Ulvac GM-2001, Инструкция по эксплуатации

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19
7.5.
34B
Pressure Indication is not Constant.
Possible cause Corrective action
1) Pressure is changing 1) Normal
2) The sensor head is contaminated or
deteriorated.
2) Replace the sensor head
3) There is a leak in the neighborhood of the
sensor head or area where the sensor head
is attached.
3) Leak in the sensor head
➝
Replace it.
Leak in other area
➝
Stop the leak
4) Poor contact of the sensor head cable or
increase in the resistance of wire due to
corrosion or insulation failure.
4) Check the sensor head cable for continuity and
insulation.