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Document No.: 1P0446-1 Rev. B, April 7, 2014

NOTICE

This is a PVA TePla America Inc. publication which is protected by copyright. Original copyright date

2010. No part of this document may be photocopied, reproduced, or translated to another language

without the prior written consent of PVA TePla America Inc. The information contained in this

publication is subject to change without notice.

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PVA TePla America Inc.

251 Corporate Terrace

Corona, CA 92879 USA

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Содержание IoN 3

Страница 1: ...Document No 1P0446 1 Rev B April 7 2014 1 TECHNICAL MANUAL OPERATION AND MAINTENANCE IoN 3 MHz 251 Corporate Terrace Corona California 92879 951 371 2500 ...

Страница 2: ...uced or translated to another language without the prior written consent of PVA TePla America Inc The information contained in this publication is subject to change without notice Contact Us PVA TePla America Inc 251 Corporate Terrace Corona CA 92879 USA Customer Service 951 270 3952 Direct 951 371 2500 x221 Toll Free 800 527 5667 Website www pvateplaamerica com Email customerservice pvateplaameri...

Страница 3: ...on 4 Installation 14 4 1 Facilities Requirements 14 4 2 Recommended Work Area Allowance 15 4 3 System Assembly 16 4 4 Initial Startup 17 Section 5 Equipment Orientation 19 5 1 General Description 19 5 2 Controls and Indicators 20 Section 6 Theory of Operation 23 Section 7 Operation Procedures 25 7 1 Standard Operating Procedure 25 Section 8 Service and Maintenance 26 8 1 Requesting Service 26 8 2 ...

Страница 4: ...iled description of the controls and indicators The operation section gives step by step instructions for operation of the equipment The service section contains the information on warranties preventative maintenance trouble shooting and parts replacement Text conventions used in the manual are as follows x buttons the operator is instructed to actuate are listed in all CAPITAL LETTERS x section h...

Страница 5: ... viewed from the front of the system The screened outlet in the bottom right leads to the vacuum valve and thus to the vacuum pump SAMPLE HOLDER A sample holder is provided the top shelf is for Direct Plasma and the bottom middle shelf is for RIE Figure 1 1 Sample holder The RF feed through rails design on the inside back of the chamber provides RF and ground to the sample holder by way of two sma...

Страница 6: ...pply to the reaction chamber is accomplished by matching the output impedance of the generator to the input impedance of the reaction chamber AUTOMATIC TUNING An auto tuning system is installed for the impedance matching network The auto tuning adds circuitry which continually monitors the forward to reverse power ratio during processing and positions air capacitors for optimum power transfer to t...

Страница 7: ...23 53 15 79 14 86 11 47 30 0 19 21 12 44 11 68 9 02 25 0 15 01 9 69 9 03 6 97 20 0 11 30 7 40 6 81 5 26 15 0 8 46 5 39 4 90 3 78 10 0 6 10 3 54 3 15 2 43 5 0 3 74 1 69 PRESSURE INDICATOR The IoN 3 MHz will report the actual pressure reading accurate within 20 mTorr on the front PRESSURE display This pressure reading will give a reading of the chamber pressure After the PROCESS START button has bee...

Страница 8: ...rocess timer stops since the RF reflected power will be over limit An audible alarm will beep until the system tunes and the reflected power drops within acceptable limits In cases where the process pressure is too high to tune the system will fault out in 25 seconds The user has the ability to abort the process if they choose to do so by depressing the PROCESS ABORT toggle switch This gives the s...

Страница 9: ...n oil be used for oxygen gas applications as well as other gas mixtures Note The sound pressure level with the above pump is 50 dB PUMP OIL MIST ELIMINATOR Collects and condenses the oil mist generated during pump operation This leads to lower pump oil consumption and a cleaner operation If the system is to be run with a fluorine based process gas a mist eliminator is suggested SPARE PARTS KIT Inc...

Страница 10: ... a situation that has a possibility of injury or death if the proper procedures are not followed ELECTRICAL As with all electrical equipment powered from line voltage caution is warranted whenever external panels are removed and or electrical wiring is exposed All electronics are designed with safety in mind and conform to common voltage directives Internal DC voltages generated are 12 12 volts or...

Страница 11: ...o prevent burns Thermal Hazard Warns personnel of hot surfaces inside the machine that may cause burns if touched It should be on or next to the load door UV Warning Warns personnel that looking into the UV light may be hazardous The IoN 3 MHz has UV shielding on the outside of the viewport window This warning label is located on or next to the load door CHEMICAL HAZARD The pump oil can be a skin ...

Страница 12: ...hes on the IoN 3 MHz system case on the top of the left side cover and on the top of the back right pump cover and one single interlock switch that is activated when the chamber door is closed DO NOT OVERRIDE THESE SAFETY INTERLOCKS These interlocks are engineered into the IoN 3 MHz to prevent injury to operating personnel These will shut off RF power if they are not activated The chamber door mus...

Страница 13: ...on late notification of shipping damage will be denied Keep all shipping containers and materials in case it should be necessary to return any item to PVA TePla America Inc All service and warranty work is done at the manufacturer s site Place the system components on the selected work surfaces Remove all packing materials including any that might be present in the chamber of the system Please vie...

Страница 14: ...6061 T6 high grade aerospace aluminum Electrical 110 220VAC 1 phase 10 amp 50 60 Hz 18 AWG 3 wire The power cord is supplied by PVA TePla America Inc Process Gases x Regulated to 10 PSIG before entering the system x Connections made by 25 O D corrosion resistant materials such as stainless steel or Teflon tubing supplied by purchaser Other materials can generate particulate matter via corrosion wh...

Страница 15: ...s drawn into the system through the two vents on either side of the system and out through the upper fans on the back top of the system Blocking the vents or preventing proper air flow could cause the system to overheat and malfunction Figure 4 1 Work Area Allowance You will need approximately 23 in the back of the system when you change the pump oil ...

Страница 16: ... used x pump exhaust capability The pump exhaust should have an exhaust line that vents outside of the facility To ensure rapid pump down times position pump as close as possible to the IoN 3 MHz but not on same surface due to possible vibration from the pump SYSTEM CONNECTIONS 1 With a voltmeter verify the line voltage is correct then plug in the system AC cord 2 Make sure the circuit breaker on ...

Страница 17: ...in the ON up position 2 Push AC ON 3 Turn on the vacuum pump at the pump 4 Set display SELECTOR switch to PRESSURE TORR 5 Depress the VACUUM switch to commence pumping down the reactor chamber 6 Observe the chamber pressure level on the display it should read 1 Torr in less than 5 minutes and under 35 Torr after 20 minutes 7 Wait 20 minutes to allow any residual moisture to exit the system 8 Note ...

Страница 18: ...t of the IoN 3 MHz chamber and will report a pressure reading on the front DISPLAY This pressure reading will give a relative measure of the system pressure and is meant to provide a low cost means of monitoring pressure The operator will need to note the pressure readings on the DISPLAY and know the relationship of the displayed number to the process required Normal operating pressure will range ...

Страница 19: ...deral Communications Commission FCC for plasma applications Maximum power transfer from the power supply to the reaction chamber is accomplished by matching the output impedance of the amplifier to the input impedance of the reaction chamber The front of the IoN 3 MHz consists of a front control panel containing the function controls abort switch diagnostic LED s and timer The main PC board that c...

Страница 20: ... PORT to which the vacuum pump is attached VENT VALVE and EXHAUST MANIFOLD The VENT VALVE is a normally open valve that will allow the chamber to vent to atmosphere whenever the VACUUM PORT is not activated This normally open vent valve is also a safety feature When the VACUUM switch is released or turned off no illumination the chamber is isolated from the pump and the VENT VALVE allows air to pa...

Страница 21: ...d provides a way to meter flow into the chamber The ball in the flowmeter does not have to rise for gas to flow into the chamber A rise in chamber pressure is an indication of gas flow The LED Diagnostic Lights 10 thru 14 will give the user a visual output of the various IoN 3 MHz functions and confirm that the various modules are functioning correctly 10 Interlocks LED there are three interlocks ...

Страница 22: ...ff the flow of electricity if the current demand is over 10 amps To reset the system simply push this circuit breaker lever to the ON or up position 16 AC1 This IEC60227 male AC Power plug allows for 110V to 230V connection to the IoN 3 MHz Requires a grounded three prong plug with a minimum conductor size of 1 31mm2 Various plugs can be provided depending on local electrical requirements 17 Back ...

Страница 23: ...rial or specimen is loaded into the reaction chamber The chamber is evacuated to a mild vacuum 25 1 Torr by a mechanical vacuum pump A process gas is drawn through the chamber over the specimen increasing the chamber pressure to between 25 1 Torr depending on the application RF power is applied to the chamber at a frequency of 13 56 MHz This excites the process gas atoms or molecules and dissociat...

Страница 24: ...Document No 1P0446 1 Rev B April 7 2014 24 Figure 6 1 Plasma System Operational Sequence ...

Страница 25: ...he process gas is allowed into the chamber when the pressure reaches 35 Torr the crossover pressure 7 You will see a glow discharge through the view port window 8 Adjust the FLOWMETER to allow gas into the chamber 9 Adjust the FLOWMETER to set the PRESSURE to the reading you desire the system is designed to operate from 5 to 1 2 Torr 10 Timer will shut off the RF power and gas flow and end the pla...

Страница 26: ...ns please call the PVA TePla America Inc Customer Service Department 8 2 User Maintenance The required user performed maintenance for the IoN 3 MHz Plasma System is minimal However regular attention to the suggested maintenance tasks listed below will help to ensure proper operation of the system To ensure maximum performance and process repeatability the following items should be checked at regul...

Страница 27: ... When using ventilation exhaust tubing oil mist will tend to condensate on the tube walls and not free float into the atmosphere thereby resulting in minimal gas emissions By ventilating exhaust emissions away from the pump this eliminates any oil mist in the room or area where the pump is located and eliminates any oil dripping or leaking onto any adjacent surface or floor OIL MIST ELIMINATOR ORI...

Страница 28: ...eaker on the back of the system in the on or up position 2 Chamber will not evacuate when VACUUM switch is depressed and illuminated x Is vacuum pump operating x Can you hear the vacuum pump 3 System will not pump down to minimum base pressure below 30 Torr x Is the chamber door o ring dirty If so clean the chamber door o ring Replace o ring if damaged x Is chamber door property positioned and sea...

Страница 29: ...vacuum line contaminated or corroded internally x Is the vacuum pump being allowed to pump the chamber down for excessive periods of time leading to back streaming of pump oil into the chamber The pump foreline loop should prevent this from happening ...

Страница 30: ...y d In the event of non compliance with this warranty PVA TEPLA AMERICA INC shall at its option modify adjust repair or replace the Equipment PVA TEPLA AMERICA INC will at its option absorb return shipping charges PVA TEPLA AMERICA INC reserves the right to charge for warranty service in the event Equipment is initially shipped or thereafter is transshipped to a location other than the ship to loc...

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