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19-5225S-M-01 Rev 2
32
In order to ensure optimal ionization performance and therefore
static charge neutralization, ion delivery must be periodically
regulated, or balanced. This procedure is commonly referred to as
balance adjustment or system calibration.
Simco-Ion recommends performing a balance adjustment as part of
a regular maintenance program. In general, AeroBars should be
balanced every six months to a year. The actual frequency of
balance adjustment depends on the specific activity of your
application and environment.
In Pulsed DC mode, positive and negative ions are released
sequentially during ontimes. During offtimes, no ions are released
and existing ions disperse. In Steady-state DC mode, both positive
and negative ions are constantly produced. The goal of the
adjustment procedure is to regulate the ion delivery, so that equal
numbers of positive and negative ions arrive at the work surface to
neutralize static charges of either polarity in a specified amount of
time.
Adjustment of the AeroBar Ionziation System components may be
performed during periodic checks of the entire system.
Tool Parameters that Affect Ionization
Balancing involves adjusting positive and negative ionization output
levels and timing sequence of these outputs. You can make
adjustments to the AeroBar Model 5225S settings using the
Remote Control. In addition to the ionizer settings, be aware of the
following variables that can affect balance:
•
Airflow:
The recommended airflow for effective ionization is 70-
90 fpm. Low airflow moves the ions more slowly, allowing
potential ion recombination and reducing the ions available to
neutralize surfaces. High airflow moves the ions in a more direct
path, reducing the surface coverage area.
•
Configuration:
Configuration changes differing from the original
spec (such as adding a pre-aligner or metrology tool) may
change the way the ions disperse. Also, metal objects closer
than 6 inches to the AeroBar will ground ions, reducing the
amount of ions available to the surfaces.
Содержание AeroBar 5225S
Страница 1: ...I O N I Z A T I O N S O L U T I O N S Digital AeroBar Ionization System Model 5225S User s Manual...
Страница 5: ...19 5225S M 01 Rev 2 1 1 Description 1 1 Overview 1 2 Remote Control 1 3 Power Requirements...
Страница 12: ...19 5225S M 01 Rev 2 8...
Страница 13: ...19 5225S M 01 Rev 2 9 2 Installation 2 1 Mounting 2 2 Wiring 2 3 FMS Connection 2 4 Daisy chaining...
Страница 42: ...19 5225S M 01 Rev 2 38...
Страница 51: ...19 5225S M 01 Rev 2 47...
Страница 52: ...19 5225S M 01 Rev 2 48 5 Specifications 5 1 AeroBar Model 5225S 5 2 Parts Accessories 5 3 Dimensional Drawings...
Страница 57: ...19 5225S M 01 Rev 2 53 5 3 Dimensional Drawings Standard Lengths...
Страница 58: ...19 5225S M 01 Rev 2 54 300 mm EFEM Application Lengths...
Страница 59: ...19 5225S M 01 Rev 2 55...
Страница 61: ...19 5225S M 01 Rev 2 57...
Страница 62: ...19 5225S M 01 Rev 2 58 Notes...