Ulvac SGT-100, Инструкция по эксплуатации

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1. General
SGT-100, 200 is a disposing system using ion exchange fabrics as filter element which is
chosen from our developed high quality resin group.
SGT is for purifying the system from the reaction product in the exhaust gas.
Since using the SGT-100,200, it reduces the maintenance problem from exhaust system
and reduce the overloading to the duct equipment.
2.
Specification
※
Hosing and element are packed separately.
3.
Dimensional
drawing
SGT-100 SGT-200
Port caliber NW25 NW40
O-ring Fluorine rubber Fluorine rubber
Pressure
1Pa
～
10
5
Pa
Wight Approx. 1.7Kg Approx. 2.0Kg
Material SUS304 SUS304
Housing
Outside
dimension
φ
89.1mm x 154mm(L)
（
flange:
φ
128
）
φ
89.1mm x 234mm
（
L
）
(flange:
φ
128)
Type of
element
SDL-250 SDL-250 x 1pce SDL-250 x 2pcs
1
≪SGT-100≫
A-A
≪SGT-200≫
A-A