Ulvac DAU-100, Инструкция по эксплуатации

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8
6.3 Regular Inspections
Inspect consumables after the first 4000 hours of operation, and replace in accordance with
the Replacement Guide on the following page. Refer to 6.4 Replacing Consumables for
procedures.
Request replacement by
the manufacturer’s service division if a repair technician is not
available.
<Consumables List>
Table 6.1 Consumables List
Components Quantity Material Average life
Diaphragms 4
Synthetic rubber
(NBR)
4000~6000 h
A valve 12
Synthetic rubber
(NBR)
4000~6000 h
Non-return valves 1
Synthetic rubber
(CR)
6000~8000 h
O rings (P-18) 1
Synthetic rubber
(NBR)
6000~8000 h
O rings (P-10) 7
Synthetic rubber
(NBR)
6000~8000 h
Head gaskets
4
Synthetic rubber
(NBR)
6000~8000 h
Bearings 1 Set
Approximately
15000 h
Note that the average life for a component varies with the conditions of use.
Bearings are replaced by the manufacturer’s service division.
<Replacement Guide>
Diaphragms
: Replace if cracked, worn, hard, or deformed.
Valves : Replace if deformed, hard, or cracked.
Non-return valves : Replace if deformed, hard, or cracked.
O-rings
: Replace if hard, cracked, or stretched.
Head gaskets : Replace if hard, cracked, or stretched.
Bearings : Request manufacturer for repair if abnormal noises or abnormal motor
vibration is noted.
<Locations for Maintenance and Inspection>
Table 6.2 Locations for Maintenance and Inspection
Period of
operation
Inspection item Inspection details
Method of
inspection
4000 hours
Diaphragms Wear, hard, or cracked
Visual
inspection
Valves Deformed, hard, or cracked
Visual
inspection
Non-return valves Deformed, hard, or cracked
Visual
inspection
O rings Hard, cracked, or stretched
Visual
inspection
Head gaskets Hard, cracked, or stretched
Visual
inspection
Bearings Abnormal noises Listen