Sierra Instruments Instruction Manual
Smart-Trak
®
2 Series 100
78
Mass Flow Rates
101 Micro-Trak: 0 to 4 sccm
100L low flow body: 0 to 10 sccm to 0 to 50slpm
100M medium flow body: 0-20 to 0-300 slpm
100H high flow body: 0-100 to 0-1000 slpm
Flow ranges specified are for nitrogen at 760 mm Hg and 21°C (70°F) or for an equivalent;
other engineering units are available (e.g., nlpm, scfh, nm
3
/h or kg/h)
Gas Pressure
500 psig (34 barg) maximum, burst tested to 750 psig (52 barg).
Pressure Drop across a Meter
Pressure must be above the values in the table below. Note that pressure increases
with flow rate.
Minimum Pressure Drop for Air, Mass Flow Meters
Flow Rate
(slpm)
Pressure Drop in PSI (mbar)
Low Flow
¼ inch
fittings (std)
Low Flow
3/8 inch
fittings (opt.)
Medium
Flow
3/8 or ½ inch
fittings
High Flow
Small Bore (100H)
(std up to 500 slpm)
½ comp fittings
High Flow
Large Bore (H1, H2)
(std 501-1000 slpm)
3/4 comp fittings
0.1
0.36 (24.5)
N/A
N/A
N/A
N/A
0.5 0.36
(24.5) N/A
N/A
N/A
N/A
1 0.37
(25.4) N/A
N/A
N/A
N/A
10
0.46 (31.7)
0.41 (28.6)
N/A
N/A
N/A
20
0.66 (45.7)
0.47 (32.7)
0.5 (34)
N/A
N/A
30
N/A*
0.59 (40.9)
0.5 (34)
N/A
N/A
40
N/A*
0.77 (53.3)
0.5 (34)
N/A
N/A
50
N/A*
1.00 (68)
0.5 (34)
N/A
N/A
100
N/A
N/A
1.0 (68)
1.0 (68)
0.5 (34)
150
N/A
N/A
2.0 (136)
1.2 (81.6)
0.5 (34)
200
N/A
N/A
3.0 (204)
1.5 (102)
0.5 (34)
250
N/A
N/A
4.0 (272)
1.8 (122.4)
0.5 (34)
300
N/A
N/A
5.5 (374)
2 (136)
0.6 (408)
350
N/A
N/A
7.5 (510)
2.5 (170)
0.7 (476)
400
N/A
N/A
10 (680)
3 (204)
0.9 (612)
450
N/A
N/A
N/A
3.5 (238)
1.1 (748)
500
N/A
N/A
N/A
4 (272)
1.3 (884)
750 N/A N/A
N/A
N/A*
3.0
204)
1000 N/A
N/A
N/A
N/A*
5.0
(340)
Note: tests performed at 21 degrees C, outlet at ambient pressure
*Larger fittings recommended for these flow rates because these fittings reduce overall
performance.