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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ253E

P611 Positioners

User Manual

Version: 1.2.0

Date: 13.04.2021

This document describes the following products:



P611.1

Linear nanopositioner

P-611.1S/.10



P611.XZ / P611.2

XZ and XYZ nanopositioner

P-611.2S/.20/.XZS/.XZ0



P611.3

NanoCube® XYZ nanopositioner

P-611.3S/.3SF/.3O/.3OF



P611.Z

Vertical nanopositioning stage

P-611.ZS/.Z0

.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0

= with LEMO connector(s)

.3S/.3SF/.3O/.3OF

= with D-sub connector

Содержание P-611 Series

Страница 1: ... Manual Version 1 2 0 Date 13 04 2021 This document describes the following products P 611 1 Linear nanopositioner P 611 1S 10 P 611 XZ P 611 2 XZ and XYZ nanopositioner P 611 2S 20 XZS XZ0 P 611 3 NanoCube XYZ nanopositioner P 611 3S 3SF 3O 3OF P 611 Z Vertical nanopositioning stage P 611 ZS Z0 1S 10 2S 20 XZS XZ0 ZS Z0 with LEMO connector s 3S 3SF 3O 3OF with D sub connector ...

Страница 2: ...PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 13 04 2021 Document number PZ253E CBo Version 1 2 0 Subject to change without...

Страница 3: ... Overview 9 3 2 Product View 10 3 3 Product Labeling 12 3 4 Scope of Delivery 12 3 5 Suitable Electronics 13 3 6 Accessories 13 3 7 Technical Features 14 3 7 1 PICMA Piezo Actuators 14 3 7 2 Flexure Guides 14 3 7 3 Strain Gauge Sensors SGS 14 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installing 17 5 2 Connecting the P 611 to the Protective Earth Conductor 18 5 3 Mounting the P 611 20 5...

Страница 4: ...mer Service 33 10 Technical Data 35 10 1 Specifications 35 10 1 1 Data Table 35 10 1 2 Maximum Ratings 40 10 1 3 Ambient Conditions and Classifications 41 10 2 Dimensions 42 10 3 Torque for Stainless Steel Screws A2 70 49 10 4 Pin Assignment 49 11 Old Equipment Disposal 53 12 EU Declaration of Conformity 55 ...

Страница 5: ...Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation Failure to comply could lead to minor injury Precautionary measures fo...

Страница 6: ... Explanation Positioner Electrically driven mechanics here P 611 with one or more motion axes Electronics Piezo amplifier or piezo controller that supplies the operating voltage for positioners or piezo actuators Piezo amplifier Electronics without sensor evaluation for open loop operation of positioners and piezo actuators Piezo controller Electronics with sensor evaluation for closed loop operat...

Страница 7: ...al Multi Channel Piezo Controller E727T0005 User Manual E 727 xF Digital Multi Channel Piezo Controller E 836 Piezo Amplifier PZ250E User Manual PIMikroMove SM148E Software Manual P 5xx P 6xx P 7xx Piezo Positioners PZ240EK Short Instructions 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 33 Downloading Manual...

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Страница 9: ... as follows depending on the model Model Motion Axis 1S 10 in one axis horizontally X 2S 20 in two axes horizontally X Y XZS XZ0 in one axis horizontally and in one axis vertically X Z 3S 3SF 3O 3OF in two axes horizontally and in one axis vertically X Y Z ZS Z0 in one axis vertically Z Vertical mounting is only possible under certain conditions It is only possible to use the P 611 as intended in ...

Страница 10: ...not open the P 611 Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pull the plug connector out of the electronics during operation Positioners with D sub plug connector Touching the contacts in the plug connector can lead to an electric shock max 130 V DC and minor injuries Do...

Страница 11: ...2 3 Organizational Measures User manual Always keep this user manual together with the P 611 The latest versions of the user manuals are available for download p 3 on our website Add all information from the manufacturer to the user manual for example supplements or technical notes If you give the P 611 to a third party include this user manual as well as other relevant information provided by the...

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Страница 13: ...oner Model Description P 611 2S XY nanopositioner 100 µm 100 µm strain gauge sensors P 611 20 XY nanopositioner 120 µm 120 µm without sensor P 611 XZS XZ nanopositioner 100 µm 100 µm strain gauge sensors P 611 XZ0 XZ nanopositioner 120 µm 120 µm without sensor P 611 3 NanoCube XYZ nanopositioner Model Description P 611 3S NanoCube XYZ nanopositioner 100 µm 100 µm 100 µm strain gauge sensors P 611 ...

Страница 14: ...P 611 ZS Vertical nanopositioning stage 100 µm strain gauge sensor P 611 Z0 Vertical nanopositioning stage 120 µm without sensor 3 2 Product View The figures serve as examples and can differ from your positioner model Figure 1 Example of product view 1 Motion platform 2 Base body 3 Protective earth connector 4 Cable exit ...

Страница 15: ...t Description P 611 Positioners PZ253E Version 1 2 0 11 Direction of motion of the P 611 The arrows indicate the positive direction of motion in each case P 611 1x P 611 Zx P 611 2x P 611 XZx P 611 3x P 611 3xF ...

Страница 16: ...tention to the manual Old equipment disposal p 53 WWW PI WS Manufacturer s address website Manufacturer s logo CE conformity mark Symbol for the protective earth conductor marks the protective earth connector of the P 611 p 18 Figure 2 Residual Voltage warning sign on the connector of the P 611 Residual Voltage warning Risk of electric shock p 6 for models with D sub connector 3 4 Scope of Deliver...

Страница 17: ...ler D sub 7W2 1 E 664 NanoCube Piezo Controller D sub 25 3 E 727 x E 727 xAP Digital Multi Channel Piezo Controller D sub 25W3 3 E 727 xF Digital Multi Channel Piezo Controller D sub 25W3 3 In some cases adapter cables p 13 are necessary for connecting When using single channel electronics each motion axis requires its own individual electronics 3 6 Accessories Adapter cables for models with LEMO ...

Страница 18: ...guiding accuracy A flexure guide is an element that is free of static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any l...

Страница 19: ...ioner model Figure 3 P 611 Holding surfaces to be used on the base body see arrows Areas to be protected against the application of force Motion platform framed with a dashed line Nonanodized surfaces crosshatched 1 Unpack the P 611 with care a Spread the foam packaging apart with one hand b Grip the positioner on the surfaces marked by the arrows c Grip all of the positioner s connecting cables w...

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Страница 21: ... Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pull the plug connector out of the electronics during operation Positioners with D sub plug connector Touching the contacts in the plug connector can lead to an electric shock max 130 V DC and minor injuries Do not touch the contacts in the plug connector Use screws to secure the position...

Страница 22: ...ctly tightened screws can cause damage Pay attention to the torque range p 49 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the P 611 or affect sensor processing by the electronics Do not use extension cables If you need longer cables contact our customer service department p 33 5 2 Connecting the P 611 to the Protective Earth...

Страница 23: ...ting the protective earth conductor Suitable screwdriver Figure 4 Connecting the protective earth conductor profile view 1 Base body of the P 611 2 Flat washer 3 Lock washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 611 to the protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Use the M4 screw together with the flat and...

Страница 24: ...P 611 NOTICE Tensile stress on piezo actuator due to mounting in wrong orientation The P 611 is intended for mounting in horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destroys the piezo actuator If you want to mount the P 611 in a different orientation to that intended e g vertically or upside down co...

Страница 25: ...x 3 screws of suitable size and length p 42 When mounting other models of the P 611 4 screws of suitable size and length p 42 Suitable screwdriver Mounting the P 611 1 Position the P 611 on a flat underlying surface 2 Insert the screws When mounting a P 611 1x or 2x Insert the screws from above into the countersunk holes in the base body of the P 611 When mounting a P 611 XZx 3x 3xF or Zx Insert t...

Страница 26: ...P 611 only when the surface contacting the P 611 s platform has a flatness of at least 20 μm For applications with large temperature changes Fix loads to the P 611 only when they have the same or similar thermal expansion properties as the P 611 NOTICE Center of load at unsuitable position If the center of load is located too far away from the center of the platform e g tall loads and unwanted lev...

Страница 27: ...mal position Figure 7 Example of an optimally placed load Center of load at an unsuitable position Figure 8 Tall load and center of load too far above the platform Figure 9 Unwanted lever effect and center of load on the side of the platform Requirements You have read and understood the general notes on installation p 17 The P 611 is not connected to the electronics ...

Страница 28: ...the load on the P 611 so that the mounting holes in the load and the holes in the platform are in line 2 Hold the load so that it cannot move while tightening the screws 3 Fix the load by tightening the screws in the mounting holes p 42 provided Pay attention to the specified torque range p 49 for the screws 4 Check that the load is sitting firmly on the platform ...

Страница 29: ... to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 611 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric fla...

Страница 30: ...n is indicated by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 611 is operated near to its resonant frequency If you notice oscillation In closed loop operation switch off the servo mode immediately In open loop operation stop the P 611 immediately INFORMATION Positive direction of axis motion is ...

Страница 31: ...ing and transporting the P 611 and for modifications The P 611 is discharged via the discharge resistor inside the electronics from PI Discharging a Positioner Connected to the Electronics In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller In open loop operation Set the piezo voltage to 0 V on the electronics Discharging a Positi...

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Страница 33: ...o actuators Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 611 7 2 Cleaning the P 611 NOTICE Damage from ultrasonic cleaning Ultrasonic cleaning can damage the P 611 Do not do any ultrasonic cleaning Requirements You have discharged the piezo actuators of the P 611 p 27 You have disconnected the P 611 from the electronics Cl...

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Страница 35: ...anual Reduced accuracy The base body or the motion platform is warped Mount the P 611 onto surfaces with the following characteristics only Flatness of at least 20 μm The thermal expansion properties are similar to those of the P 611 e g surfaces made of aluminum Mount loads onto the P 611 with the following characteristics only The contact surface of the load has a flatness of at least 20 μm The ...

Страница 36: ...see rear panel or bottom which contains the serial number of the positioner to be connected The positioner starts oscillating or positions inaccurately Servo control parameters incorrectly set because for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the controller 3 Adjust the servo con...

Страница 37: ...ion Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on...

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Страница 39: ...20 µm 20 0 Travel range closed loop 100 µm Resolution open loop 0 2 0 2 nm typ Resolution closed loop 2 nm typ Linearity error closed loop 0 1 typ Repeatability 10 nm typ Pitch 5 5 µrad typ Yaw 20 20 µrad typ Flatness 10 10 nm typ Mechanical properties Stiffness in motion direction 0 2 0 2 N µm 20 Resonant frequency no load 400 400 Hz 20 Resonant frequency under load 30 g 300 300 Hz 20 Resonant fr...

Страница 40: ...5 E 610 E 621 E 625 E 665 E 836 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction P 611 2S P 611 20 P 611 XZS P 611 XZ0 Unit Tolerance Active axes X Y X Y X Z X Z Motion and positioning Integrated sensor SGS SGS Travel range at 20 to 120 V open loop 120 120 120 120 µm 20 0 Travel ran...

Страница 41: ... type PICMA P 885 PICMA P 885 PICMA P 885 PICMA P 885 Electrical capacitance 1 5 1 5 1 5 1 5 µF 20 Miscellaneous Operating temperature range 20 to 80 20 to 80 20 to 80 20 to 80 C Material Aluminum steel Aluminum steel Aluminum steel Aluminum steel Dimensions 44 mm 44 mm 25 mm 44 mm 44 mm 25 mm 44 mm 44 mm 34 mm 44 mm 44 mm 34 mm Mass 0 235 0 235 0 27 0 27 kg 5 Cable length 1 5 1 5 1 5 1 5 m 10 mm ...

Страница 42: ... 10 µrad typ Mechanical properties Stiffness 0 3 0 3 N µm 20 Resonant frequency X Y Z no load 350 220 250 350 220 250 Hz 20 Resonant frequency under load in X Y Z 30 g 270 185 230 270 185 230 Hz 20 Resonant frequency under load in X Y Z 100 g 180 135 200 180 135 200 Hz 20 Push pull force capacity in motion direction 15 10 15 10 N max Load capacity 15 15 N max Drive properties Ceramic type PICMA P ...

Страница 43: ...rated sensor SGS Travel range at 20 to 120 V open loop 120 120 µm 20 0 Travel range closed loop 100 µm Resolution open loop 0 2 0 2 nm typ Resolution closed loop 2 nm typ Linearity error 0 1 typ Repeatability 10 nm typ Tilt θZ motion in Z 5 5 µrad typ Tilt θX motion in Z 20 20 µrad typ Tilt θY motion in Z 5 5 µrad typ Mechanical properties Stiffness 0 45 0 45 N µm 20 Resonant frequency no load 460...

Страница 44: ...sitioner Maximum operating voltage Maximum operating frequency no load 1 Maximum power consumption2 P 611 1S P 611 10 20 to 120 V 133 Hz 3 9 W P 611 2S P 611 20 20 to 120 V 115 Hz in X 90 Hz in Y 3 4 W in X 2 6 W in Y P 611 XZS P 611 XZ0 20 to 120 V 122 Hz in X 113 Hz in Z 3 6 W in X 3 3 W in Z P 611 3S P 611 3SF P 611 3O P 611 3OF 20 to 120 V 117 Hz in X 73 Hz in Y 83 Hz in Z 3 4 W in X 2 1 W in ...

Страница 45: ...indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 80 C Storage temperature 20 C to 80 C Transport temperature 25 C to 85 C Overvoltage category II Protection class I Degree of pollution 1 Degree of protection according t...

Страница 46: ...10 Technical Data 42 Version 1 2 0 PZ253E P 611 Positioners 10 2 Dimensions Dimensions in mm Note that a comma is used in the drawings instead of a decimal point Figure 10 P 611 1S ...

Страница 47: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 43 Figure 11 P 611 10 ...

Страница 48: ...10 Technical Data 44 Version 1 2 0 PZ253E P 611 Positioners Figure 12 P 611 2S and P 611 20 ...

Страница 49: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 45 Figure 13 P 611 XZS and P 611 XZ0 ...

Страница 50: ...ioners Figure 14 P 611 3O P 611 3S P 611 3OF and P 611 3SF A B C D i F G H J K L P 611 3O 44 38 2 37 8 43 2 3 5 44 3 5 10 P 611 3S 44 38 2 37 8 43 2 3 5 44 3 5 10 P 611 3OF 44 38 2 37 8 44 2 3 2 3 5 50 40 3 5 10 P 611 3SF 48 40 40 44 2 3 2 4 1 50 40 19 13 ...

Страница 51: ...10 Technical Data P 611 Positioners PZ253E Version 1 2 0 47 Figure 15 P 611 ZS ...

Страница 52: ...10 Technical Data 48 Version 1 2 0 PZ253E P 611 Positioners Figure 16 P 611 Z0 ...

Страница 53: ...rective 2230 10 4 Pin Assignment D sub 25 connector For P 611 3S 3SF 3O 3OF only Figure 17 D sub 25 connector Front with connections D sub 25 connector pin assignment for the P 611 3S 3SF Pin Signal Function 1 Output SGS 3 B1 sensor signal 2 Input SGS 3 reference voltage 3 Output SGS 2 B1 sensor signal 4 Input SGS 2 reference voltage 5 Output SGS 1 B1 sensor signal 6 Input SGS 1 reference voltage ...

Страница 54: ...hannel 3 Z axis 24 Input Piezo voltage channel 2 Y axis 25 Input Piezo voltage channel 1 X axis D sub 25 connector pin assignment for the P 611 3O 3OF Pin Signal Function 1 to 10 Free 11 Input Piezo voltage channel 3 Z axis 12 Input Piezo voltage channel 2 Y axis 13 Input Piezo voltage channel 1 X axis 14 to 22 Free 23 Input Piezo voltage channel 3 Z axis 24 Input Piezo voltage channel 2 Y axis 25...

Страница 55: ...nnectors according to model one connector per axis P 611 model Connector front view Pin Signal Function Connector shell 1S 10 2S 20 XZS XZ0 ZS Z0 PZT Inner connecto r Input Piezo voltage 20 to 120 V Ground 1S 2S XZS ZS SGS 1 Input Supply voltage for strain gauge sensor Cable shield 2 Output Sensor signal 1 3 Output Sensor signal 2 4 GND Supply voltage ground ...

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Страница 57: ...tional national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH Co KG Auf der Roemer...

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Страница 59: ...onformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 EMC EN 61326 1 RoHS EN 50581 or EN IEC 63000 12 EU Declaration of Conformity ...

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