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SC40401-K10-15002A
2nd
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5-2)
In case that ORG sensor is beyond NEAR ORG sensor toward CW(CCW) direction.
Caution1) In case that after detect CW (CCW) sensor, stage move toward CCW direction and then can not
detect NEAR ORG sensor (in case of no NEAR ORG sensor), stage stop at CCW (CW) sensor
position.
Caution 2) In case that after detect NEAR ORG sensor, stage move toward CW direction and then can not
detect ORG sensor (in case of no ORG sensor), stage stop at CW (CCW) sensor position.
6, ORG5
(for 3 sensor use (LS+ORG(Z phase)))
NEAR ORG sensor
ORG sensor
ORG reset speed F
Detect CW limit sensor
Detect NEAR ORG sensor
ORG reset speed S
CW (CCW) sensor
ORG reset speed M
Detect ORG sensor
ORG sensor (Z phase)
ORG reset speed F
Detect CW limit sensor
Move to offset position
Detect ORG sensor
(Z phase)
CW (CCW) sensor
ORG reset speed M
ORG reset speed S