INSTRUCTIONS FOR USE
24
87-900-915-01(E)
During operation, the following environmental conditions must
be respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.
The Turbo - V 2000 ICE series pumps must only be used with
one of the special Varian controllers (series 969-9448, 969-
9449) and must be connected to a primary pump (see "Techni-
cal Information").
The turbopump can be installed in any position.
When the pump is fixed in an horizontal position, be sure the
controller is set for “operation in horizontal position”.
Fix the turbopump in a stable position connecting the inlet
flange of the turbopump to a fixed counter-flange capable of
withstanding a torque of 20.000 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following table
shows, for each flange and fixing device, the necessary number
of clamps or claws and the relevant fixing torque.
FLANGE FIXING
DEVICE
N. FIXING
TORQUE
ISO K 250
M10 clamps
12
22 Nm
M10 claws
12
22 Nm
The turbopump with ISO F 250 (bolted) inlet flange must be
fixed to the vacuum chamber by means of 12 M10 bolts.
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
For installation of optional accessories, see "Technical Informa-
tion".
USE
All the instructions for the correct use of the turbopump are con-
tained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperatures of its inlet flange and of the rotor
must not exceed 120 °C. Always use the water cooling system
during the heating operations.
,
WARNING!
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
CAUTION
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
CAUTION
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
CAUTION
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
2
, Ar) for
pump bearing protection (see the appendix "Technical Informa-
tion").
,
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 2000 ICE series pump does not require any main-
tenance. Any work performed on the pump must be carried out
by authorized personnel.
,
WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
NO!
,
WARNING!
To avoid injury, never put fingers or any objects whatsoever
in the inlet port of the turbopump. The use of the protective
screen is strongly advised (optional extra). If a vibration
damper or flexible metallic bellows are used on the inlet
port, make sure that the pump is fixed to the base.
