Document No.: 1P0446-1 Rev. B, April 7, 2014
19
Section 5 -
Equipment Orientation
This section includes a general description of the plasma system as well as a more detailed
description of the controls and indicators.
5.1
General Description
The IoN 3 MHz system is a tabletop plasma chemistry reactor designed to provide the medical,
scientific, and educational and microelectronics community with plasma technology at a moderate
cost. PVA TePla America Inc. is able to provide such capability by providing a simple to operate
instrument which can perform repeatable plasma chemical reactions.
Figure 5-1
IoN 3 MHz
The IoN 3 MHz is equipped with an internally housed, solid-state RF Power Supply. This RF Power
generator is a solid state crystal controlled oscillator designed to provide up to 150 watts of
continuous wave 13.56 MHz power to the reaction chamber. The frequency of 13.56 MHz is one of a
limited number of frequencies permitted by the Federal Communications Commission (FCC) for
plasma applications.
Maximum power transfer from the power supply to the reaction chamber is accomplished by
matching the output impedance of the amplifier to the input impedance of the reaction chamber.
The front of the IoN 3 MHz consists of a front control panel containing the function controls, abort
switch, diagnostic LED’s and timer
. The main PC board that controls the IoN 3 MHz system functions
is mounted directly behind the front display. In order to allow for easy and modular repair, the front
panel can be removed and replaced with a different front panel and PC board, if needed.
The back panel has the utility supply, and breaker. Inside the IoN 3 MHz enclosure is a system
controlled gas feed solenoid valve, a vacuum port system, PC boards and the impedance matching
network which ensures efficient transfer of power from the RF power supply to the reactor chamber.
The front loading chamber and chamber door are made from aluminum. The backside of the
aluminum sample holder is designed to connect to the
RF
feedthrough rail and
Ground
feedthrough
rail on the back center of the aluminum chamber.