RF
POWER
SUPPLY
～
RFS-03D
～
1.
FOR SAFETY OPERATION
2
１.２.
LOCATION OF WARNING LABELS AND NAMEPLATES
NOTE
Figure 1.1 describes the location of warning labels. Make sure that all warning labels are clean and
legible at all times. Use a cloth or water to clean the warning label. Do not use gasoline or organic
solvent. If the label is damaged, lost or illegible, contact your local ULVAC representative.
On the nameplate on the rear panel of the power supply is inscribed the serial number of the power
supply. See to it that it is always legible.
Figure １．１ Location of warning labels and nameplate.
１.３.
CONTACT INFORMATION
If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your
local ULVAC representative, after confirming information of the product. In case of trouble, let us know the
product information and trouble symptom and situation in detail as much as possible.
■Product information (These are described on the nameplate)
Product model
Manufacturing number on the product （Serial No. and Lot No.）
F
ro
nt
Back
nameplate
high voltage warning label
