Ulvac SGT-100, Инструкция по эксплуатации

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4. Element
1) Specification
Type Dimension Weight Color Package
SDL-250 Outside
φ
65 x Inside
φ
25 x H80mm 20g Yellow Filled with N
2
gas
2)
Characteristic of packaging and element
The element is packaged with N
2
gas, because the element has tendency to absorb the
moisture. Unpack just before installing.
3) Cautions in handling
◇
Ensure that install the element just before using it.
◇
In case of installing the SGT to the on-off operation vacuum pump, it might affects
to the vacuuming performance due to water absorbing of the element.
◇
When unpacking the element from the N
2
sealed package, it will immediately start
absorbing the moisture and gases. Use the SGT immediately after unpacking. If
not, vacuum operation will be prolonged.
4) Installing the element
According to the following procedures, install the element.
1.
Remove the wing nut of the housing and put the element. Close the lid again and
tighten the wing nut. (Refer to the item 8)
2. Attach the SGT to the pipe of the system and ensure that coupling and flange are
attached properly.
3. The time for installing the SGT is about 10 minutes.
4. Start vacuum operation immediately after installing the SGT.
Ensure that the designated pressure is achieved.
5. Cautions in operation
①
Connect the SGT to system properly.
②
Ensure that the ambient temperature is below 100
℃
.
③
Ensure that after using the poisonous, inflammable and ignitable gas, purge
with N
2
gas. If not, it causes the problem for fire or explosion.
④
Ensure that N
2
gas supply is available.
⑤
Periodically replacement is required after installing the element.
2