Varian Turbo-V 2000 ICE Скачать руководство пользователя страница 26

ODHGIES CRHSHS 

 21 

87-900-915-01(E)

 

GENIKES PLHROFORIES

 

Aut

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 h suskeu

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zetai gia epaggelmatik

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 cr

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sh. O 

cr

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pei na diab£sei prosektik£ tij odhg

ej tou 

parÒntoj egceir

diou kai opoiad

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pote £llh prÒsqeth 

plhrofor

a pou d

nei h

 Varian,

 prin apÒ th crhsimopo

hsh thj 

suskeu

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j

.  

H

 Varian 

den f

rei kam

a euqÚnh Òson afor£ thn olik

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merik

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thsh twn odhgièn, thn akat£llhlh cr

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anekpa

deutou proswpikoÚ, auqa

retej epemb£seij 

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pou den sumfwne

 me touj eidikoÚj eqnikoÚjkanonismoÚj. 

Oi antl

ej thj seir£j

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e

nai 

strobilomoriak

j antl

ej gia efarmog

j uyhloÚ kai polÚ 

uyhloÚ kenoÚ, ikan

j na antl

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rio 

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aerioÚco sustatikÒ. E

nai akat£llhlej gia thn £ntlhsh 

ugrèn 

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 stereèn swmatid

wn. 

H £ntlhsh epitugc£netai diam

sou m

aj tourmp

naj pou 

peristr

fetai me meg£lh tacÚthta (to anètero

 33000 

s.a.l

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opo

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na trifasikÒ hlektrikÒ mot

r  uyhl

ˇ

apÒdoshj. Oi antl

ej

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den peri

coun 

rupantikoÚj par£gontej, e

nai kat£llhlej loipÒn kai gia 

efarmog

j pou apaitoÚn 

na økaqarÒø kenÒ. 

Stij epÒmenej paragr£fouj anaf

rontai Òlej oi apara

thtej 

plhrofor

ej pou egguoÚntai thn asf£leia tou ceirist

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 kat£ 

th di£rkeia thj crhsimopo

hshj thj suskeu

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j. Leptomere

plhrofor

ej d

nontai sto par£rthma øTecnik

j Plhrofor

ejø

AutÒ to egceir

dio crhsimopoie

 tij akÒlouqej sumb£seij¿

  

 

,

 

KINDUNOS

!

 

Oi ende

xeij kindÚnou elkÚoun thn prosoc

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 tou ceirist

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diadikas

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 se m

a eidik

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a h opo

a an den ekteleste

 

swst£, qa mporoÚse na prokal

sei sobar

j proswpik

bl£bej. 

 

PROSOCH

 

Oi ende

xeij prosoc

ˇ

j emfan

zontai prin apÒ tij diadikas

ej oi 

opo

ej an den ektelestoÚn me prosoc

ˇ

, qa mporoÚsan na 

prokal

soun zhmi

j sth suskeu

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SHMEIWSH

 

Oi shmeièseij peri

coun shmantik

j plhrofor

ej pou 

coun 

apospaste

 apÒ to ke

meno.

  

APOQHKEUSH

 

Kat£ th di£rkeia thj metafor£j kai thj apoq

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keushj twn 

antlièn pr

pei na throÚntai oi akÒlouqej periballontik

sunq

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kej¿  

qermokras

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apÒ

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m

cri

 +70°C 

scetik

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: 0 - 95% (

asumpÚknwth

A

n o crÒnoj apoq

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keushj e

nai polÚ makrÚj, h antl

a qa 

pr

pei na teqe

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nhsh me trÒpo

 SOFT START 

(bl

pe to 

egceir

dio thj mon£daj el

gcou). 

PROETOIMASIA GIA THN EGKATASTASH 

H antl

a promhqeÚetai m

sa se m

a eidik

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suskeuas

a. An up£rcoun ende

xeij bl£bhj pou qa mporoÚsan 

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coun proklhqe

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sumbouleute

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sewn

Kat£ th di£rkeia tou ano

gmatoj thj suskeuas

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idia

terh prosoc

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tsi èste na mhn p

sei kai na mhn ctuphqe

 

h antl

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Mhn egkatale

pete th suskeuas

a sto perib£llon. To ulikÒ 

anakuklèènetai pl

ˇ

rwj kai antapokr

netai sthn Odhg

a thj 

E.O.K. 85/399 

gia thn diafÚlaxh tou perib£llontoj

 

 

PROSOCH

 

Prokeim

nou na apofÚgete probl

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mata apÒ thn apeleuq

rwsh 

aer

ou, mhn agg

zete me gumn£ c

ria ta tm

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mata pou prÒkeitai 

na ekteqoÚn sto kenÒ. Na crhsimopoie

te p£nta g£ntia 

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 £llh 

kat£llhlh prostas

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SHMEIWSH

 

H antl

a den katastr

fetai an aplèj ekteqe

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atmosfairikÒ a

ra. Saj sumbouleÚoume Òmwj na thn 

krat

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sete kleist

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  m

cri th stigm

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 pou qa egkatastaqe

 sto 

sÚsthma, 

tsi èste na apofeucqe

 h endecÒmenh rÚpansh apÒ 

th skÒnh. 

EGKATASTASH 

,

 

KINDUNOS

!

 

H antl

a, lÒgw tou b£rouj thj, pr

pei na metakinhqe

 

diam

sou eidikèn ergale

wn anÚywshj kai metak

nhshj. En 

an£gkh crhsimopoie

te touj eidikoÚj kr

kouj pou pr

pei na 

bidwqoÚn stij elikoeide

j op

j M8 ftiagm

nej sto per

blhma 

thj antl

aj.

  

 
Bebaiwqe

te Òti h antl

a e

nai kat£llhlh gia thn efarmog

ˇ

 

thj. H antl

cei scediaste

 gia th cr

ˇ

sh se sust

ˇ

mata 

£ntlhshj gia 

PVD 

ˇ

 genik£ gia efarmog

j stij opo

ej 

apaite

tai 

na 

"

kaqarÒ

"

 kenÒ. Epikoinwn

ˇ

ste me thn

 Varian 

Vacuum Technologies 

ˇ

 me ton promhqeut

ˇ

 saj gia £llej 

efarmog

j. 

H antl

a den qa pr

pei na egkatastaqe

 kai§

ˇ

 na 

crhsimopoihqe

  se  cèrouj  ekteqeim

nouj se atmosfairikoÚj 

par£gontej (broc

ˇ

, p£go, ciÒni), skÒnej, polemik£ a

ria, se 

cèrouj Òpou up£rcei k

ndunoj 

krhxhj 

ˇ

 k

ndunoj purkagi£j. 

   

PROSOCH

 

Xekoll

ˇ

ste to autokÒllhto kai bg£lte to prostateutikÒ 

kap£ki mÒno th stigm

ˇ

 thj sÚndeshj thj tourmpoantl

aj sto 

sÚsthma.

 

 

 

Содержание Turbo-V 2000 ICE

Страница 1: ...9127 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA...

Страница 2: ...Turbo V 2000 ICE...

Страница 3: ......

Страница 4: ......

Страница 5: ...9 WATER COOLING KIT INSTALLATION 30 VENT DEVICE INSTALLATION 31 VENT VALVE INSTALLATION 32 PUMP USED WITH CORROSIVE GASES 33 Gas Purge 33 Gas Purge Vent Device Description 33 Solid State Flowmeter Ins...

Страница 6: ...azzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare...

Страница 7: ...raffreddamento ad acqua durante le operazioni di riscaldamento PERICOLO Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare...

Страница 8: ...und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltnisse vorliegen Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Nach extrem langer Lagerung mu die P...

Страница 9: ...akuumkammer darf die Temperatur des Eingangsflanschs und des Rotors 120 C nicht berschreiten Vakuumsystemen die TP mit Was serk hlung arbeiten GEFAHR W hrend des Ausheizens d rfen weder die Pumpe noch...

Страница 10: ...il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 C 70 C humidit relative 0 95 non condensante Si le temps d emmagasinage est tr s long mettre la pompe en marche...

Страница 11: ...urs le refroidissement par eau pendant les op rations de chauffage DANGER viter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peu...

Страница 12: ...n las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START...

Страница 13: ...empre la refrigeraci n por agua durante las operaciones de calentamiento PELIGRO No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede pro...

Страница 14: ...evem ser superadas as seguintes condi es ambientais temperatura de 20 C a 70 C humidade relativa 0 95 n o condensante Se o tempo de armazenagem for muito longo accionar a bomba em SOFT START ver manua...

Страница 15: ...deve ultrapassar 120 C Utilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A eleva...

Страница 16: ...belangrijke informatie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve v...

Страница 17: ...sunit Tijdens het eventuele verwarmen van de vacu mkamer mag de temperatuur van de ingangsflens en de rotor niet meer dan 120 C bedragen Pas tijdens het verwarmen altijd waterkoeling toe GEVAAR Raak d...

Страница 18: ...ade p udstyret BEM RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumperne skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20 C...

Страница 19: ...en og rotoren ikke overskride 120 C Brug altid vandafk ling under opvarmningen ADVARSEL R r ikke ved turbopumpen eller eventuelt tilbeh r under opvarmningsman vrerne Den h je temperatur kan for rsage...

Страница 20: ...ARING F ljande krav p omgivningsf rh llanden g ller vid transport och f rvaring av pumpen temperatur fr n 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter l ng f rvaring skall pumpen start...

Страница 21: ...en ska temperaturen f r ing ngsfl nsen och rotorn inte verstiga 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r a...

Страница 22: ...pfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre m pumpen MYKSTARTES se kontrollenhetens manual KLARGJ RE TIL INSTALLASJON Pumpen leveres i en spesi...

Страница 23: ...ling under oppvarmingen ADVARSEL Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller...

Страница 24: ...stoinnin aikana t ytyy seuraavien ymp rist koskevien ehtojen olla t ytettyin l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Jos varastointiaika on hyvin pitk tulee pumppu k ynnist SOFT STA...

Страница 25: ...120 C K ytt k aina kuumentamisen aikana vett j hdytykseen VAARA lk koskeko turbopumppuun tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P...

Страница 26: ...louqej periballontik j sunq kej qermokras a ap 20 C m cri 70 C scetik ugras a 0 95 asump knwth An o cr noj apoq keushj e nai pol makr j h antl a qa pr pei na teqe se k nhsh me tr po SOFT START bl pe...

Страница 27: ...ta ugr y xh KINDUNOS KINDUNOS KINDUNOS KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH...

Страница 28: ...TORAGE When transporting and storing the pumps the following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is...

Страница 29: ...nd of the rotor must not exceed 120 C Always use the water cooling system during the heating operations WARNING Do not touch the turbopump or any of its accessories during the heating process The high...

Страница 30: ...rced air cooling A water cooling kit is available to cool the pump in the cases where it is used under heavy load or when forced air is insufficient for cooling purposes Two thermistor sensors are mou...

Страница 31: ...TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo V2000 ICE outline dimensions The dimensions arte indicated in mm inches 26 87 900 915 01 E...

Страница 32: ...5 bar 45 to 75 Psi Bakeout tempera ture 80 C at inlet flange ISO flange 120 C at inlet flange CF flange Max rotor temperature 120 C Vibration level displacement 0 01 m at inlet flange Motor supplied...

Страница 33: ...CAL INFORMATION Graph of compression ratio vs foreline pressure measured with vertical axis Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 28 87 900 91...

Страница 34: ...h a 120 Vac power supplied controller mod 969 9449 CAUTION The use of a wrong supply voltage heating jacket model may cause a serious damage to both heat ing jacket and controller It is applied to the...

Страница 35: ...338 metallic model and 969 9348 plastic model Model 969 9338 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be hel...

Страница 36: ...LATION Assemble the seal ring and lock the vent device in position using the KF klamp The vent device mod 969 9831 allows to avoid undesired venting of the pump during a temporary power failure adjust...

Страница 37: ...e mod 969 9843 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic vent operation Unscrew the threaded plug see figure below Tighten...

Страница 38: ...ing figure or model 969 9115 operating in the range from 0 to 150 SCCM with Nitrogen and from 0 to 125 SCCM with Argon that connected to the controller can monitor the flow of the protective gas purge...

Страница 39: ...for refer ence Ask VARIAN for proper temperature set ting Heater jacket must be always on even during start up and shutdown 1 Turbo V controller 2 Vent valve 3 Vacuum pump shut off valve optional Fil...

Страница 40: ...mospheric pressure for a better bearing pro tection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures...

Страница 41: ...Inlet screen ISO 250 969 9350 Heating jacket 120 Vac 969 9821 Heating jacket 220 Vac 969 9820 Water cooling kit for American fractional tubes 969 9338 Water cooling kit for Metric tubes 969 9348 Pump...

Страница 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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