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Document No.43500-2-01-15

ULVAC

Inlet/Exhaust Filter for Vacuum Pump

SGT-100
SGT-200

Instruction Manual

Prior to use

For safe and efficient use of this filter, be sure to go to through
this manual before operation.
After reading the manual, keep it in your file for future
reference.
Specifications in this manual are subject to change without
notice due to future improvement.

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Содержание SGT-100

Страница 1: ...Instruction Manual Prior to use For safe and efficient use of this filter be sure to go to through this manual before operation After reading the manual keep it in your file for future reference Specifications in this manual are subject to change without notice due to future improvement ...

Страница 2: ...4 1 General 1 2 Specification 1 3 Dimensional drawing 1 4 Element 2 5 Cautions in operation 2 6 Checking before operation 3 7 Installation 3 8 How to replace the element 3 9 Maintenance 4 10 Caution 5 11 Trouble shooting 5 12 Warranty 6 ...

Страница 3: ...strictly observed could result in injury or damage the equipment Warning This note indicates a potentially hazardous situation which if not strictly observed could result in severe personal injury Caution This note indicates a potentially hazardous situation which if not strictly observed could result in slight injury or damage to the equipment The safety remainder is indicated as shown below This...

Страница 4: ...If not it causes the problem for explosion or fire Ensure that do not touch to the system during operation When remove the SGT 100 200 after using the poisonous reactive and inflammable gas from the piping system purge with N2 gas If not it cause the gas leakage and explosion Caution Ensure that avoiding to use the SGT in the place of moisture vibration dirt dust or place to get direct ｓｕｎｌｉｇｈｔ If...

Страница 5: ...gnated equipment for connection If not it causes the problem of gas leakage heat and explosion Ensure that clamp parts or alike are tightened up before using it If not it causes the problem of gas leakage heat and explosion When overhaul the SGT contact your local agency or ULVAC KIKO Caution Ensure that not to wet the SGT If not it causes the problem for malfunction of the equipment due to moistu...

Страница 6: ...he operation performance When installing the element place in hard case as cardboard and install in a place at well ventilated and dry place If not it causes the problem of deformation of the element Unpacking the element just before using it Packing is degas processing If not it takes long time for vacuuming due to absorption of the moisture in the air Ensure that the element should not be cut bo...

Страница 7: ...ance problem from exhaust system and reduce the overloading to the duct equipment 2 Specification Hosing and element are packed separately 3 Dimensional drawing SGT 100 SGT 200 Port caliber NW25 NW40 O ring Fluorine rubber Fluorine rubber Pressure 1Pa 105Pa Wight Approx 1 7Kg Approx 2 0Kg Material SUS304 SUS304 Housing Outside dimension φ89 1mm x 154mm L flange φ128 φ89 1mm x 234mm L flange φ128 T...

Страница 8: ...cking If not vacuum operation will be prolonged 4 Installing the element According to the following procedures install the element 1 Remove the wing nut of the housing and put the element Close the lid again and tighten the wing nut Refer to the item 8 2 Attach the SGT to the pipe of the system and ensure that coupling and flange are attached properly 3 The time for installing the SGT is about 10 ...

Страница 9: ...re is no leakage In case of installing the exhaust side install SGT immediately after rough pump In case of vacuum side install the SGT near the roughing pump for effective use Ensure that connect the SGT firmly If not it causes the problem for leakage How to install the element Inlet Outlet Inlet Outlet Installation in Installation in Vacuum side outlet side 8 How to replace the element Replaceme...

Страница 10: ...ent Check the pressure rise by vacuum gauge Also checking the vacuum exhaust and vacuum degree and use the SGT properly If not replacing the element in certain time it might cause the problem of damaging the equipment Replace of the element The time that pressure start increasing replacement of element is required or periodically replacement is required Guideline of the replacement time of element...

Страница 11: ... to use Large Cleaning is required also check the element ensure that no clogging Element is clogged Check the particle at INLET pipe flange parts Visual look Small Continue to use Bad corrosion and partly coming off Replace the housing corrosion of the inside housing Visual look Corrosion only Continue to use Check the element According to item According to item According to item Good O ring is s...

Страница 12: ...ace or a place where temperature and or humidity is high use under special conditions such as radiation or other 3 Troubles caused by modification or repair by an unauthorized person 4 Troubles caused by acts of god or force majored 5 Consumables 6 Troubles caused by unusual high internal pressure such as operating the pump with the filter plugged 7 Troubles caused by operating conditions deemed n...

Страница 13: ... 2169 Nagoya Branch 3 11 31 Sakae Naka ku Nagoya shi Aichi Prf Japan TEL 81 52 249 5121 FAX 81 52 249 5122 Service Office Yokohama Branch 1 10 4 Kitashinyokohama Kohoku ku Yokohama shi Kanagawa Prf Japan TEL 81 45 533 0509 FAX 81 45 533 0512 Miyazaki Branch 291 7 Chausubaru Saito shi Miyazaki Prf Japan TEL 81 983 42 4135 FAX 81 983 43 2159 ULVAC GmbH Klausnerring 4 85551 Kirchheim b München German...

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