Series 810 Instruction Manual
Chapter 1 Introduction
Chapter 1 Introduction
Sierra's Mass-Trak
'
mass flow meters and controllers are designed
to accurately measure and control flows of process gases. This
instruction manual covers the installation, operation and maintenance
of the Mass-Trak product line, which includes the following Sierra
models:
Model 810M Mass-Trak Flow Meter
Model 810C Mass-Trak Flow Controller
Model 810S-L Mass-Trak Flow Controller for flows up to 15
SLPM
Model 810S-M Mass-Trak Flow Controller for flows from 15
to 100 SLPM
All of these models can be ordered with or without a digital
display.
Sierra Instruments' Series 810 Mass-Trak products can be
calibrated
to measure and control the mass flow rate of gases in
several ranges
from 0-10 standard cubic centimeters per minute
(SCCM) to 0-100
standard liters per minute (SLPM). Accuracy is
±1.5% of full scale
over a wide temperature and pressure range, and
time response is 5
seconds to within 2% of set point. Detailed
product specifications
may be found in Appendix B.
Mass -Trak Design (typical)
Figure 1-1. Mass-Trak Design (typical)
Mass-Trak is ideally suited to a wide range of gas flow applications
including general process control, laboratories, instrument OEM's,
gas panels, and flow calibration.
FLOW
ZERO
SET POINT
IM-81
1-1
