Varian VHS-250, Инструкция по эксплуатации

Страница: 31 / 60

VHS-4, VHS-6 and VHS-250 Diffusion Pumps
D
R
A
FT 3/9
/
05
1-11
1.2.4 Vacuum System Connections
WARNING
Utility failure can cause damage to the equipment, overheating,
and explosions. Diffusion pump equipment designers must take
appropriate system design action to protect personnel and
property from possible hazards.
Read the safety section at the
beginning of this manual.
1. Install the diffusion pump with the body vertical and plumb.
2. Ensure that the pump inlet mating flange on the system is horizontal within ±1°. The
boiler plate must be horizontal to prevent an uneven fluid level.
CAUTION
Failure to meet this requirement could result in overheating of
the diffusion pump boiler plate.
3. Prepare the inlet and foreline O-rings by wiping them with a clean, lint-free cloth.
A small amount of diffusion pump oil may be used to clean the O-rings.
4. Install the O-rings in the O-ring grooves, being careful not to damage or scratch the
sealing surface.
5. Check the fill and drain plugs for tightness and apply light to medium torque, enough to
compress the O-rings.
6. Using an appropriate lifting apparatus, align the bolt holes of the inlet flange with the
bolt holes of the mating flange.
7. Using the appropriate mounting hardware, tighten the bolts evenly until the O-ring is
compressed and the flanges make light, metal-to-metal contact.
8. Ensure the integrity of the connections: Check the vacuum connections for leaks using a
helium mass spectrometer leak detector before operating the vacuum system.
1.2.5 Cooling Water Connections
1. Connect the inlet water fitting (near the inlet flange at the top of the pump) to a
continuously running water supply at 0.15 gpm (VHS-4) or .25 gpm (VHS-6 and 250)
and at a temperature of 60 to 80 °F.
CAUTION
In the following step, discharge connections must be installed
in accordance with all Federal State and local laws and
regulations.
If the diffusion pump is being cooled by a recirculating water
system:
❑
Ensure the exit water temperature does not exceed 120 °F.
❑
The outlet or discharge (nearest the foreline) should be
connected to an open drain.