SUSS CIC1200, Руководство пользователя

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WARNINGS AND SAFETY HAZARDS
OP CIC1200 E Rev4.0 06-09 Chapter 1
3
1
1.5. Emergency Off and Safe-
ty Interlocks
SUSS lamp houses and machinery (e.g. mask align-
ers) are equipped with safety related interlocks ac-
cording to there inherent risks.
Such interlocks may consist of door locks, door
switch, flow monitoring device and EMO functions.
These interlocks can switch off the CIC and / or con-
trol the CIC status using signal or power line connec-
tions to the CIC. The EMO of the host machine shall
switch of the power line to the CIC via contactor or
safety relay.
A sample of a safety circuit is shown below. For fur-
ther details refer to the manuals of the host machine
or contact SUSS service.
Lamp House Door Interlock
Sample from SUSS MA/BA8:
Opening the lamp house door will immediately open
the door switch, effectively turning off the CIC power
supply the same way as by activation of the EMO
button. The EMO-relay K6.3 will switch off the CIC
main power. Warning!
Never defeat safety interlocks or EMO
between
the CIC and the lamp house or ma-
chine!
L1
power supply
24VDC 10Amp
for detail information
see schematic diagram
sheet 6
L1
+ -
-T2.1
10A
-F2.1
2AT
-F5.1
CIC
A1
S11 S12 S34 S33
EMO Relay
-K6.3
21
22
+11
-S6.1
13
14
Interlock connector CIC
N
PE
CIC 1200
23
24
-K6.3
33
34
1
2
3
4
5
6
-K5.1
1
2
3
4
5
6
-K5.2