SUSS CIC1200, Руководство пользователя

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PROGRAM PARAMETERS
OP CIC1200 E Rev4.0 06-09 Chapter 3
9
3
3. P
ROGRAM
P
ARAMETERS
for the CIC1200 for the various types of
exposure lamps.
(valid for software revisions > 2.10)
Legend:
P
min
[W] Minimum lamp power to run the
exposure lamp
P
nom
[W] Rated power of the exposure lamp
P
max
[W] Maximum power to run the
exposure lamp
P
idle
[W] Idle power to run the exposure lamp
while machine in idle mode, no
exposures. (valid only for software
versions < 2.00)
Lamp Life [h] Recommended life time of the
exposure lamp. If this value is
reached the LED adjacent to LAMP
LIFW in the annunciator group
FAILURE flashes.
(see also: 4.4.1. Reset Lamp Hours)
T
delay
[s] Time necessary for the lamp to cool
after power has been switched off.
During this period of time the lamp
cannot be started.
Left alphanumeric display shows
message COOL.
Right alphanumeric display shows
time left before exposure lamp can
be restarted.
Note:
During the cool down period
no function of the CIC is accessible.
N
2 time
[s] If the N2-pressure for cooling the
lamp socket falls below the preset
lower limit or the exhaust flow is too
low, the lamp will be switched off
after this time - caused by an inter-
lock signal from the machine to CIC.
The corresponding alarm message
starts immediately and continues
also after lamp has switched off.
Lamp Type [W]
P
min
[W] P
nom
[W] P
max
[W] P
Idle
[W]
Lamp Life [h]
T
delay
[s] N
2 time
[s]
200 Hg 150 200 250 195 1000 300 300
350 Hg 250 350 430 325 600 600 300
500 HgXe 350 500 750 475 600 600 180
500 Hg 400 500 600 475 600 600 180
1000 Hg 800 1000 1200 950 1000 900 180