RF
POWER
SUPPLY
～
RFS-03D
～
6．TROUBLESHOOTING
13
６.
TROUBLESHOOTING
The section describes action on trouble.
６.１.
TROUBLESHOOTING For RF POWER SUPPLY
If trouble occurs, make an initial diagnosis with referring to table 6.1.
Also please refer to the troubleshooting of the matching box manual.
WARNING
When checking inside the power supply, t
urn off the main breaker of the power supply
used a
nd
wait for three minutes until operating.
Table 6．1 Troubleshooting for RF Power Supply
No.
Trouble symptom
Confirmation item
Possible cause
Corrective action
①
After turning on the
POWER switch, nothing
is displayed in the Pf・
Pr
AC input line has
a power failure
Required voltage is not
applied.
Check AC input line
Nothing wrong with
AC input line
Trouble inside power
supply
There is a possibility of the
power supply breakdown.
→Contact ULVAC
② RF cannot be turned
ON.
INTERLOCK LED
does not light
The panel/cover of
the power supply or
the matching box is
not placed properly
Check whether the panel/
cover of the power supply
and the matching box is
open
Pin between 14 and
15 of EXT.CONT cable
is open
Close pin between 14 and
15 of EXT.CONT cable if
external INTERLOCK is not
on
EXT.CONT cable is not
conected
Insert the cable, and fix it
with the screws
Others
There is a possibility of the
power supply breakdown
→Contact ULVAC
INTERLOCK LED
lights
The setting of the RF
ON/OFF LOCAL/
REMOTE changing-over
switch is inappropriate.
Set it properly. (Refer to 4.1.)
Others
There is a possibility of the
power supply breakdown
→Contact ULVAC
