Ulvac PBL Series, Инструкция по эксплуатации

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3.7 Pump fluid installation
It is attached to PBL-02 and PBL-04 fluid.
As for PBL-06, PBL-10, PBL-14 and PBL-20, fluid is in the pump. Please confirm that fluid is
contained by the fluid level gauge.
Do not use the fluorine oil .
Please never use the fluorine-based oil. Fluorine oil disintegrates, and a
poisonous gas might be generated that the oil diffuser pump oil is a high
temperature and operates.
Use the specified lubricant.
Use of a non-specified lubricant will affect the pump's performance and service life as
well as void the pump's warranty coverage.
In addition, It is in danger of the life of the pump becoming short, the damage of
the pump and the explosion.
Wear protective equipment.
During work such as inspections, wear protective equipment suitable for handling the
toxic substance to be used.
Obtain and carefully read the SDS before using this pump.
If lubricant adheres to the skin or enters the eyes, follow the first aid procedure
described on the SDS.
Fill up with fluid by all means.
A heater is snapped when you feed it without filling up with fluid it, and a boiler is
damaged.
Don’t use the pump mixing oil more than two kinds.
3.8 Vacuum Test
After having attached the pump to a equipment, please confirm whether connection does not
have deficiency before supplying a power supply.
Operate roughing pump next, and pressure reaches near the ultimate pressure of the
roughing pump, or, please confirm it.
When do not reach to about the ultimate pressure, there is big leak or confirms it, and, please
revise it.