SUSS CIC1200, Руководство пользователя

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OPERATING PROCEDURES
OP CIC1200 E Rev4.0 06-09 Chapter 4
21
4
4.7. Calibration Modes of the
Power Supply
4.7.1. Basics
The calibration of the power supply is done in CP
mode. Commence calibration only after the lamp
has become operational.
Press key CALIB for 1-2 sec.
There are two ways to calibrate the Power Supply:
• Use the built in intensity meter of the CIC.
CAL-UVP I
CAL-UVP II
• Use an external intensity meter e.g. the SUSS
UV1000 Intensity Meter:
•
•
CAL-EXT 1 for Channel 1
• CAL-EXT 2 for Channel 2
4.7.2. Calibration Procedure with
the Built-in UV-Meter
Note:
Always calibrate the control unit in CP mode
(constant power mode)
Make sure the shutter of the lamp house is open.
The key CP of the control panel is illuminated. Plug
in the UV probe (e.g. 405 nm probe) to the 6 pin
socket of the front control panel labeled UV-PROBE.
Press key CALIB for 1-2 sec. Press CALIB again to
enter the UVP2 mode. Actuate key START.
Position your probe on the exposure chuck for the
first measurement. The alphanumeric display la-
beled LIGHT INTENSITY shows the corresponding
value, the UV-probe is sensing (e.g. 13.0 mW/cm2).
Each measurement is labeled with a digit from 1 to
17. The alphanumeric display labeled LAMP POW-
ER shows the current reading in progress.
the measured value for the light intensity is stored to
the control unit. One can perform up to seventeen
different measurements while scanning the expo-
sure plane of the chuck with the UV-probe. All read-
ings are stored consecutively to the CIC by actuating
the key +.
one deletes the last reading stored.
Upon completion of this series of measurements ac-
The alphanumeric
display shows:
CAL-UVP1
In the annunciator group DISPLAY
the modes:
CHANNEL 1 [m/cm2]
CALIB %
are active and the corresponding
LEDs are ON:
Press key CALIB
The alphanumeric
display shows:
CAL-UVP2
In the annunciator group DISPLAY
the modes:
CHANNEL 2 [m/cm2]
CALIB %
are active and the corresponding
LEDs are ON:
Press key CALIB
The alphanumeric
display shows:
CAL-EXT1
In the annunciator group DISPLAY
the modes:
CHANNEL 1 [m/cm2]
CALIB %
are active and the corresponding
LEDs are ON:
Press key CALIB
The alphanumeric
display shows:
CAL-EXT2
In the annunciator group DISPLAY
the modes:
CHANNEL 1 [m/cm2]
CALIB %
are active and the corresponding
LEDs are ON:
Press key CALIB (for service pur-
poses only. see Chapter 4.7.4
+
By actuating the key:
By actuating the key:
-