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Sales and Service Offices

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172

Australia

Varian Australia Pty Ltd.

679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950

Benelux

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6608 1530
Fax: (86) 10 6608 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd.

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

UK and Ireland

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Internet Users:

Customer Service & Technical Support:

[email protected]

Worldwide Web Site:

www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

11/01

Содержание Turbo-V 550

Страница 1: ...9050 series MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK S...

Страница 2: ...Turbo V 550...

Страница 3: ......

Страница 4: ......

Страница 5: ...CAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 AIR COOLING KIT INSTALLATION 31 GAS PURGE VALVE INSTALLATION 32 VENT VALVE INSTALLATION...

Страница 6: ...condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare la pompa nel modo SOFT START vedere il manuale del control le...

Страница 7: ...ZIONE Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressi...

Страница 8: ...k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltniss...

Страница 9: ...n GEFAHR W hrend des Ausheizens d rfen weder die Pumpe noch eventuelle hei e Anschlu teile ber hrt werden denn es besteht Verbrennungsgefahr ACHTUNG F r die Bel ftung der Pumpe trockene staub und part...

Страница 10: ...renseignements importants isol s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 C 70 C...

Страница 11: ...fage DANGER Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulem...

Страница 12: ...del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deber cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no conden...

Страница 13: ...nes de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a tra...

Страница 14: ...destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas n o devem ser superadas as seguintes condi es ambientais temperatura de 20 C a 70 C humidade relativa 0 95 n o condensan...

Страница 15: ...tilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode caus...

Страница 16: ...ie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet...

Страница 17: ...ijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de...

Страница 18: ...ade p udstyret BEM RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20 C...

Страница 19: ...elser p personer PAS P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partikler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst...

Страница 20: ...ramf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING F ljande krav p omgivningsf rh llanden g ller vid t...

Страница 21: ...d inloppet aldrig bli h gre n 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VIKTIGT Anv...

Страница 22: ...dersom de ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING N r pumpene transporteres eller lagres m f lgende milj messige kr...

Страница 23: ...turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket v...

Страница 24: ...taa laitteen vahingoittumiseen HUOMAUTUKSET Huomautuksissa k yv t ilmi tekstiss k sitellyt t rke t tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana t ytyy seuraavien ymp rist a koskevie...

Страница 25: ...mp tila saa olla yli 120 C K ytt k aina kuumentamisen aikana vett j hdytykseen VAARA lk koskeko turbopumppuun tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden louk...

Страница 26: ...seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH Kat th di rkeia thj metafor j kai thj apoq keushj twn antli n pr pei na thro ntai oi ak louqej periballontik j sunq ke...

Страница 27: ...xh KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl...

Страница 28: ...environmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see control un...

Страница 29: ...t gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure CAUTION Avoid impacts oscillations or harsh movements of the pum...

Страница 30: ...48 Model 969 9049 Model 969 9050 The external body of the pump is shaped so that the pump can function with natural convection air cooling Kits are available for water cooling or forced air cooling to...

Страница 31: ...diaphragm Varian MD 60 Operating position Any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 200 l h 0 89 GPM tem...

Страница 32: ...TION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 2...

Страница 33: ...reen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump The screen can be removed...

Страница 34: ...t a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C The heater band...

Страница 35: ...These hoses must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit wit...

Страница 36: ...the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller A fan kit model 969 9314 is available for air cool ing the pump Fan specificati...

Страница 37: ...e purge port cover as shown in the fol lowing figure The vent valve mod 969 9833 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic...

Страница 38: ...the thread on the pump Screw the flange mod 969 9109 on the pump tak ing care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp VENT DEVICE IN...

Страница 39: ...amps or claws as shown in the figure For ConFlat flange connections we recommend using Varian hardware 1 Turbo V controller To facilitate assembly and dismantling apply Fel pro C 100 high temperature...

Страница 40: ...a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming The turbopump is connected to the control...

Страница 41: ...n 1 Close the corrosive gas flow into the system The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor 2 Leaving the Turbo V pump and the backing...

Страница 42: ...n damper ISO 160 969 9345 Vibration damper CFF 8 969 9335 Vent flange NW 10 KF 969 9109 Vent valve with fixed delay time 969 9833 Vent device with adjustable delay time 969 9831 Forepump DS 302 with 1...

Страница 43: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 44: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 45: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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