Thyracont VSH87E, Руководство по эксплуатации

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7 Technical Data
Measurement principle heat conduction Pirani / hot cathode Bayard
Alpert, depending on gas type
Measurement range 1000 - 5.0x10
-10
mbar (750 - 5.0x10
-10
Torr)
Max. overload 4 bar abs.
Accuracy 1000 ... 10 mbar: approx. 30% f. reading
10 ... 1.0x10
-8
mbar: 10% f. reading
Repeatability 10 ... 1.0x10
-2
mbar: 2% f. reading
1.0x10
-2
... 1.0x10
-8
mbar: 5% f. reading
Materials in contact
with vacuum stainl. steel 1.4307, tungsten, nickel, glass,
platinum, iridium, yttria oxide
Filaments Bayard Alpert yttria coated iridium
Emission current 9 µA, 100 µA, 1.0 mA, 2.0 mA
Degas method ohmic heating of the anode
Reaction time 50 ms (switching of emission current < 2 s)
Operating temperature 5 ... 60
◦
C
Storage temperature -40 ... +65
◦
C
VSH-EtherCAT-200116