Varian VHS-250, Инструкция по эксплуатации

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps
5-2
D
R
A
FT 3/9
/
05
Table 5-3 lists the VHS-6 models.
Table 5-4 lists the VHS-6 replacement parts available from Vacuum Technologies.
88164301 Heater Clamp
Commercial Heater Clamp Nut,
31/48
-16, Hex, stainless steel
694492156 Baffle Retaining Ring
K0377183 O-Ring Kit includes:
❑
3 Butyl inlet flange O-ring, Parker No. 2-258
❑
10 Viton fill and drain O-rings (old style), Parker No. 2-112
❑
10 Viton fill and drain O-rings (new style, Parker No. 2-113
❑
1 Sight glass O-ring, Parker No. 2-226
❑
1 Teflon gasket
K6948301 NEOVAC SY Diffusion Pump Fluid (1000 cc)
695474005 DC-704 Diffusion pump Fluid (500 cc)
695475005 DC-70S Diffusion Pump Fluid (500 cc)
695405005 Santovac 5 Diffusion Pump Fluid (500 cc)
86715001 Spring, Cold Cap
Commercial Screw, Rd hd machine
, no. 8-32
x
31/416
, stainless steel
Commercial Stud, no. 8-32 x 1~2, stainless steel
Commercial Screw, Socket hd cap, no. 8-32x
11/44
, stainless steel
Table 5-2 VHS-4 Replacement Parts (Continued)
Table 5-3 VHS-6 Models
Pump Voltage
Part Number
Flange Type
ASA ISO Conflat
Standard cold cap 120 V 85826301 L6193301 L6200301
Extended cold cap 120 V 85826311 L6193311 L6200311
Standard cold cap 208 V 85826306 L6193306 L6200306
Extended cold cap 208 V 85826316 L6193316 L6200316
Standard cold cap 240 V 85826302 L6193302 L6200302
Extended cold cap 240 V 85826312 L6193312 L6200312