
Doc. No. ZQ-OM01301-A
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Contents
Safety Instructions
1. How to Order
2. Summary of Product Parts
3. Mounting and Installation
3.1. Installation
3.2. Operating Environment
3.3. Air Supply
3.4. Piping
3.5. Wiring
4. Solenoid Valve
5. Vacuum Pressure Switch
6. Vacuum release flow adjusting needle
7. Structural Drawing and Replacement of Parts
8. Maintenance
9. Specifications
10. Pneumatic Circuit
11. Exhaust Characteristics, Flow Characteristics,
Vacuum Pump Flow Characteristics, and Vacuum Release Flow Rate Characteristics
12. Handling Precautions
13. Trouble shooting