The gauge uses thoria-coated iridium (ThO-Ir) filaments. These filaments are
burnout resistant, and therefore exhibit high tolerance to air and water in the
vacuum manifold. There is a time delay associated with heating the filament to
allow it to stabilize. Stable readings will be obtained in 15 – 20 seconds.
The ion gauge measures pressures between 0.1 and 10,000 Torr. A logarithmic
amplifier on the ion detection board amplifies the collector current, and the data
system interprets this current as measured pressure. Ion gauge pressures can
be monitored from the Manual Control, Diagnostics, and Startup/Shutdown tab
dialogs in System Control.
Thermocouple Gauge
A thermocouple gauge is attached to the foreline pump hose to measure
pressure to check for gross leaks and foreline pump failure. The thermocouple
gauge is a simple, rugged, vacuum gauge that is used to measure vacuum
pressures in the 2 Torr (267 Pa) to 1 x 10
-3
Torr (1.3 x 10
-1
Pa) range. The
gauge’s main purpose is to enable the detection of gross leaks and foreline pump
failure.
Pneumatics
Pneumatics components deliver the required gases to the analyzer including
helium damping gas, calibration gas (FC-43), and various CI reagents.
Cal Gas Vial
Roughing
Elbow
03-931726-01
Turbo
27-230680-00
Sample
Turbo
27-230680-00
Trap
03-931018-01
Ext Source
03-931017-01
50 mL
Needle Valve Block
03-931015-01
HE/CI Block
03-931014-01
Transferline
03-931012-01
Manifold
03-931603-01
Getter
03-931438-01
Roughing
Pump
Rear Panel
EFC Block
03-92641-00
Plunger
Vent
Vent
V2
P
C2
S
V2
S
V3
P
Vent Stem
Front Panel
HE IN
Liq CI IN
10 mL
CI IN
4 mL
CI Block
03-930555-01
C2S
3
0
Symbols:
Vent Stem
Proportioning Valve
2-Way Clipard Valve
Needle Valve
Restrictor
External Only
Pneumatics Interconnections
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