A-1
A P P E N D I X A
S p e c i f i c a t i o n s
All specifications meet or exceed ISO 21501-4 and JIS B9921 and are
subject to change without notice.
Specification
Description
Size Range
9310/9350:
0.3 to 25 μm
9510/9550/9500: 0.5 to 25 μm
Channel Sizes
(additional channel
sizes available)
9310-02:
0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm
9350-02:
0.3, 0.5, 1.0, 2.0, 3.0, 5.0 μm
9350-03:
0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm
9510-02:
0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
9550-02:
0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
9500-01:
0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
Counting Efficiency
9310/9350: 50% @ 0.3 μm; 100% for particles
>0.45 μm (per JIS and ISO 21501-4)
1
9510/9550/9500:
50% @ 0.5 μm; 100% for particles
>0.75 μm (per JIS and ISO 21501-4)
1
Concentration Limits
9310/9510: 400,000 particle/ft
3
at 5% coincidence loss
9350/9550: 350,000 particle/ft
3
at 5% coincidence loss
9500:
200,000 particle/ft
3
at 5% coincidence loss
Light Source
Long life laser diode
Zero Count Level
<1 count/5 minutes (meets JIS B9921 and
ISO 21501-4)
Flow Rate
9310/9510: 28.3 L/min (1.0 CFM) with
±
5% accuracy
(meets JIS and ISO 21501-4)
9350/9550: 50 L/min (1.77 CFM) with
±
5% accuracy
9500:
100 L/min (3.53 CFM) with
±
5% accuracy
Flow Control
Automatic
Calibration
NIST traceable
Sample Probe/Tubing
Isokinetic sampling probe
Sampling Modes
Manual, automatic, beep, cumulative/differential count,
or concentration
Sampling Time
1 second to 99 hours
Sampling Frequency
1 to 9999 cycles or continuous
Sample Output
Internal HEPA filter
Vacuum Source
Internal pump with patented* flow control technology
Communication Mode
Modbus
®
TCP over Ethernet (TCP/IP) or USB output
1
Meets all ISO 21501-4 specifications for ISO 14644-1 Class 3 and higher cleanrooms
*
Patent Number 6,167,107
Содержание 9510
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