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Simco-Ion AeroBar 5225S, Руководство пользователя

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19-5225S-M-01 Rev 2

11

2.1 Mounting

General Guidelines

Installation methods will vary, as all process equipment has 
different requirements. Use the following general guidelines:

• Install AeroBars away from all moving components in the tool or 

environment.

• Place AeroBars directly in the airflow from HEPA filters for 

effective ionization discharge.

• Make sure that there are no obstructions in the airflow between 

the AeroBar and the surfaces to be neutralized.

• Ensure there is unobstructed airflow over emitter points.
• Keep emitter points at least 4 inches (100 mm) from grounded 

surfaces, including tool frames, skins, and other modules. 

• Keep the AeroBars within a 12-36” (300-900 mm) working 

distance from the wafers.

Keep in mind the following considerations when determining 
locations for the units:

• Tool and mini-environment requirements/restrictions
• Line of sight to infrared LED on the bar
• Applicable SEMI standards
• Applicable National Electrical Code standards
• The least amount of distance for cables from the Interface 

Module to AeroBars

Clips

Various mounting clips are available from Simco-Ion. 

In general:

• Hold the bar to the grid or other structure and mark the locations 

where the mounting clips will attach. 

• Attach the clips to the AeroBar and mount them at the marked 

locations. Check to make sure all clips are secure, and that the 
AeroBar is held firmly in position.

Содержание AeroBar 5225S

Страница 1: ...I O N I Z A T I O N S O L U T I O N S Digital AeroBar Ionization System Model 5225S User s Manual...

Страница 2: ...imco Ion improves its customers business results by providing a total solution to their electrostatic discharge and electromagnetic interference challenges Simco Ion is a division of Illinois Tool Wor...

Страница 3: ...removing the cables as this can result in damage to the ionizer Do not clean emitter points while unit is powered Doing so may result in additional contamination and possible shock To avoid personal...

Страница 4: ...e Remote Control 21 3 3 Ionization Mode OpMode 25 3 4 Output Voltages 27 3 5 On and Off times Pulsed DC Mode Only 28 3 6 FMS Alarm Values 29 3 7 Balance Adjustment and System Calibration 31 4 Maintena...

Страница 5: ...19 5225S M 01 Rev 2 1 1 Description 1 1 Overview 1 2 Remote Control 1 3 Power Requirements...

Страница 6: ...S operates as a standalone system with internally maintained settings Setup and adjustment are performed with the infrared Handheld Remote The AeroBar Model 5225S is available in five standard lengths...

Страница 7: ...length of the bar 3 Positive and Negative Ion Output Indicators LEDs indicate high voltage HV ionization In Pulsed DC mode lights flash depending on which polarity has HV Lights are continuously on w...

Страница 8: ...ady state DC mode Both of the positive and negative ion indicators and the alarm LED flash once simultaneously during communication Transmit and Receive LEDs These LEDs indicate communication with the...

Страница 9: ...im directly at the receive LED of the AeroBar When the AeroBar receives transmission from the remote control it will flash all three LEDs for one second Each successive transmission is indicated with...

Страница 10: ...e current adjustment level or operation mode for that item An on off slide switch is featured on the right side of the remote control Upon powerup the 5570 remote control shows the following UsrMenu V...

Страница 11: ...source using one of the following options Hard wire to a DIN rail mount transformer p n 14 21730 Connect to DIN rail mount transformer through a junction box using an RJ 11 to RJ 11 interconnect cable...

Страница 12: ...19 5225S M 01 Rev 2 8...

Страница 13: ...19 5225S M 01 Rev 2 9 2 Installation 2 1 Mounting 2 2 Wiring 2 3 FMS Connection 2 4 Daisy chaining...

Страница 14: ...ng safety information After removing power from the AeroBar s allow a minute for the high voltage power supplies to discharge Use proper input voltage to avoid damaging the unit Failure to follow thes...

Страница 15: ...ncluding tool frames skins and other modules Keep the AeroBars within a 12 36 300 900 mm working distance from the wafers Keep in mind the following considerations when determining locations for the u...

Страница 16: ...lips for bars over 44 in length May be used with end clip 28 6235 Grid clip for perforated panels p n 28 6257 Use for bars 44 or shorter Requires two pine tree fasteners 28 0505 Eggcrate mid clips p n...

Страница 17: ...Rail Mount transformer p n 14 21730 100 115 230 VAC switchable desktop transformer p n 14 1535 Connection to Power The AeroBar can be directly wired to a 24 VAC source using wire terminations Figure 3...

Страница 18: ...n in the figure below Connect the 24 VAC and 24 VAC return wires and cut the unused 3 wire The Alarm line will be wired to an FMS connection if used Figure 4 Wiring Interconnect Cable or J box Directl...

Страница 19: ...19 5225S M 01 Rev 2 15 Figure 5 J box Wiring Contact Simco Ion for specific information on wiring the j box techsupport ion com or 510 217 0470...

Страница 20: ...ect wire or through a junction box alarm wire Connection to the Desktop Transformer Wiring to the 100 115 230 VAC switchable desktop transformer Simco Ion p n 14 1535 requires an interconnect cable wi...

Страница 21: ...is a non isolated open collector that will pull the alarm pin to ground upon an alarm condition See Figure 4 for the wire information If connecting to the DIN Rail mount transformer the FMS signal mus...

Страница 22: ...it is more convenient to wire the AeroBars in a drop tee configuration junction boxes may installed at the tee sites and wired together using 18 22 AWG cable The RJ 11 connectors from the AeroBar cabl...

Страница 23: ...Operation 3 1 About AeroBar Adjustments 3 2 Using the Remote Control 3 3 Ionization Mode OpMode 3 4 Output Voltages 3 5 On and Off times Pulsed DC Mode Only 3 6 FMS Alarm Values 3 7 Balance Adjustmen...

Страница 24: ...r each zone of operation Set positive and negative output voltages Set positive and negative ontimes and offtimes pulsed DC mode only Set FMS alarm values Place Ionizers in Standby Mode Operating Envi...

Страница 25: ...ight side of the remote control Upon powerup the remote control shows the following UsrMenu Ver 2 6 Passwords Most menu items of the Remote Control require a password in order to be changed The positi...

Страница 26: ...s no button activity for 15 seconds Press the Esc key to awaken the remote control While in sleep mode the LCD displays Use ESC To Awake If the battery is low during sleep mode the bottom line is repl...

Страница 27: ...then Esc Down Up Select Select Select Select None Viewable paramters Status Status PosFdbk PosOut NegFdbk NegOut Address OpMode PosOn PosOff PosOut Pos Alarm NegOn NegOff NegOut NegAlarm Eprom This i...

Страница 28: ...if the AeroBar is in standby AeroBar is powered but ionization is turned off StdySDC if the AeroBar is continuously generating both positive and negative ionization Pulse if the AeroBar is alternately...

Страница 29: ...hes 30 cm of the AeroBar Steady state mode may be necessary for most semiconductor tool applications with tight performance specifications or when low swing voltages are required for sensitive devices...

Страница 30: ...n Up Select Select Select Select 3 Use the Up or Down button to reach the OpMode item Press Select 4 Point the remote control directly at the LEDs on the AeroBar and use the Up or Down button to selec...

Страница 31: ...environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Use the Up or Down button to reach the PosOut or NegOut item Press Select 2 Use the Up o...

Страница 32: ...setting Adjusting On and Off times It is important to set positive and negative on or offtimes in coordination with environmental readings you get during a balance adjustment See the Balance Adjustmen...

Страница 33: ...ting Alarm Values It is important to set alarm values in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Access the us...

Страница 34: ...pressing the down button until you reach the PosAlrm or NegAlrm menu item Press Select 4 Use the Up button to change the alarm level so that it is above the corresponding Pos or Neg FeedBack level Cha...

Страница 35: ...ng Ionization Modes Voltage Swing and Output and Decay Timing Troubleshooting Goals of Balance Adjustment and System Calibration Balanced high ion density arriving to the surfaces and wafers Similar p...

Страница 36: ...rface to neutralize static charges of either polarity in a specified amount of time Adjustment of the AeroBar Ionziation System components may be performed during periodic checks of the entire system...

Страница 37: ...dustry s typical setting 50 to 100V for semiconductor tools and mini environments and 100 to 150V for other fabrication in open areas A desired balance and decay time will depend on the sen sitivity o...

Страница 38: ...he measurements on the CPM The measurements taken on the CPM will record the following specifics Positive and negative peak voltages Balance an average of the positive and negative voltage peaks Posit...

Страница 39: ...o the range of the CPM plate voltage between the positive and negative peak readings at sample locations The recommended typical voltage output range is 50 80 For Pulsed DC mode adjust the positive an...

Страница 40: ...Mode For Steady state DC Mode If voltage swings are 100V adjust and ontimes upward in 0 1 second increments until decay time stops improving or voltage swings become too high Maintain last beneficial...

Страница 41: ...se and ontimes in 0 1 second increments maintainingbalance untildecay time improves or voltage swings become too high Maintain last beneficial setting 3 Increase and offtimes in 0 1 second increments...

Страница 42: ...19 5225S M 01 Rev 2 38...

Страница 43: ...ar Maintenance 4 3 Remote Control Maintenance 4 4 System Adjustment Calibration Caution To avoid personal injury or damage to the equipment do not perform any maintenance other than that contained in...

Страница 44: ...pt will appear 2 Enter in the following password Esc Down Up Select Select Select Select 3 Use the Up or Down button to reach the OpMode item Press Select 4 Point the remote control directly at the LE...

Страница 45: ...is recommended every three to six months and replacement every 24 to 36 months or when damage or erosion is evident Calibration may be performed quarterly semiannually or annually depending on your a...

Страница 46: ...ronment Inspect emitter points for white fuzz or buildup on the tips or tips that are blackened or broken Clean any buildup following the procedures described below Emitter Point Cleaning Recommended...

Страница 47: ...er point replacement is recommended every 24 to 36 months or when damage or erosion is evident To remove emitter points Use a soft jawed tool to remove silicon points Silicon points are brittle and ma...

Страница 48: ...press the new emitter point into the socket until it is fully seated Do not push on the tip of the emitter point Chassis Cleaning Use a cleanroom compatible cloth moistened with 50 IPA and 50 de ioniz...

Страница 49: ...te Control If the battery voltage drops to 2V LowBatt will be indicated on the second line of the LCD display Turn the remote control off with the slide switch to conserve battery life Sleep Mode The...

Страница 50: ...4 System Adjustment Calibration Adjustment and calibration should be performed as a regular part of installation and maintenance activity Refer to Chapter 3 Operation for instructions on adjusting an...

Страница 51: ...19 5225S M 01 Rev 2 47...

Страница 52: ...19 5225S M 01 Rev 2 48 5 Specifications 5 1 AeroBar Model 5225S 5 2 Parts Accessories 5 3 Dimensional Drawings...

Страница 53: ...pulsed DC steady state DC or standby Alarm Alarm activates when the bar is no longer able to maintain preset ion output levels Alarm is displayed visually via red LED in middle of the chassis Settable...

Страница 54: ...5 lb 1 0 kg 22 bar approx 6 oz oer additional foot 0 17 kg per additional 30 cm Warranty 2 year limited warranty Certifications SEMI F47 RoHS Compliant Handheld Remote Model 5570 Dimensions 4 75H x 2...

Страница 55: ...dheld Remote 33 1700 X Interconnect cable RJ 11 connectors 26 AWG 4 conductor where X is the length 0 5 2 6 10 15 20 30 40 feet 14 21730 DIN rail mount transformer 230 VAC to 24 VAC 14 1535 100 115 23...

Страница 56: ...2 22 0365 1 Ultraclean Sleeved Silicon Emitter Points box of 1 22 0365 10 Ultraclean Sleeved Silicon Emitter Points box of 10 22 0365 15 Ultraclean Sleeved Silicon Emitter Points box of 15 22 0365 20...

Страница 57: ...19 5225S M 01 Rev 2 53 5 3 Dimensional Drawings Standard Lengths...

Страница 58: ...19 5225S M 01 Rev 2 54 300 mm EFEM Application Lengths...

Страница 59: ...19 5225S M 01 Rev 2 55...

Страница 60: ...icing evaluating repairing or replacing any unit returned to Simco Ion that has not been subjected to misuse neglect lack of routine maintenance repair alteration or accident In no event is Simco Ion...

Страница 61: ...19 5225S M 01 Rev 2 57...

Страница 62: ...19 5225S M 01 Rev 2 58 Notes...

Страница 63: ...Rd Ste 100 Alameda CA USA 94502 Tel 510 217 0600 Fax 510 217 0484 Toll free 800 367 2452 Sales services 510 217 0460 Tech support 510 217 0470 ioninfo simco ion com salesservices simco ion com techsup...

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