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Series 810 Instruction Manual

Appendix A

Actual Gas

Chemical

Symbol

K-factor

Relative

(Cal/g)

Density

(g/l) @

0°C

Elastomer*

O-

ring

Valve

Seat

Nylon

Compatible

Methyl Mercaptan

.52

.2459

2.146

Methyl Trichlorosilane

(CH

) SiCl

.25

.164

6.669

Molybdenum Hexafluoride

MoF

.21

.1373

9.366

Monoethylamine

.35

.387

2.011

Monomethylamine

.51

.4343

1.386

Neon

1.46

.245

.900

Nitric Oxide

.990

.2328

1.339

Nitrogen

1.000

.2485

1.25

Nitrogen Dioxide

.74

.1933

2.052

Nitrogen Trifluoride

.48

.1797

3.168

Nitrosyl Chloride

NOCl

.61

.1632

2.920

Nitrous Oxide

.71

.2088

1.964

Octafluorocyclobutane

.17

.185

8.397

(Freon-C318)

Oxygen

1.000

.2193

1.427

Oxygen Difluoride

.63

.1917

2.406

Ozone

.446

2.144

Pentaborane

.26

.38

2.816

Pentane

.21

.398

3.219

Perchloryl Fluoride

CLO

.39

.1514

4.571

Perfluoropropane

.174

.197

8.388

Phosgene

COCL

.44

.1394

4.418

Phosphine

.76

.2374

1.517

Phosphorous Oxychloride

POCL

.36

.1324

6.843

Phosphorous

.30

.1610

5.620

Pentafluoride

Phosphorous Trichloride

PCL

.30

.1250

6.127

Propane

.36

.3885

1.967

Propylene

.41

.3541

1.877

Silane

SiH

.60

.3189

1.433

Silicon Tetrachloride

SiCL

.28

.1270

7.580

Silicon Tetrafluoride

SiF

.35

.1691

4.643

Sulfur Dioxide

.69

.1488

2.858

Sulfur Hexafluoride

.26

.1592

6.516

Sulfuryl Fluoride

.39

.1543

4.562

Teos

.090

Tetrafluorahydrazine

.32

.182

4.64

Trichlorofluormethane

CCL

.33

.1357

6.129

(Freon-11)

Trichlorisilane

SiHCL

.33

.1380

6.043

1,1,2-Trichloro-1,2,2

CCL

FCCLF

.20

.161

8.360

Trifluorethane (Freon-113)

Trisobutyl Aluminum

)AL

.061

.508

8.848

Titanium Tetrachloride

TiCL

.27

.120

8.465

Trichloro Ethylene

HCL

.32

.163

5.95

Trimethylamine

(CH

)

.28

.3710

2.639

Tungsten Hexasfuoride

.25

.0810

13.28

Teflon

Uranium Hexafluoride

.20

.0888

15.70

Vinyl Bromide

CHBr

.46

.1241

4.772

Vinyl Chloride

CHCL

.48

.2054

2.788

Xenon

1.44

.0378

5.858

* If no O-ring material is specified then O-ring to be used is Viton. Nylon Flow Body instruments are only

available with Viton elastomers.

IM-81

A-7

Содержание Mass-Trak 810 Series

Страница 1: ...Sierra 810 Series Mass Trak Mass Flow Instruments Instruction Manual Part Number IM 81 Revision H 4 15 ...

Страница 2: ...rollers for oxygen gas You are responsible for determining if this mass flow meter or controller is appropriate for your oxygen application You are responsible for cleaning the mass flow meter or controller to the degree required for your oxygen flow application COPYRIGHT SIERRA INSTRUMENTS 2014 No part of this publication may be copied or distributed transmitted transcribed stored in a retrieval ...

Страница 3: ...1 4 inch Female NPT Fittings 2 3 Installing the Transducer Electrical 2 4 D connector PIN assignments 2 5 Chapter 3 Operation Mass Flow Meter Operation 3 1 Mass Flow Controller Operation 3 1 Setpoint Adjustment 3 2 Setpoint Configuration 3 3 Over Range Condition 3 4 Auto Shut Off Function 3 5 ManualValveOverride 3 5 ValvePurge 3 5 Chapter 4 Maintenance Flow Path Maintenance and Cleaning 4 1 Sensor...

Страница 4: ...1 Mass Trak Features Typical 1 1 1 2 Flow Paths through the Transducer 1 4 1 3 Flow Measuring Principle 1 4 1 4 Sensor Temperature Distribution 1 5 1 5 Linear Range of Transducer Output Signal 1 5 2 1 Minimum Restriction Diameters 2 4 2 2 Transducer D Connector Pin Assignments 2 5 3 1 Dip Switch Settings 3 3 4 1 Stainless Steel Low Flow Internals 4 2 4 2 Stainless Steel Medium Flow Internals 4 2 4...

Страница 5: ...LPM All of these models can be ordered with or without a digital display Sierra Instruments Series 810 Mass Trak products can be calibrated to measure and control the mass flow rate of gases in several ranges from 0 10 standard cubic centimeters per minute SCCM to 0 100 standard liters per minute SLPM Accuracy is 1 5 of full scale over a wide temperature and pressure range and time response is 5 s...

Страница 6: ...pters Chapter 1 includes the introduction and theory of operation Chapter 2 provides installation plumbing and wiring instructions Chapter 3 describes operation and features Chapter 4 covers routine maintenance Chapter 5 contains the troubleshooting guide and service recommendations There are also 5 Appendices Appendix A lists conversion formula and gas tables AppendixBincludestheproductspecificat...

Страница 7: ...scarded with the packing material Do not return any equipment to the factory without first contacting Sierra Customer Service Technical Assistance If you encounter a problem with your transducer review the configuration information for each step of the installation operation and set up procedures as explained in this manual Verify that your settings and adjustments are consistent with factory reco...

Страница 8: ...hrough the body m2 Figure 1 2 Figure 1 2 Flow Paths through the Transducer Two resistance temperature detector RTD coils around the sensor tube direct a constant amount of heat H into the gas stream In actual operation the gas mass flow carries heat from the upstream coil to the downstream coil The resulting temperature difference OT is detected by the RTD coils and gives the output signal Since t...

Страница 9: ... 5 Figure 1 5 Linear Range of the Transducer s Output Signal For mass flow controllers once the gas flows through the monitoring section it is then controlled by the built in servo control valve All models of the Mass Trak utilize Sierra s proprietary high efficiency Fast Trak Electromagnetic Valve The normally closed Fast Trak valve is similar to an on off solenoid valve except that the current t...

Страница 10: ...le with the gas to be measured 3 If the gas contains any particulate matter install an in line filter upstreamof the transducer Recommendedfilter size 15micronfor flows of 10 to 30 slpm 30 micron for flows above 30 slpm 4 Do not locate the transducer in areas subject to sudden temperature changes excessive moisture and frequent drafts or near equipment radiating significant amounts of heat Be sure...

Страница 11: ...mbing Follow the installation instructions that are applicable to your transducer s process connection Before use all plumbing should be checked carefully for leaks and the transducer should be purged with dry nitrogen Ensure that the tubing is free from burrs or sharp rims that may result from cutting CAUTION All instruments are leak tested prior to shipping To check your installation test the fi...

Страница 12: ...ittings 1 Position the transducer with the flow direction arrow pointing in the direction of flow 2 Install new washers that are compatible with the gas to be used 3 Tighten the nut finger tight and then 1 4 turn tighter with a wrench Do not over tighten 4 Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors Instead monitor pressure decay Exposing the transduce...

Страница 13: ...0 28 SLM 0 063 0 20 to 0 50 SLM 0 073 0 51 to 0 73 SLM 0 094 0 61 to 0 100 SLM 0 110 Table 2 1 Typical Minimum Restriction Diameters Under Standard Pressure Conditions of 30 PSIG Inlet and Ambient Outlet Installing the Transducer Mechanical Mounting Please refer to Appendix B for mechanical mounting instructions Installing the Transducer Electrical Connections Caution The transducer is not a loop ...

Страница 14: ...Series 810 Instruction Manual Chapter 2 Installation Figure 2 2 Transducer D Connector Pin Assignments IM 81 2 5 ...

Страница 15: ...nd display will drop to 0 VDC or 4 mA Allow at least an additional 15 minutes of additional warm up time before performing any other performance checks or adjustments 2 Perform an initial zero output check required for first time start ups only Make certain there is no gas flowing through the instrument If the input pressure listed on the instrument data label is atmospheric turn on the meter and ...

Страница 16: ...e zero potentiometer located on the front panel see Figure 1 1 in Chapter 1 Turning the potentiometer screw clockwise increases the zero 4 Open the gas supply Mass Trak will begin monitoring the gas mass flow rate 5 Adjust the controller set point to the desired flow rate The effective control range of the unit is 10 to 100 of the calibrated full scale flow range Below 2 the control valve will aut...

Страница 17: ...r 4 20 mA setpoint A factory installed option of 0 10 VDC input and output is also available Consult factory if you are interested in the configurations for this special option Move DIPswitch1tothe right ON toselectthe internalon boardsetpoint potentiometer Move this switch to the left OFF to select an external setpoint This is also the position required if you choose to use a local setpoint poten...

Страница 18: ... normal operation An over range condition will not harm the instrument Cold Sensor Lockout Circuit Mass Trak controllers incorporate a safety circuit that closes the valve whena fault condition is detected that could result in uncontrolled flow valvewide open The circuit operates by monitoring the temperature of thesensor elements and forcing the output high if the temperature falls below apreset ...

Страница 19: ...feature is available by connecting a manual on off switch to the transducer D connector across pins 3 and 12 see Appendix D Normal operation resumes when pin 12 is left floating Valve Purge Function of Mass Trak Controllers The purge function opens the controller valve completely for the purpose of purging the meter and for quickly flushing unwanted gas from the flow path When the valve is opened ...

Страница 20: ...ed Cyclepurge Thisisdone byalternatelyevacuatingand purgingthetransducer for 2 to 4 hours with clean dry nitrogen Purge the transducer with clean dry nitrogen for 8 to 24 hours Evacuate the transducer for 8 to 24 hours When toxic or corrosive gases are used purge unit thoroughly with inert dry gas before disconnecting from the gas line If a transducer used with a toxic or corrosive gas is returned...

Страница 21: ...gas used If toxic or corrosive gases are used purge unit thoroughly with inert dry gas before disconnecting it from the gas line If a transducer used with a toxic or corrosive gas is returned to the factory a Material Safety Data Sheet must be enclosed with the unit upon its return Cleaning the Mass Trak Caution Do not disassemble the instrument without contacting the Sierra Instruments customer s...

Страница 22: ...ducer Internals Sensor Maintenance The sensor tube is straight and has a relatively large 0 031 inch ID On the nylon flow body instruments there is no access to the sensor so any service must be performed by a qualified Service Center The stainless steel flow bodies however are provided with convenient access ports to make inspection and cleaning easy Sensor maintenance on these steel body instrum...

Страница 23: ...sensor the instrument should be returned to the factory for complete cleaning and re calibration 6 Blow dry all parts with dry nitrogen and re assemble 7 After the transducer is re installed in the system leak test the connection CAUTION Do not use liquid leak detectors to search for leaks inside or outside the instrument Instead monitor pressure decay Valve Maintenance All Mass Trak Flow Controll...

Страница 24: ...ion The following valve adjustment procedure can be followed to correct the above conditions You will need 1 16 hex wrench 5 16 nut driver or socket All controllers should be thoroughly leak tested following any valve adjustment CAUTION Do not use liquid leak detectors to search for leaks inside or outside the instrument Instead monitor pressure decay Procedure If the instrument is experiencing le...

Страница 25: ...or the valve voltage is 6 to 18 VDC over these two set points 3 If the valve voltage is outside of these specifications loosen the 5 16 lock nut and adjust the center adjustment screw Turning clockwise will increase the valve voltage while turning counterclockwise will decrease it Adjust slowly 1 8 turn at a time while monitoring valve performance When the desired voltage is obtained the symptoms ...

Страница 26: ...lyequippedcalibrationfacilities one at the USA headquarters and the other at the European headquarters All measuring and test equipment used in the calibration of Sierra transducers is traceable to NIST standards Sierra is ISO 9001 registered and conforms to the requirements of ANSI NCSL Z540 and ISO IEC Guide 25 If your instrument has been damaged or you simply want to have the transducer re cali...

Страница 27: ...ify that there is adequate inlet gas pressure to the transducer that there are no downstream restrictions and that any upstream valves are open to allow sufficient gas flow to reach the instrument The following information is provided to help locate the cause of a transducer failure It is not intended to be an all inclusive repair guide For most repairs the unit should be returned to the factory f...

Страница 28: ... Out of calibration Dirty or clogged sensor Change in composition of gas Gas leak PCB defective LFE dirty Inlet filter screen clogged Reference conditions incorrect Set correct gas pressure Correct or replace Increase set point or disable auto shut off circuit Re configure DIP switches Set correct gas pressure Clean or replace Consult factory Find and correct leaks Return to factory for replacemen...

Страница 29: ... easy steps to return your instrument for factory service 1 To obtain a Return Materials Authorization RMA number from the Sierra Instruments to http www sierrainstruments com rma new php to create a Sierra Account 2 Once you have created an account click on the Submit New RMA tab and fill in the RMA form and follow the instructions You will receive an email confirmation once you have submitted yo...

Страница 30: ...ying the tables the following fundamental relationship is used Q1 Q2 K1 K2 1 Where Q The volumetric flow rate of the gas referenced to standard conditions of 0 C and 760 mm Hg sccm or slm K The K factor defined in equation 6 1 Refers to the actual gas and 2 Refers to the reference gas The K factor is derivedfromthe firstlawof thermodynamics appliedtothe sensor tube as described in Chapter 1 H m NO...

Страница 31: ...rticular mass flow meter or controller We get this by combining equations 1 and 5 Q1 Q2 K1 K2 N1 P1Cp1 N2 P2CP2 6 Please note that the constant b cancels out Equation 6 is the fundamental relationshipusedinthe accompanyingtables For convenience the tables give relative K factors which are the ratios K1 K2 instead of the K factors themselves In the tables the relative K factor isKactual KN2 where t...

Страница 32: ...found as follows QN2O QH2 K N2O KH2 or Q N2O 0 71 1 01 100 70 3 sccm Note that the K factors relative to nitrogen must be used in each case Calculating Dual Gas Mixtures Equation 6 is used for gas mixtures but we must calculate N ñCp for the mixture The equivalent values of ñ Cp and N for a dual gas mixture are given as follows The equivalent gas density is ρ m 1 m T P 1 4 l T P 2 Where mT m 1 111...

Страница 33: ...uch as methane and wish to use the K factors to measure a gas such as air the inaccuracy of the measurement can range from 5 to 10 The use of K factors is at best only a rough approximation and should not be used in applications that require a better than 5 to 10 accuracy It should also be noted that certain gases in similar families would work exceptionally well with K factors however those insta...

Страница 34: ...1 964 Carbon Disulfide CS2 60 1428 3 397 Carbon Monoxide CO 1 00 2488 1 250 Carbon Tetrachloride CCL4 31 1655 6 860 KR NO Carbon Tetrafluoride CF4 42 1654 3 926 KR Freon 14 Carbonyl Fluoride COF2 54 1710 2 945 Carbonyl Sulfide COS 66 1651 2 680 Chlorine CL2 86 1144 3 163 KR NO Chlorine Trifluoride CLF3 40 1650 4 125 KR Chlorodifluoromethane CHCLF2 46 1544 3 858 KR Freon 22 Chloroform CHCL3 39 1309...

Страница 35: ...4 3 219 KR C2H6 50 4097 1 342 NO C2H6O 39 3395 2 055 KR C 4H6 32 3513 2 413 KR C2H5CL 39 244 2 879 KR C2H4 60 358 1 251 C 2H4O 52 268 1 965 KR F2 980 1873 1 695 KR CHF 3 50 176 3 127 KR NO CCL 3F 33 1357 6 129 KR NO CCL 2F2 35 1432 5 395 KR NO CCLF 3 38 153 4 660 KR NO CFrF 3 37 1113 6 644 KR NO C F4 42 1654 3 926 N O CHCL 2F 42 140 4 952 KR NO CHCLF 2 46 1544 3 858 KR NO CCI2FCCLF2 20 161 8 360 K...

Страница 36: ...horous Oxychloride POCL 3 36 1324 6 843 KR Phosphorous Ph 5 30 1610 5 620 KR Pentafluoride Phosphorous Trichloride PCL 5 30 1250 6 127 KR Propane C3H8 36 3885 1 967 Propylene C3H6 41 3541 1 877 Silane SiH 4 60 3189 1 433 KR Silicon Tetrachloride SiCL 4 28 1270 7 580 KR Silicon Tetrafluoride SiF 4 35 1691 4 643 KR Sulfur Dioxide So2 69 1488 2 858 KR Sulfur Hexafluoride SF 6 26 1592 6 516 KR Sulfury...

Страница 37: ...Series 810 Instruction Manual Appendix B Specifications Mounting Instructions Appendix B Product Specifications Mounting IM 81 B 1 ...

Страница 38: ...Appendix B Specifications Mounting Instructions Series 810 Instruction Manual B 2 IM 81 ...

Страница 39: ...parentheses Certified drawings are available on request Nylon Flow Body Mount the Mass Trak to a chassis with two 6 type B self tapping screws CAUTION These screws should extend into the flow body no further than 15 4mm If screws extend further than 15 4mm the flow body may be damaged See Figure 2 1 Figure B 1 Mounting the Mass Trak Model 810 C IM 81 B 3 ...

Страница 40: ...Series810 Appendix C Pin Connection Appendix C Pin Connections IM 81 C 1 ...

Страница 41: ... charge to Buyer provided return or rejection of product is made within a reasonable period but no longer than one 1 year for calibration and non calibration defects from date of delivery To assure warranty service customers must register their products online on Sierra s website Online registration of all of your Sierra products is required for our warranty process Register now at www sierrainstr...

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