Ulvac G-Tran BMR2, Инструкция по эксплуатации

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5. INSTALLATION
5.1. Preparations
(1) Unpack the unit and check quantities. (See section 3.2)
(2) Check components to see if any components are damaged.
5.2. Installation
5.2.1. Installing the sensor head to the sensor unit
See section 10.
5.2.2. Installing the sensor unit
Install the sensor head to the
gauge port of the vacuum system.
(1) Measuring position
This gauge measures the
static pressure in the position
where the sensor head is installed. If there is a gas flow, source of outgas or intense
electrons or ions in the vacuum system, carefully select the measuring position so
that measurement is least affected by them.
(2) Installing the sensor head
• Install the sensor head in such a manner that the plane of the sensor mounting
port is parallel to gas flow. Ensure that gas does not enter the sensor head in the
form of beam. (See Fig. 5-1.)
• O-rings to be used in installing the sensor head should be as free from outgas as
possible. Use of rubber pipes or grease that release much outgas can be a cause
of error.
Fig. 5-1 Installing SC1
Vertical direction
O-ring gland
O-ring
Cap
Gauge port
Gas flow direction
POWER
PROTECT
HV
SET-1
SET-2
G-TRAN SC1
!
WARNING
Turn OFF power.
!
CAUTION
Beware of magnetic field.
!
CAUTION
Provide ventilation.
!
CAUTION
Keep out foreign matter.
!
CAUTION
Pay attention to operating
environment.
!
CAUTION
Check connection.