Varian VHS-250, Инструкция по эксплуатации

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps
1-4
D
R
A
FT 3/9
/
05
Figure 1-1 shows the VHS-4 speed and throughput curves.
Figure 1-1 VHS-4 Speed and Throughput Curves
NOTE
Speed curves were generated according to AVS Standard 4.1.
Figure 1-2 gives the VHS-4 wiring information.
Figure 1-2 VHS-4 Wiring Information
Speed with standard cold cap
Speed with extended cold cap
A
ir Sp
eed
(
//s
ec)
INLET PRESSURE — TORR
Th
ro
ug
hpu
t (T
o
rr
-/
/s
ec
)
1800
1200
900
600
300
5
4
3
2
1
10
−
10
10
−
9
10
−
4
10
−
7
10
−
10
10
−
5
10
−
4
10
−
3
10
−
2
10
−
1
0 0
*Note: Speed curves were generated according to AVS Standards 4.1