Thyracont VSR53MV, Руководство по эксплуатации

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6 Technical Data
Measurement principle piezo-resistive / heat conduction Pirani (Pirani
depending on gas type)
Measuring range 2000 - 5.0x10
-5
mbar (1500 - 5.0x10
-5
Torr)
Max. overload 10 bar abs.
Accuracy 2000 ... 200 mbar: 2% f. reading
200 ... 40 mbar: 5% f. reading
40 ... 1.0x10
-3
mbar: 10% f. reading
Repeatability 2000 ... 40 mbar: 0.1% f. scale end
40 ... 1.0x10
-2
mbar: 2% f. reading
Materials in contact
with vacuum stainl. steel 1.4307, tungsten, nickel, glass,
SiO
2
, tin-silver solder, polyimide, epoxy
Reaction time 18 ms
Operating temperature 5 ... 60
◦
C
Storage temperature -40 ... +65
◦
C
Bake-out temperature max. 125
◦
C at the flange (voltage supply
switched-off)
Voltage supply 12 - 30 VDC
Power consumption max. 0.3 W
Output signal 0 - 10 VDC, logarithmic, min. 10 k
Ω
Electrical connection Type Hirschmann, 6pole, male, lockable
Vacuum connection VSR53: small flange DN16 ISO KF
VSR54: conflat flange DN16 CF
VSR-0-10 V-210805