background image

 

 

Request for Return 

 

 

 

1.  A Return Authorization Number (RA#) 

WILL NOT

 be issued until this Request for Return is completely filled out, 

signed and returned to Varian Customer Service. 

2.  Return shipments shall be made in compliance with local and international 

Shipping Regulations

 (IATA, DOT, UN). 

3.  The customer is expected to take the following actions to ensure the 

Safety

 of workers at Varian

:

 (a) Drain any oils or 

other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the 
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit). 

4.  Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.   

North and South America 

Varian Vacuum Technologies 

121 Hartwell Ave 

Lexington, MA 02421 

Phone : +1 781 8617200 

Fax: +1 781 8609252 

Europe and Middle East 

Varian SpA 

Via Flli Varian 54 

10040 Leini (TO) – ITALY 

Phone: +39 011 9979111 

Fax: +39 011 9979330 

Asia and ROW 

Varian Vacuum Technologies 

Local Office 

 

CUSTOMER INFORMATION 

 

Company name: ..………………….……..……………….………………………………..……………………...…………..…. 
Contact person:    Name: ……………………………………..… 

Tel: ……………………….…...…………….….….... 

  

Fax: …………………………….…...…..…… 

E-Mail: ..……………………..…………..…..…..….. 

Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......……….. 

Europe only

:   VAT reg. Number: ………………..……………... 

USA only:

   

 

Taxable     

 

Non-taxable  

Customer Ship To: ………………………….………   

Customer Bill To: …………………..……………... 

                 ……………..…………………...                                

 ..………………………………... 

                 ………………..………………...                                 

 ..………………………………...                      

 

PRODUCT IDENTIFICATION 

Product Description 

Varian P/N 

Varian S/N 

Purchase Reference 

 

 

 

 

 

 

 

 

 

 

 

 

 

TYPE OF RETURN 

(check appropriate box)

 

 

 

 

 

 

Paid Exchange      

 

Paid Repair 

 

Warranty Exchange 

 

Warranty Repair 

 

Loaner Return 

 

Credit  

      

 

Shipping Error 

 

Evaluation Return 

 

Calibration  

 

Other ……………….

 

 

HEALTH and SAFETY CERTIFICATION 

Varian Vacuum Technologies 

CAN NOT ACCEPT

 any equipment which contains 

BIOLOGICAL HAZARDS

 or 

RADIOACTIVITY

. Call Varian Customer Service to discuss alternatives if this requirement presents a problem. 

The equipment listed above (check one): 
    

 

HAS NOT

 been exposed to any toxic or hazardous materials 

       OR 

    

 

HAS

 been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that      

equipment was exposed to, check all categories that apply: 

  Toxic        Corrosive        Reactive        Flammable        Explosive        Biological        Radioactive 

List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula. 

.……………………………………………………………………………………………………………………..

 

 

Print Name: ………………………………….      Customer Authorized Signature: ……………...…………………….     

Print Title: …………………………………...      Date: ..…../..…../……  

NOTE:

 If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, 

the customer 

will be held responsible

 for all costs incurred to ensure the safe handling of the product, and 

is liable

 for any harm or injury to Varian 

employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. 

 

Do not write below this line 
Notification (RA)#: ……………………….………..  Customer ID#: ……….………….  Equipment #: …………………….. 

Содержание 969-9507

Страница 1: ...RUCCIONES MANUAL DE ISTRUÇÕES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA Ο ΗΓΙΕΣ ΧΡΗΣΕΩΣ FELHASZNÁLÓI KÉZIKÖNYV PODRECZNIK INSTRUKCJI NÁVOD K POUŽITÍ NÁVOD NA OBSLUHU PRIROČNIK ZA NAVODILA INSTRUCTION MANUAL Turbo V 70 Controller Model 969 9507 vacuum technologies ...

Страница 2: ...Turbo V 70 Controller ...

Страница 3: ......

Страница 4: ......

Страница 5: ...sk nadzorna stikala vodnega toka itn V naslednjih odstavkih so navedene vse informacije ki so potrebne za zagotavljanje sigurnosti uporabnika med rokovanjem s to napravo Podrobnejše informacije najdete v priponki Technical Information V tem priročniku so varnostne informacije razvrščene v dva razreda Znak svarila opozarja uporabnika da mora pri določenem postopku ali pri posebnem delovanju paziti ...

Страница 6: ...edajte si paragraf Use v dodatku Technical Information Nekaj od naslednjih navodil velja za model 969 9507 samo če je pri tem priključen dodatek Hand held terminal Predno vklučite controller morate izvesti vse električne in pnevmatske priključke pri tem morate upoštevati priročnik črpalke Da bi se izognili poškodbam bodisi oseb kot naprave morate poskrbeti da bo črpalka stabilno vgrajena če monitr...

Страница 7: ...e lahko rokuje s to napravo Leva plošča Desna plošča 1 Izhodni konektor logičnih signalov spajalni konektor s zapiralnim mostičkom 2 Izhodni konektor logičnih in nadzornih signalov toka črpalke 3 Izhodni močni konektor 24 Vcc za hladilni ventilator črpalke 4 Konektor za priključitev kabla črpalke 5 Vhodni modul napajanja controllera Vsebuje zaščitno varovalko menjalca napetosti močno napajlno vtič...

Страница 8: ...da ni prišlo do izgub v sistemu Pritisnite dvakrat tipko START za ponoven zagon črpalke FAULT PUMP OVERTEMP Temperatura gornjega ležišča ali črpalke je presegla i 60 C Počakajte da se temperatura vrne pod normalnim vrednostnim pragom Pritisnite dvakrat tipko START za ponoven zagon črpalke FAULT CONTROLLER OVERTEMPERATURE Temperatura transformatorja controllera je presegla 90 C Počakajte da se temp...

Страница 9: ...ain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The ...

Страница 10: ...Some procedures can be executed with controller 969 9507 only when the accessory Hand held terminal is available Make all vacuum manifold and electrical connections and refer to Turbo V pump instruction manual prior to operating the Turbo V controller To avoid injury to personnel and damage to the equipment if the pump is laying on a table make sure it is steady Never operate the Turbo V pump if t...

Страница 11: ...maintenance Any work performed on the controller must be carried out by authorized personnel Left Panel Right Panel 1 Logic input signals connectors mating connector supplied with link 2 Logic output signals connector and pump current monitor 3 Power output connector 24 Vdc for pump cooling fan 4 Connector to the pump cable 5 Controller power entry module consisting of mains fuses voltage change o...

Страница 12: ...m 0 to 9 indicating the step number not passed Verify that system has no leaks Press the START pushbutton twice to start the pump FAULT PUMP OVERTEMP The upper bearing pump temperature exceeds 60 C Wait until the temperature decrease below threshold value Press the START push button twice to start the pump FAULT CONTROLLER OVERTEMPERATURE The controller transformer temperature exceeds 90 C Wait un...

Страница 13: ...C mains supply into a 3 phase low voltage medium frequency output which is required to power the Turbo V pump The microcomputer generates the variable output frequency and controls the 3 phase output voltage according to the software and the gas load condition of the pump Moreover it manages signals from sensors input output connection information to be displayed on the hand held terminal and give...

Страница 14: ...10 3 phase 1250 Hz 2 150 W maximum Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Fuse mains 2 x T3 15 A slow blow disregarding the mains Radio interference suppression EN 55011 class A group 1 EN 61010 1 IEC1000 4 2 1000 4 3 1000 4 4 Weight 3 8 Kg 8 4 lbs CONTROLLER OUTLINE The outline dimensions for the Turbo V 70 controllers are shown in the following figure Controller outli...

Страница 15: ...ck back door for voltage selector set Using a small screw driver pull out the voltage selector and fuses Select the operating voltage then firmly insert the voltage selector and fuses in place Check voltage selector window for correct set and connect the power cord POWER INTERCONNECTIONS Connection J7 120 Vac Connector The 120 Vac 1 A maximum independent of line voltage output voltage is present a...

Страница 16: ...the contact opens the turbopump is stopped With the remote mode operation selected the front panel push button is inoperative 2 7 Remote LOW SPEED optically isolated from the internal circuit requires a permanently closed contact relay contact transistor etc When the contact closes the turbopump runs at low speed and when the contact opens the turbopump reverts to high speed mode With the remote m...

Страница 17: ...RT signal 24 V 60 mA optically isolated output pin 13 positive pin 6 negative The output voltage will be present when the START push button on front panel is pressed or the remote start is present or the function has been requested by RS 232 until NORMAL operation is reached PIN DESCRIPTION 7 14 R2 signal 24 V 60 mA optically isolated output pin 14 positive pin 7 negative The output Voltage will b...

Страница 18: ...CB AMP Cannon or equivalent 15 pin D type male connector The external cable not supplied between the host computer and the controller doesn t require any crossed wires so that the signal are connected correctly Minimum connection configuration For example the Transmit data signal from controller pin 2 must be connected to the host computer s Receive data line pin 3 and vice versa Consult the host ...

Страница 19: ...r the requested information Allowed ASCII characters A START B STOP C Low Speed ON D Low Speed OFF E Request for operational parameters F Pump times zeroing G Parameters reading H Parameters writing I Request for operating status J Request for numerical reading K Request for counters reading CRC corresponds to the sum with inverted sign of all the preceding bytes e g the START command A in ASCII c...

Страница 20: ...ed send a Request string a string with 9 characters of the following type H data CRC The following parameters can be changed BYTES MEANING 1 Speed threshold 2 5 Run up time in seconds long coded in 4 bytes 6 Deat time 0 NO 1 YES 7 Controller OFF when R2 OFF 0 NO 1 YES 8 Soft Start mode 0 YES 1 NO 9 CRC When the Request is I Status readings the Answer will contain a string of 2 characters with the ...

Страница 21: ...e left in position including the shipping links if no external connections are made The forepump and the Turbo V pump can be switched on at the same time If the Turbo V pump is operated via remote signal is shown in the following paragraph If the hand held terminal is used to monitor the pump operating conditions follow para 3 2 if reprogramming or trouble shooting is required follow para 3 3 and ...

Страница 22: ... S T A R T P U M P R E A D Y P U S H S T A R T B U T T O N Press the CYCLE NUMBER twice and the display shows X X X X C Y C L E X X X X X m P U M P L I F E X X X X X h where CYCLE are the cycles performed range 0 to 9999 m is the elapsed time related to the cycle number displayed range 0 to 99999 minutes PUMP LIFE is the total operation time of the pump range 0 to 99999 hours FRONT REMOTE 232 Sele...

Страница 23: ...NT panel operation After choosing the desired selection by pressing the CYCLE push button press the PUMP CURRENT push button to enter the value The display shows R S 2 3 2 B A U D R A T E X X X X where XXXX means 600 1200 2400 4800 9600 baud rate for the host computer or printer communication The controller is factory set for 9600 baud rate operation If necessary select the desired value by pressi...

Страница 24: ...g figure Monitor Relay Programming The display shows S P E E D T H R E S H O L D S E L E C T I O N X X K R P M where XXKRPM is the switch point of relay R1 at the preset turbopump speed adjustable from 00 to 99 KRPM The speed threshold will condition the R1 and R2 operation see the following cycle diagram and it is factory set to 67 KRPM The speed threshold will condition the R1 and R2 operation a...

Страница 25: ...pressing the CYCLE NUMBER push button select YES if relay R2 must operate only after the run up time or select NO when the R2 operation is needed right from start of the turbopump and after the rotational speed of the turbopump exceeds for the first time the speed threshold value This function is factory set to YES After selection press PUMP CURRENT to confirm the display will be as shown in the f...

Страница 26: ...E NUMBER and PUMP CURRENT push buttons are always active even when the operating mode selected is REMOTE or RS 232 Press the START push button or use the remote or RS 232 start signal and the display shows S O F T S T A R T O N Where the sign minus become a square when the pump finish the ramp up step The active step is indicated by a flashing square As the ten steps are fully covered the pump wil...

Страница 27: ...eak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power drawn by the turbopump increases up to the maximum value Than the Turbo V pump is slowed down in proportion to the gas load at least until it reaches about 9 KRPM This will occur either in NORMAL operatio...

Страница 28: ...n is reached the display shows A P P R O A C H I N G L S X X K R P M L S while approaching the low speed value When the low speed mode is deselected the pump starts to accelerate to its rotational speed The display shows N O R M A L O P E R A T I O N X X K R P M Pump Shutdown Press the front panel STOP pushbutton or remove the remote signal the power from the turbopump will be removed and the pump...

Страница 29: ...START STOP and LOW SPEED front panel pushbuttons are inoperative while the CYCLE NUMBER and PUMP CURRENT pushbuttons are always active RS 232 Control Mode Operation If the RS 232 option is installed and the controller has been programmed for RS 232 operation the controller may be driven by a computer and when ready to operate the display shows R E A D Y F O R R S 2 3 2 S O F T S T A R T If the Sof...

Страница 30: ...ach the planned value within 15 minutes the display will be as shown in the following figure F A U L T O V E R T I M E S X Verify that systems has no leaks than press STOP RESET pushbutton twice to start the pump NOTE If the upper bearing pump temperature exceeds 60 C the pump is shut off and the display will be as shown in the following figure F A U L T P U M P O V E R T E M P The message will st...

Страница 31: ...ach or 3 x 78Ω 50 W each Potentiometer 50 KΩ 1 4 W minimum b Test set up Remove the power cable Disconnect the Turbo V controller Remove the cover from the Turbo V controller Set potentiometer to 30 KΩ and connect it as directed in the following figure Check the line voltage selector and connect the power cable to the appropriate socket Dummy load connections Power Supply Test a DC voltage test Ch...

Страница 32: ...start up it should be 42 Vac with 78Ω dummy load and 42 Vac with 48Ω dummy load On the controller front panel press the STOP pushbutton and remove the power cable Pump over Temperature Test Disconnect the potentiometer set it to 5KΩ and then reconnect it Disconnect the dummy loads Connect the power cable On the controller front panel push the START pushbutton The display should be as shown in the ...

Страница 33: ... input mating connector 969 9853 P7 mating plug 969 9854 Mains cable European plug 3 m long 969 9957 Mains cable American plug 120 V 3 m long 969 9958 OPTIONS DESCRIPTION PART NUMBER RS 232 kit 969 9851 P2 output mating connector 969 9852 Controller to pump extension cable 5 m extension 969 9950 ...

Страница 34: ...1 2 3 4 1000 2000 2000 CHECKED DATE CHAMFER SCALE Ra um PARALLELISM PERPENDICULARITY CONCENTRICITY ANGLE CLASS 03 660822 TV70 OEM MAINS WIRING DIAGRAM H C C19 94 C M 08 06 94 A3 06 94 C M C 5 9 4 8 3 7 2 6 1 ANALOG ANALOG D N D N 03 660824 03 660824 J10 4 J10 3 POWER SUPPLY D N 03 660823 0 0 18 18 0 19 240 220 120 100 0 69 TRANSFORMER 140VA 03 660964 1 2 3 4 5 2 FUSE T3A 3 PHASE OUTPUT J10 J8 AND ...

Страница 35: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 36: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 37: ... Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beis...

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