Ulvac G-Tran BMR2 Скачать руководство пользователя страница 46 | Manualshive

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37

Pressure

[Pa]

Measurement

value output

[V]

Pressure

[Pa]

Measurement

value output

[V]

Pressure

[Pa]

Measurement

value output

[V]

7.00E-04

5.436

3.00E-03

7.151

8.00E-03

8.156

7.10E-04

5.452

3.10E-03

7.188

8.10E-03

8.167

7.20E-04

5.469

3.20E-03

7.223

8.20E-03

8.178

7.30E-04

5.485

3.30E-03

7.258

8.30E-03

8.188

7.40E-04

5.501

3.40E-03

7.291

8.40E-03

8.199

7.50E-04

5.516

3.50E-03

7.323

8.50E-03

8.209

7.60E-04

5.532

3.60E-03

7.354

8.60E-03

8.219

7.70E-04

5.547

3.70E-03

7.384

8.70E-03

8.230

7.80E-04

5.562

3.80E-03

7.413

8.80E-03

8.239

7.90E-04

5.577

3.90E-03

7.441

8.90E-03

8.249

8.00E-04

5.592

4.00E-03

7.469

9.00E-03

8.259

8.10E-04

5.607

4.10E-03

7.495

9.10E-03

8.268

8.20E-04

5.621

4.20E-03

7.521

9.20E-03

8.277

8.30E-04

5.635

4.30E-03

7.546

9.30E-03

8.287

8.40E-04

5.650

4.40E-03

7.570

9.40E-03

8.296

8.50E-04

5.664

4.50E-03

7.594

9.50E-03

8.304

8.60E-04

5.677

4.60E-03

7.617

9.60E-03

8.313

8.70E-04

5.691

4.70E-03

7.640

9.70E-03

8.322

8.80E-04

5.704

4.80E-03

7.662

9.80E-03

8.330

8.90E-04

5.718

4.90E-03

7.683

9.90E-03

8.339

9.00E-04

5.731

5.00E-03

7.704

1.00E-02

8.347

9.10E-04

5.744

5.10E-03

7.724

1.10E-02

8.423

9.20E-04

5.757

5.20E-03

7.744

1.20E-02

8.491

9.30E-04

5.770

5.30E-03

7.763

1.30E-02

8.550

9.40E-04

5.783

5.40E-03

7.782

1.40E-02

8.603

9.50E-04

5.795

5.50E-03

7.800

1.50E-02

8.651

9.60E-04

5.808

5.60E-03

7.818

1.60E-02

8.694

9.70E-04

5.820

5.70E-03

7.836

1.70E-02

8.733

9.80E-04

5.832

5.80E-03

7.853

1.80E-02

8.768

9.90E-04

5.844

5.90E-03

7.870

1.90E-02

8.801

1.00E-03

5.856

6.00E-03

7.886

2.00E-02

8.831

1.10E-03

5.970

6.10E-03

7.903

2.10E-02

8.858

1.20E-03

6.073

6.20E-03

7.918

2.20E-02

8.884

1.30E-03

6.169

6.30E-03

7.934

2.30E-02

8.908

1.40E-03

6.257

6.40E-03

7.949

2.40E-02

8.930

1.50E-03

6.340

6.50E-03

7.964

2.50E-02

8.950

1.60E-03

6.417

6.60E-03

7.978

2.60E-02

8.969

1.70E-03

6.489

6.70E-03

7.993

2.70E-02

8.987

1.80E-03

6.557

6.80E-03

8.007

2.80E-02

9.004

1.90E-03

6.621

6.90E-03

8.020

2.90E-02

9.020

2.00E-03

6.681

7.00E-03

8.034

3.00E-02

9.035

2.10E-03

6.739

7.10E-03

8.047

3.10E-02

9.049

2.20E-03

6.793

7.20E-03

8.060

3.20E-02

9.062

2.30E-03

6.845

7.30E-03

8.073

3.30E-02

9.075

2.40E-03

6.895

7.40E-03

8.085

3.40E-02

9.087

2.50E-03

6.942

7.50E-03

8.098

3.50E-02

9.098

2.60E-03

6.987

7.60E-03

8.110

3.60E-02

9.109

2.70E-03

7.031

7.70E-03

8.121

3.70E-02

9.119

2.80E-03

7.072

7.80E-03

8.133

3.80E-02

9.129

2.90E-03

7.112

7.90E-03

8.145

3.90E-02

9.138

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Содержание G-Tran BMR2

Страница 1: ...MANUAL This manual is for the SC1 cold cathode ion gauges of the following serial numbers Serial No 02300G and higher Read this manual before operation and keep it at hand for immediate reference Comp...

Страница 2: ......

Страница 3: ...symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when fail...

Страница 4: ...to this unit and a risk of fire Protective grounding When this unit is insulated from the vacuum chamber ground the case section D sub connector shell section with a class D class 3 ground Do not dis...

Страница 5: ...head during operation shut off the power The anode terminal of the sensor head is energized with a discharge voltage of 2 6 kV DC If you touch it when this gauge is actuated you will get electric sho...

Страница 6: ...ication or components may fail if the insulation resistance of the anode is not higher than 10 000 M Insulation resistance of anode After reassembly make sure that the anode pin is at the center of th...

Страница 7: ...N OFF 11 7 2 Output Signals 11 7 2 1 Setpoint actuating signal SET 1 ON OFF SET 2 ON OFF 11 7 2 2 Discharge valid signal Discharge OK NG 11 8 SETTING OF SETPOINT 12 9 FUNCTIONS 13 9 1 Setpoint SET 1 O...

Страница 8: ...on Check 27 10 8 1 When a insulation resistance tester is available at hand 27 10 8 2 If a insulation resistance tester is not available at Hand 27 10 9 Leak Test 29 10 10 Installing the Sensor Unit a...

Страница 9: ...pole 1 spacer and magnetic pole 2 pushed out 21 Fig 10 9 Insulation check of anode 22 Fig 10 10 Anode 22 Fig 10 11 Polishing the anode example 23 Fig 10 12 Magnetic poles 23 Fig 10 13 Magnetic poles 1...

Страница 10: ...zation BMR2 Sensor unit Analog Pirani SP1 Analog CCG SC1 Analog communication Pirani atmospheric pressure SW1 Analog communication Ionization multi SH2 SH2 dedicated Pirani SPU SH2 dedicated Pressure...

Страница 11: ...ited to applications that require no indicators only if data and signals can be taken out Dedicated indicators digital are available as option The gauge has independent setpoints two Small in size and...

Страница 12: ...10 to 40 C Control input signal HV ON OFF Data output 0 V to 10 VDC non linear Measurement data Setpoint actuating set value 1 data Setpoint actuating set value 2 data Control output signal Open coll...

Страница 13: ...Model IM1R1 24VDC power supply type Model IM2R1 100VAC power supply type Model ISG1 24VDC power supply type Sensor head See 3 1 Key Specifications Compatible Sensor Head Display cable 2 m 5 m and 10 m...

Страница 14: ...iption Function I O connector I O connector for power supply data and signal D sub 15 pin See section 4 3 for pin No CCG sensor fixing plate Metal plate that fixes the sensor head to the SC1 C ring Ri...

Страница 15: ...supplied to the sensor unit PROTECT lamp PROTECT Not used HV lamp HV Lights when HV ON signal input SET 1 lamp SET 1 Lights when setpoint 1 is actuated SET 2 lamp SET 2 Lights when setpoint 2 is actu...

Страница 16: ...ote host display unit 3 Setpoint actuating signal 1 4 Discharge OK NG 5 HV ON OFF 6 NC 7 Setpoint 1 set value 8 Measurement value nonlinear output 9 Power ground Power 10 OUT COM setpoint Remote host...

Страница 17: ...ition so that measurement is least affected by them 2 Installing the sensor head Install the sensor head in such a manner that the plane of the sensor mounting port is parallel to gas flow Ensure that...

Страница 18: ...ection GND Power GND 9pin and GND 10pin 15pin are common inside after being filtered through the filter Fig 5 2 Use power 24V 1pin and power GND 9pin in power line connection If other GND is used meas...

Страница 19: ...he pressure value and accuracy for this unit differ by the type of gas measured The accuracy for this unit is based on measuring nitrogen gas Be careful when using gases other than nitrogen Gas type d...

Страница 20: ...nal transistor will be actuated if the measured value is lower than the set pressure Lo output when setpoint is ON See section 4 3 for the pin numbers See section 8 7 2 2 Discharge valid signal Discha...

Страница 21: ...pin or 15 pin GND In the case of setpoint 1 ST The set voltage is output between the setpoint set value and ground by turning the setpoint setting trimmer The output voltage is the same as on the meas...

Страница 22: ...See section 8 Values that can be set are 1 0 10 5 to 1 Pa 7 5 10 8 Torr to 7 5 10 3 Torr as with the measurement range 9 1 3 Setpoints of measuring unit and display unit The setpoint of the display u...

Страница 23: ...condition as it does not discharge 9 2 1 Measurement value voltage output form All measurable pressure ranges are output by an analog voltage of 0 to 10 volts non linear See section 14 1 and section 3...

Страница 24: ...t voltage In normal measurement Voltage corresponding to measured pressure When discharge is not set up 10 V or more Below measurable lower limit Voltage corresponded to pressure reference only Below...

Страница 25: ...commended Thin plastic rod Sandpaper 180 400 Polishing the electrode Use of metal file is strictly forbidden 180 240 or 400 is recommended Wiper Cleaning the electrode Wiper for use in a low level dus...

Страница 26: ...he inner diameter If brought close to a metal object it will be attracted with strong force and may catch your finger or other Beware of magnetic field 10 4 1 Removing Screws Remove the 3 M3 screws ma...

Страница 27: ...5 1 Exploded View of Sensor Head Anode Cathode magnetic pole 1 Cathoede spacer Cathode magnetic pole 2 Cap screw O ring Disassembling the Sensor Head Reassembling the Sensor Head Fig 10 3 Exploded vie...

Страница 28: ...screw Before the cap screw is removed After the cap screw is removed Turn to remove Fig 10 4 Removing the cap screw 10 5 2 2 Removing the anode This can be a cause of leak Do not bend the anode pin o...

Страница 29: ...n removing the O ring The scar can cause leak Scar on the O ring or O ring groove Note that the use of a metal screwdriver can scar the O ring or O ring groove Use a thin plastic slotted screwdriver t...

Страница 30: ...ic pole 2 Insert a rod cleaned with degreased cotton from the port side of the sensor head to push out magnetic pole 1 spacer and magnetic pole 2 Fig 10 8 Magnetic pole 1 spacer and magnetic pole 2 pu...

Страница 31: ...roblem but if it is less than 10 000 M replace the anode with a new one If a insulation resistance tester is not available at hand check insulation after reassembly Refer to 6 Fig 10 9 Insulation chec...

Страница 32: ...Fig 10 12 The surfaces should be of metallic color If they are discolored or stained polish them with sandpaper First polish them with rough sandpaper 180 or 240 until the color becomes metallic and t...

Страница 33: ...h the spacer after stretching it First polish it with rough sandpaper 180 or 240 until the color becomes metallic and then finish with finer sandpaper of 400 Wind the spacer around the side of magneti...

Страница 34: ...f scar and dust Scar and dust on O ring Observe the surface condition of the O ring and O ring groove shown in Fig 10 18 If the O ring is scarred or deformed replace it with a new one If the O ring gr...

Страница 35: ...e center axis of anode 10 7 1 Reassembly Reassemble the sensor head referring to the exploded view in Fig 10 3 The reassembling procedure is reverse to the disassembling procedure 10 7 2 Checking the...

Страница 36: ...ing on the high voltage to this instrument under atmospheric pressure do not make check in combustible gas atmosphere If a high voltage of about 2 6 kV DC is applied spark will be emitted and may caus...

Страница 37: ...er Fig 10 22 Check with the sensor unit connected wiring example Table 10 1 SC1 Pin Assignment Pin No Name Pin No Name 1 24 V DC power supply 9 Power GND 2 Setpoint actuating signal 1 10 GND 3 Dischar...

Страница 38: ...10 23 and make sure that the leak rate is below the allowable level of 1 10 10 Pa m3 s 7 5 10 13 Torr m3 s If a helium leak detector is not available at hand use the build up method or other to make...

Страница 39: ...head should turn without resistance if it is inserted correctly If it is inserted correctly the sensor head should fit into the depth of the SC1 circuit Fix it with screws Fig 10 24 Installing the sen...

Страница 40: ...e range Normal Erroneous wiring or disconnection between sensor unit and remote host Correct the wiring and check continuity by a circuit tester P 7 Line voltage is low Check line voltage by a circuit...

Страница 41: ...external noise Change the cable installation location Or use the unit by turning off equipment that can be a source of noise Examine the method of laying cable Take actions against noise separately Th...

Страница 42: ...r to the local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire st...

Страница 43: ...rks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful substances N...

Страница 44: ...hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board X O O O O O Chassis O O O O O O Connector O O O O O O DC DC Converter O O O...

Страница 45: ...E 04 4 799 3 10E 05 2 022 8 10E 05 3 119 4 10E 04 4 826 3 20E 05 2 062 8 20E 05 3 132 4 20E 04 4 853 3 30E 05 2 100 8 30E 05 3 145 4 30E 04 4 879 3 40E 05 2 137 8 40E 05 3 157 4 40E 04 4 905 3 50E 05...

Страница 46: ...03 7 724 1 10E 02 8 423 9 20E 04 5 757 5 20E 03 7 744 1 20E 02 8 491 9 30E 04 5 770 5 30E 03 7 763 1 30E 02 8 550 9 40E 04 5 783 5 40E 03 7 782 1 40E 02 8 603 9 50E 04 5 795 5 50E 03 7 800 1 50E 02 8...

Страница 47: ...6 5 20E 02 9 227 5 40E 02 9 237 5 60E 02 9 246 5 80E 02 9 255 6 00E 02 9 263 6 20E 02 9 271 6 40E 02 9 278 6 60E 02 9 284 6 80E 02 9 290 7 00E 02 9 296 7 20E 02 9 302 7 40E 02 9 307 7 60E 02 9 312 7 8...

Страница 48: ...06 4 799 2 33E 07 2 022 6 08E 07 3 119 3 08E 06 4 826 2 40E 07 2 062 6 15E 07 3 132 3 15E 06 4 853 2 48E 07 2 100 6 23E 07 3 145 3 23E 06 4 879 2 55E 07 2 137 6 30E 07 3 157 3 30E 06 4 905 2 63E 07 2...

Страница 49: ...83E 05 7 724 8 25E 05 8 423 6 90E 06 5 757 3 90E 05 7 744 9 00E 05 8 491 6 98E 06 5 770 3 98E 05 7 763 9 75E 05 8 550 7 05E 06 5 783 4 05E 05 7 782 1 05E 04 8 603 7 13E 06 5 795 4 13E 05 7 800 1 13E 0...

Страница 50: ...216 3 90E 04 9 227 4 05E 04 9 237 4 20E 04 9 246 4 35E 04 9 255 4 50E 04 9 263 4 65E 04 9 271 4 80E 04 9 278 4 95E 04 9 284 5 10E 04 9 290 5 25E 04 9 296 5 40E 04 9 302 5 55E 04 9 307 5 70E 04 9 312...

Страница 51: ...42 15 3 Related Drawings 15 3 1 Compatible Sensor Heads GAUGE PORT Fig 14 1 Compatible sensor heads Sensor head model name Mounting port diameter C 21 15 18 mm dia C 23 UFC034 C 24 NW16 C 25 NW16...

Страница 52: ...43 Fig 14 2 Dimensional drawing...

Страница 53: ...44 other Terminal block 24VDC power supply Commercially available power supply AC power supply Fig 14 3 Connection reference drawing 1...

Страница 54: ...4CH Display IM1R1 IM2R1 Main power 100 VAC 24VDC RS232C Remote I O Recorder output Measuring unit is an example of configuration CH1 SC1 CH2 BPR2 CH3 BPR2 CH4 BPR2 Fig 14 4 Connection reference diagra...

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