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TELEVAC MC300, Инструкция по эксплуатации

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2.5

Analog Outputs

2

SETUP

Table 6: 7E/7F/7FC Analog Output

Pressure
(Torr)

Logarithmic
Output (V)

Linear by
Decade
Output (V)

1.00E-11

0

0.1

2.51E-11

0.4

0.251

6.31E-11

0.8

0.631

1.00E-10

1.0

1.1

2.51E-10

1.4

1.251

6.31E-10

1.8

1.631

1.00E-09

2.0

2.1

2.51E-09

2.4

2.251

3.98E-09

2.6

2.398

6.31E-09

2.8

2.631

1.00E-08

3.0

3.1

2.51E-08

3.4

3.251

3.98E-08

3.6

3.398

6.31E-08

3.8

3.631

1.00E-07

4.0

4.1

2.51E-07

4.4

4.251

3.98E-07

4.6

4.398

6.31E-07

4.8

4.631

1.00E-06

5.0

5.1

2.51E-06

5.4

5.251

3.98E-06

5.6

5.398

6.31E-06

5.8

5.631

1.00E-05

6.0

6.1

2.51E-05

6.4

6.251

3.98E-05

6.6

6.398

6.31E-05

6.8

6.631

1.00E-04

7.0

7.1

2.51E-04

7.4

7.251

3.98E-04

7.6

7.398

6.31E-04

7.8

7.631

1.00E-03

8.0

8.1

2.51E-03

8.4

8.251

3.98E-03

8.6

8.398

6.31E-03

8.8

8.631

1.00E-02

9.0

9.1

OL’D

>9.2

>9.160

email: [email protected]

tel: +1 215 947 2500

web: frederickscompany.com

mc300_im rev H

16 of 23

Содержание MC300

Страница 1: ...00 Vacuum Sensor Controller Instruction Manual The Fredericks Company Televac 2400 Philmont Avenue Huntingdon Valley PA 19006 web www frederickscompany com email sales frederickscompany com tel 1 215 947 2500 fax 1 215 947 7464 ...

Страница 2: ...nning Magnetron Cold Cathode 13 2 5 4 7E 7F 7FC Double Inverted Magnetron Cold Cathode 15 2 5 5 Mini Bayard Alpert Sensor 17 2 6 Calibration 19 2 6 1 READ THIS BEFORE CALIBRATING 19 2 6 2 2A Thermocouple Sensor 19 2 6 3 4A Thermocouple Convection Sensor 19 2 6 4 7B Penning Magnetron Cold Cathode 19 2 6 5 7E 7F 7FC Double Inverted Magnetron Cold Cathode 19 2 6 6 Mini Bayard Alpert Sensor 19 3 Confi...

Страница 3: ... Alpart Analog Output 18 8 MC300 Configuration Part Numbers 20 9 MC300 Startup Software Code 20 10 MC300 Cable Part Numbers 22 11 Selected Sensor Part Numbers 22 List of Figures 1 MC300 Dimensional Drawing 4 2 Relay Wiring Diagram in the OFF State 8 3 2A Analog Output 9 4 4A Analog Output 11 5 7B Analog Output 13 6 7E 7F 7FC Analog Output 15 7 Mini Bayard Alpert Analog Output 17 email sales freder...

Страница 4: ...d is an industry leader in vacuum measurement technology Our team of engineers and application specialists deliver broad practical knowledge and experience across a wide range of markets and application areas In keeping with the company s history of outstanding customer support Televac provides the insight and guidance needed to take design concepts to reality in a cost effective manner For more i...

Страница 5: ...l This product has been designed and tested to offer reasonably safe service provided in it is installed operated and serviced in strict accordance with these safety instructions These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety...

Страница 6: ... correct power source may cause damage to the unit See Section 5 for more information Hazardous high voltages 2 kV to 4 kV are present when any cold cathode modules are installed This includes the 7B E F FC FCS modules Strong magnetic fields are present near cold cathode sensors Take proper precautions to avoid hazardous overpressure conditions Televac and Fredericks Company are not liable for any...

Страница 7: ...P twice The Pa mbar and Torr light on the front panel will flash 2 Press UP and DOWN to select the desired units 3 Press TEST OP to save the selected unit If TEST OP is not pressed within 60 seconds the instrument will return to normal operation and the change in units will not be saved 2 1 8 Set points To configure the set points complete the following steps For more information see Section 2 4 1...

Страница 8: ... 13 2 3 2 Supply Voltage The MC300 can be configured to operate with either a 110 VAC 10 or 220 VAC 10 supply The configuration can only be set at the factory The default setting is 110 VAC compatibility and 220 VAC operation must be specified upon order Changing the configuration requires the user to return the unit to Fredericks Company 2 3 3 Electrostatic Discharge Sensitivity The MC300 contain...

Страница 9: ...ETUP again and the display will read ON 4 Use the UP and DOWN arrows to set the ON value 5 Press SETUP again and the display will read OFF 6 Use the UP and DOWN arrows to set the OFF value 7 Press SETUP again to move to the next set point 8 Repeat the previous steps to set up all four of the set points 2 4 2 Normally Closed In this state there is an electrical continuity path between terminals C a...

Страница 10: ...channel These set up parameters are stored in non volatile memory and are not lost during power outages 2 5 1 2A Thermocouple Sensor The 2A Thermocouple sensor has two analog output formats The Traditional Output option mimics the output of the raw signal from the 2A sensor The voltage can be converted to a pressure by using a linear interpolation table The Linear Output option provides a linear s...

Страница 11: ...2 8 03 0 2 0 03 7 23 0 3 0 04 6 63 0 4 0 05 6 13 0 5 0 06 5 69 0 6 0 07 5 31 0 7 0 08 4 95 0 8 0 09 4 63 0 9 0 1 4 37 1 0 15 3 37 1 5 0 2 2 89 2 0 3 2 23 3 0 4 1 88 4 0 5 1 67 5 0 6 1 58 6 0 7 1 5 7 0 8 1 42 8 0 9 1 34 9 1 1 26 10 2 1 02 10 2 5 0 92 10 2 10 0 9 10 2 20 0 88 10 2 CABLE 0 10 2 email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mc300_im rev H 10 of 23 ...

Страница 12: ... Linear Output option provides a linear signal from 001 Torr to 1 Torr The voltage can be converted to a pressure via an equation The Linear Output is included in standard units Press re Torr V Vo ts 1 2 The Linear by Decade Output option provides a signal that is linear within each decade power of ten and uses the first digit to convey the decade of pressure The signal can be converted to a press...

Страница 13: ...67 6 2 2 0 3 2 285 6 3 3 0 4 2 63 6 4 4 0 5 2 992 6 5 5 0 8 3 824 6 8 8 1 4 226 7 1 10 2 5 44 7 2 13 5 3 6 08 7 3 13 5 4 6 44 7 4 13 5 5 6 772 7 5 13 5 10 7 412 8 1 13 5 20 7 782 8 2 13 5 30 7 91 8 3 13 5 40 7 936 8 4 13 5 50 7 976 8 5 13 5 60 8 006 8 6 13 5 80 8 042 8 8 13 5 100 8 072 9 1 13 5 150 8 18 9 15 13 5 200 8 328 9 2 13 5 300 8 756 9 3 13 5 400 9 208 9 4 13 5 500 9 544 9 5 13 5 600 9 772...

Страница 14: ...ia an equation Press re Torr V Vo ts 10 4 4 The Linear by Decade Output option provides a signal that is linear within each decade power of ten and uses the first digit to convey the decade of pressure The signal can be converted to a pressure by using a function to parse the voltage measurement For V 2 NT DDD Press re Torr 0 DDD 10 NT 7 5 Figure 5 7B Analog Output email sales frederickscompany co...

Страница 15: ...7 00E 05 7 4 0 7 6 00E 05 7 2 0 6 5 00E 05 7 0 5 4 00E 05 6 8 0 4 3 00E 05 6 6 0 3 2 00E 05 6 4 0 2 1 00E 05 6 2 0 1 9 00E 06 5 8 0 09 8 00E 06 5 6 0 08 7 00E 06 5 4 0 07 6 00E 06 5 2 0 06 5 00E 06 5 0 05 4 00E 06 4 8 0 04 3 00E 06 4 6 0 03 2 00E 06 4 4 0 02 1 00E 06 4 2 0 01 9 00E 07 3 8 0 8 00E 07 3 6 0 7 00E 07 3 4 0 6 00E 07 3 2 0 5 00E 07 3 0 4 00E 07 2 8 0 3 00E 07 2 6 0 2 00E 07 2 4 0 1 00E...

Страница 16: ...thin each decade power of ten and uses the first digit to convey the decade of pressure The signal can be converted to a pressure by using a function to parse the voltage measurement For V NT DDD Press re Torr 0 DDD 10 NT 10 7 Note that the range of the 7E sensor is limited by the outgassing of the rubber o ring and does not possess the same range as the 7F and 7FC sensors For more information ple...

Страница 17: ... 98E 08 3 6 3 398 6 31E 08 3 8 3 631 1 00E 07 4 0 4 1 2 51E 07 4 4 4 251 3 98E 07 4 6 4 398 6 31E 07 4 8 4 631 1 00E 06 5 0 5 1 2 51E 06 5 4 5 251 3 98E 06 5 6 5 398 6 31E 06 5 8 5 631 1 00E 05 6 0 6 1 2 51E 05 6 4 6 251 3 98E 05 6 6 6 398 6 31E 05 6 8 6 631 1 00E 04 7 0 7 1 2 51E 04 7 4 7 251 3 98E 04 7 6 7 398 6 31E 04 7 8 7 631 1 00E 03 8 0 8 1 2 51E 03 8 4 8 251 3 98E 03 8 6 8 398 6 31E 03 8 8...

Страница 18: ...orr to 1 10 2 Torr The voltage can be converted to a pressure via an equation Press re Torr 10V 11 8 The second analog output format is the Millivolt Logarithmic Output The voltage can be converted to a pressure via an equation Press re Torr 10mV 11 9 Figure 7 Mini Bayard Alpert Analog Output email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mc300_im rev H 17 of 23 ...

Страница 19: ... 7 1 00E 08 2 2 00E 08 1 3 5 00E 08 1 7 1 00E 07 3 2 00E 07 3 3 5 00E 07 3 7 1 00E 06 4 2 00E 06 4 3 5 00E 06 4 7 1 00E 05 5 2 00E 05 5 3 5 00E 05 5 7 1 00E 04 6 2 00E 04 6 3 5 00E 04 6 7 1 00E 03 7 2 00E 03 7 3 5 00E 03 7 7 1 00E 02 8 1 40E 02 8 15 OVER CURRENT 8 15 email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mc300_im rev H 18 of 23 ...

Страница 20: ...sensor For maximum accuracy the 4A zero adjustment should be made at 10 3 Torr as read by a NIST calibrated reference gauge The 4A atmosphere adjustment should be made at 760 Torr as read by a NIST calibrated reference gauge Note that the zero adjustment should be made before the atmosphere adjustment 2 6 4 7B Penning Magnetron Cold Cathode The MC300 includes a 10 3 adjustment point via a potentio...

Страница 21: ...he code that is displayed upon start up against Table 9 Note that Y Y refers to the revision number of the software Table 9 MC300 Startup Software Code Code Instrument Type Y Y 2H 2A and Mini BA Sensor Y Y 4H 4A and Mini BA Sensor Y Y 2b 2A and 7B Sensor Y Y 2F 2A and 7E 7F 7FC Sensor Y Y 4b 4A and 7B Sensor Y Y 4F 4A and 7E 7F 7FC Sensor 3 1 Sensor Descriptions 3 1 1 2A Thermocouple Sensor The 2A...

Страница 22: ...sistant to inrushes of gas The design of this sensor allows for an extended range of measurement and high bakeout temperatures up to 400 C with the magnets removed The 7F is electrically identical to the 7E and 7FC sensors but the 7F is not able to be disassembled for cleaning It is the sensor of choice for UHV systems that require a high temperature bakeout 3 1 6 7FC Cleanable Double Inverted Mag...

Страница 23: ...tion of the high vacuum sensors based on the low vacuum sensor in Channel 1 Channel 2 is also a low vacuum sensor The high vacuum sensor is labeled ION GAUGE on the MC300 display and is referred to as Channel 3 4 1 Cold Cathodes Configurations For MC300 configurations that contain a cold cathode either 7B or 7E 7F 7FC the cold cathode sensor will occupy Channel 3 When the low vacuum sensor pressur...

Страница 24: ... Changing the sensitivity will affect the reading of the mini BA sensor Mini BA sensors from Fredericks Company have a sensitivity of 10 Torr 4 2 3 Filament Select The third SETUP position on Mini Bayard Alpert configurations allows the user to select between the two filaments of the mini BA sensor The user can only select between the two filaments when the mini BA sensor is not currently powered ...

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