close position 16 Disconnect electrical POWER connection Attention Keep fingers out of the valve during...

Страница 61: ...ce control and actuating unit the valve can remain in the system Note Take care not to damage the sealing surface Support the control and actuating for separation of valve unit Depending on flange screws 4 Unfasten clamp coupling Note If there no access to clamp coupling screw proceed first with step 5 and move control and actuating carefully by hand until the clamp coupling screw is reachable All...

Страница 62: ...vatvalve com www vatvalve com 290227EA 2011 06 24 62 79 Description Required tool 7 Unfasten and remove the plate fastening screws Allen Wrench 4mm Remove plate 8 Remove plate from counter side Note Take care to sealing surface inside the valve body Replace o ring from plate 9 Remove the o ring with O ring removal tool or compressed air O ring removal tool or Compressed air ...

Страница 63: ...o ring groove If there are any scratches in groove use a new plate Refer to chapter spare parts for new plate 10 Clean the plate and o ring groove Cleanroom wipes soaked with isopropyl alcohol 11 Lubricate the o ring equal with 0 0125 ml vacuum grease Note For new o ring refer to chapter spare parts vacuum grease 12 Place the o ring in the o ring groove Deposit the plate on a clean surface Remove ...

Страница 64: ...71 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 64 79 Description Required tool 14 Remove mechanical unit from valve body 15 Clean the shaft Cleanroom wipes soaked with isopropyl alcohol 16 Remove both o rings O ring removal tool Seal removal and valve cleaning 17 Clean shaft feedthrough and valve body Cleanroom wipes soaked with isopropyl alcohol ...

Страница 65: ...ired tool 18 Lubricate seal contact surface of shaft feedthrough with a slight film of vacuum grease 0 0125 ml vacuum grease 19 Lubricate each o ring with a slight film of vacuum grease 0 0125 ml Note If required use new o rings refer to chapter spare parts vacuum grease 20 Place the first o ring at shaft feedthrough 21 Deposit 0 05 ml vacuum grease between the o rings Lubricate and install seals ...

Страница 66: ... vatvalve com 290227EA 2011 06 24 66 79 Description Required tool 23 Lubricate seal contact surface of shaft with a slight film of vacuum grease 0 0125 ml vacuum grease 24 Install mechanical unit into valve body accurately as shown in the picture 25 Tighten the mounting screws with 3 5 Nm Allen Wrench 4mm Mount mechanical unit to valve body 26 Clean shaft from vacuum grease Cleanroom wipes ...

Страница 67: ...ol 27 Place the plate on the shaft 28 Tighten plate screws to block 29 Loosen the plate screws a quarter turn counter clockwise Fact Plate is now movable on shaft and ready to sliding into valve seat Note Take care to sealing surface inside the valve body Allen Wrench 4mm Assemble and adjust plate 30 Press the plate A into valve seat 31 Press the lever B by hand to axis C Make sure that lever B is...

Страница 68: ...tvalve com 290227EA 2011 06 24 68 79 Description Required tool 32 Tighten the plate screws with 2 Nm DN 63 3 5 Nm DN 80 100 Allen torque wrench 4mm Note Make sure that is no grease at actuating lever Clean the actuating lever if necessary 33 Assemble control and actuating unit to valve unit Cleanroom wipes soaked with isopropyl alcohol 34 Fasten 3 fastening screws adequately Allen Wrench 3mm ...

Страница 69: ...H 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 69 79 Description Required tool 35 Tighten clamp coupling with 1 1 Nm Allen torque wrench 2mm Install valve into system 36 Reinstall valve into vacuum system according to chapter Installation ...

Страница 70: ...ure PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition max sensor load 1 A valve heating temperature 150 degree C If the SPS is not fully loaded 1 A or heating temperature of ...

Страница 71: ...tion All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed Note All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above Do not try out other positions that may be destroy the...

Страница 72: ...el 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 72 79 Description Required tool 1 Remove the panel screws Pozidriv screw driver size 1 2 Remove female screw locks from POWER SENSOR and INTERFACE connectors Open end wrench 4 5 mm 3 Lift the panel carefully 4 Disconnect fan cable from board ...

Страница 73: ... board 6 Remove or replace interface board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions see steps 6 5 9 Insert option board at correct position see step 7 10 Reconnect fan cable see step 4 11 Place the panel and tighten screws with 1 1 Nm see steps 3 2 Pozidriv screw driver size 1 12 Tighten female screw locks from...

Страница 74: ...ing Maintenance Instructions Series 615 DN 63 100 I D 2 5 4 RS232 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 74 79 6 Drawing ...

Страница 75: ... Product ordering number All sizes 615 5 Rotary feed through seals FKM e g Viton 2 pcs 323642 DN 63 2 DN 80 3 DN 100 4 7 Plate seal FKM e g Viton 380402 234889 365579 Vacuum grease 4g syringe 206792 Vacuum grease 10g syringe 206793 7 2 ISO F valve unit aluminum hard anodized without heating Item Description Valve size Product ordering number DN 63 2 61536 PH DN 80 3 61538 PH DN 100 4 61540 PH 1 Sp...

Страница 76: ...lever compl 350045 3 Spare parts kit connecting link 345953 4 Spare parts kit shaft kit 471253 471254 471255 6 Body compl 384963 394352 356034 8 Plate 354547 363311 326557 Plate screw 3 pcs 355662 361781 For versions such as Other valve sizes or heated valves spare part ordering numbers are available on request 7 4 Control and actuating unit Item Description Valve size Product ordering number All ...

Страница 77: ... or available on order against charge Service cable PC to valve connection 230327 free wiring information available for download from www vatvalve com Connector kit consisting of DB 9 female POWER plug DB 15 male SENSOR plug DB 25 male INTERFACE plug 242411 Service Box 2 601BS 29NN 000 Control panel rack mount version of Service Box 2 602BS 29LE 000 Special Allen wrench for disassembly and assembl...

Страница 78: ... or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the description thereof contained herein the purchaser thereof as its exclusive remedy shall up...

Страница 79: ...perating Maintenance Instructions Series 615 DN 63 100 I D 2 5 4 RS232 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 290227EA 2011 06 24 79 79 ...

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